semi合集-English.pdf - 第2289页

SEMI E81-0600 © 1999, 2 000 26 Documen tRevision (from Document Mgt) Maintena n c eSpeci f ica tion Facto rySup ervi sor (from Factory Opera tions Comp) Resou rceTrac kingSuperviso r JobS uper visor (from Job Supervisor …

extends resource composition to provide machine

resources as composites of machine (sub)resources and

specialized process resources with associated process

capabilities. The Machine Resource interface also

extends the resource state model to include the states

and substates of SEMI E10 and SEMI E58. Specific

subtypes of Machine Resource and Machine are

possible. The CIM Framework defines the subtypes for

Production Machine and Process Resource. Additional

subtypes to support Transport Machine and Storage

Machine interfaces are also possible if there are

additional attributes or behaviors required that Machine

and Machine Resource interfaces do not already

provide.

7.3.3.3.8 Port, Sensor, Durable, Consumable, Person,

etc.

7.3.3.3.8.1 The other support resource subtypes

provide additional, resource-specific, attributes and

behavior. Note that durables are also subtypes of

Material so they can be moved and tracked as material.

Consumables are not currently considered as resources,

but a given implementation of the CIM Framework

could have consumables be support resources to track

their consumption and replenish them as regular

maintenance. Persons are considered support resources

to schedule them and associate them with machines and

other resources and to have associated “maintenance”

schedules for training and certification.

7.3.3.4 Resource Capabilities

7.3.3.4.1 Resources have associated capabilities, as

Figure 9 shows. Factory operations and scheduling use

capabilities to identify resources with the capability to

perform a specific task. A CIM Framework capability is

represented as a text string, providing flexibility to

define types of capabilities appropriate for a variety of

resources. For example, an MESFactory resource may

have capabilities defined in terms of its capacity and the

product families it can produce, and a Process Resource

may have capabilities that define its C

process

capability and its throughput.

7.3.3.4.2 The Capability interface maintains a list of

Resources which have that specific capability, and the

associated Resource interface maintains a list of its

overall possible capabilities and the subset of possible

capabilities that resource is assigned to perform.

7.3.3.4.3 The Capability interface is specialized for

Process Capabilities associated with Process Resources.

This provides an association to the Process Operation

Specifications a Process Resource can perform and the

Process Durables and the person Skills needed to

support the Process Capability. Other Resources can

specialize the Capability interface.

7.3.3.5 Resource Tracking and Maintenance

7.3.3.5.1 Support Resources have an associated

resource tracking and maintenance management

function, as Figure 10 shows. A Resource Tracking

Supervisor for a Resource monitors and records

resource usage and status and creates Maintenance Jobs

according to Maintenance Specifications. Factory

Operations, with the aid of a scheduler or dispatcher,

assigns Persons and other support resources defined in

the Maintenance Specification and initiates

Maintenance Job execution. The Resource Tracking

Supervisor then supervises Maintenance Job execution.

The Maintenance Job and Resource Tracking

Supervisor specialize the Job/Job Supervisor pair as

Section 7.3.4.6 describes. The Resource Tracking

Supervisor also records appropriate history, such as

maintenance logs and resource utilization and state, in

the Named History Collection for the Resource

(inherited from Named Entity). Resource type-specific

specializations of the resource tracking and

maintenance interfaces are possible.

7.3.4 Job Architecture

7.3.4.1 This section describes the job management and

control architecture of the CIM Framework. It defines a

hierarchical job supervision and control structure that

manages factory-level jobs (create product material to

fill enterprise product requests) and implements these

factory-level jobs by creating and managing machine-

level process jobs and transport jobs, coordinated with

maintenance jobs and other support jobs. The job

control architecture defines and manages relationships

between manufacturing resources (process equipment,

transport equipment, people), material groups (lots,

product groups, process groups, transport groups) and

specifications (product specifications, process flows

and recipes). This is the central functional architecture

which integrates the CIM Framework components into

a coherent manufacturing execution system

architecture. The concepts are derived from existing

standards and related standards efforts [ANSI],

[ALBUS], [OMA], [WfMC].

DocumentRevision

(from Document Mgt)

MaintenanceSpecification

FactorySupervisor

(from Factory Operations Comp)

ResourceTrackingSupervisor

JobSupervisor

(from Job Supervisor AIG)

SupportResource

Person

(from Person Mgt Comp)

Job

(from Job Supervisor AIG)

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informs

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0..*0..*

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Figure 10

Resource Tracking and Maintenance Architecture

7.3.4.2 Job Architecture Concepts

7.3.4.2.1 A job represents a unit of work requested of

and performed (or facilitated) by a factory entity that

results in some change to the overall factory state.

There are several important aspects of a job within the

CIM Framework:

• A job typically takes a non-zero time to perform

and has a non-zero chance of refusal or failure.

• A job may encapsulate a decomposition into a

combination of jobs/tasks/activities.

• There is a notion of higher-level jobs and lower-

level jobs. Coordination of lower-level jobs are

delegated to other job supervisors to ensure that the

higher-level job is completed.

• There is a job requestor.

7.3.4.2.2 The CIM Framework specifies a number of

structures for job control. The complexity and

variability of the factory requires some organizational

structure and separation of manufacturing tasks.

Breaking up a complex task into a coordinated

interoperation of simpler tasks enables practical

solutions to complex problems (the principle of “divide

and conquer”). This results in a key organizational

structure based on the factory resource hierarchy of

Figure 7 and Figure 8 , with the separation of tasks

summarized in Section 7.3.3.3. The job control

architecture defines how tasks are assigned and

coordinated across the hierarchy of factory resources.

7.3.4.2.3 Another key job structure is the relationship

between manufacturing tasks and the material and

resources used to carry out the task. For example,

Factory Operations is responsible for efficiently

allocating machine resources with the required

processing capability to the material work-in-progress

to drive the material through its process flow. A job is a

combination of a requested task and the material and

resources needed to execute that task (see Figure 13).

The relationship between task, material and resource,

combined with a hierarchical job structure (based on a

hierarchical resource structure) results in complex

relationships between tasks, material, and resources at

multiple levels.

7.3.4.2.4 Given the complexity, scope and variability

(chance of failure or partial success) of jobs, the CIM

Framework separates job control into explicit functions.

It does not bury job control into material management

functions for driving process flows, nor does it bury job

control into machine management functions for driving

process operations. The CIM Framework makes job

control explicit, providing an architectural structure to

attach decision support logic (such as scheduling

utilities), business processes (workflow) and business

rules that enforce operational policy. Further, the CIM

Framework distributes and coordinates job control

among factory jobs, production machine jobs, transport

jobs, and maintenance jobs. This allows job control to

manage “local” complexity while coordinating factory-

wide operations toward “global” objectives.

7.3.4.3 Hierarchical Task Structure

7.3.4.3.1 At the lowest level of the factory hierarchy

(the resource level in Figure 7), the tasks are single

process or metrology operations or material

movements. Through a complex, context-dependent

combination of single tasks, products are manufactured

and delivered to customers. This complex combination

of single tasks is a task structure as shown in Figure 11.

In manufacturing operations, these structures are pre-

defined as task procedures, work flows, process

specifications, etc. To accommodate manufacturing

variability and exceptions, though, the structures must

also be adjusted and modified as they are executed. For

example, as factory operations selects specific machine

resources to perform process steps, it may insert

machine-dependent setup tasks and operation

sequences, it may modify step specifications (recipes)

with machine-dependents settings, or it may insert

transport steps to get the material to the machine.

7.3.4.3.2 Notice in Figure 11 that tasks of a higher

level are decomposed into combinations of tasks for

lower level resources. Each manufacturing resource has

a thread of tasks that must be coordinated with the tasks

of other resources. The higher level task is completed

when the combination of lower level tasks is completed.

Figure 11 illustrates this with the coordination of

material movement and processing operations and with

the coordination of operations within the processing

equipment. Resource maintenance, advanced process

control calculations and other tasks must also be

coordinated with material processing, inspection and

movement tasks. The role of job control is to

decompose, coordinate, monitor, adjust, and report on

this hierarchical structure of tasks.

Task: Fill Order

Task: Produce Lot 1

Task: Produce Lot 2 Task: Produce Lot 4

Task: Produce Lot 3

Process

. . .

Move Move

Process

Operations

Time

Level

. . .

Resource

Process

Transport Machine

activity thread

Production Machine

activity thread

Machine Resource

activity thread

Figure 11

Hierarchical Task Structure