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SEMI E82-0705 © SEMI 1999, 2005 1 SEMI E82-0705 SPECIFICATION FOR INTERBAY/IN TRABAY AMHS SEM (IBSEM) This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This edition was app…
SEMI E81-0600 © 1999, 200041
comments. Component suppliers need to explain
how their objects conform to the CIM Framework
behavioral semantics.
8.5 As these factors indicate, assessing the CIM
Framework conformance of supplied components takes
more than just verifying the existence of specific
objects and methods. The key issue is whether a
component supplier provides both the software and its
associated conformance information needed to enable
the use and integration of the component.
9 Related Documents
9.1 The following documents describe programs,
standards, and guidelines used in the development of
the CIM Framework specification.
9.1.1 SEMATECH Documents
Advanced Process Control Framework Initiative
(APCFI) 1.0,6/27/97 (SEMATECH - Technology
Transfer #97063300A-ENG):CIM Framework
Enhanced Machine Component Communications
Driver (MCCD) Final Report (SEMATECH -
Technology Transfer #97073323A-TR).
C++ Reference Implementation for the Computer
Integrated Manufacturing (CIM) Application
Framework: Release 2, 1/4/96 (SEMATECH -
Technology Transfer #95082944B-ENG).
Computer Integrated Manufacturing (CIM) Application
Framework Validation Project: Lessons Learned
During the Automation Software Systems Project
(SEMATECH - Technology Transfer #94102568A-
ENG).
Computer Integrated Manufacturing (CIM)
Development Manual 1.1 - Volumes 1 and 2
(SEMATECH - Technology Transfer #91120794B-
ENG).
Computer Integrated Manufacturing (CIM) Framework
Member Validation Project (FMVP): Phase II Final
Report (SEMATECH - Technology Transfer
#96013061A-TR).
Evolution of WorkStream for Preventive, Predictive
Maintenance (PM) at SEMATECH (SEMATECH -
Technology Transfer #95092966A-TR).
Real-Time Dispatcher (RTD) Computer Integrated
Manufacturing (CIM) Framework Conformance and
Integration Studies (SEMATECH - Technology
Transfer #96023088A-ENG).
Results of the AutoSimulations and TI/WORKS
Integration Feasibility Study (SEMATECH -
Technology Transfer #95092981A-ENG).
SEMATECH Workbench for Integrated Modeling
(SWIM) Enhanced Prototype Functional Specification
5.0, 12/2/93 (SEMATECH - Technology Transfer
#93112072A-ENG).
Semiconductor Generic Manufacturing Model.
(SEMATECH - Technology Transfer #91090704A-
ENG).
Semiconductor Generic Manufacturing Requirements
Specification (SEMATECH - Technology Transfer
#91090703A-ENG).
Strategic Cell Controller (SCC) Program Repository
Contents Guide 1.1 SEMATECH Factory Integration
Technologies (FIT) Project (SEMATECH - Technology
Transfer #93091827B-XFR).
Strategic Computer Integrated Manufacturing (CIM)
Computing Environment Specifications. (SEMATECH
- Technology Transfer #92010916A-ENG)
Technical Summary of CIM Framework-Based
Integration of ASI Real-Time Dispatcher and IBM
Legacy Systems (SEMATECH - Technology Transfer
#96093180A-TR).
NOTICE: SEMI makes no warranties or representa-
tions as to the suitability of the specification set forth
herein for any particular application. The determination
of the suitability of the specification is solely the
responsibility of the user. Users are cautioned to refer
to manufacturer’s instructions, product labels, product
data sheets, and other relevant literature respecting any
materials mentioned herein. These specifications are
subject to change without notice.
The user’s attention is called to the possibility that
compliance with this specification may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this specification,
SEMI takes no position respecting the validity of any
patent rights or copyrights asserted in connection with
any item mentioned in this specification. Users of this
specification are expressly advised that determination
of any such patent rights or copyrights, and the risk of
infringement of such rights, are entirely their own
responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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consent of SEMI.
SEMI E82-0705 © SEMI 1999, 2005 1
SEMI E82-0705
SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published September 1999;
previously published November 2004.
1 Purpose
1.1 This standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport
equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in
addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard
is to facilitate the integration of IBSEM equipment into an automated (e.g., semiconductor fabrication and flat panel
display) factory. This document accomplishes this by defining an operational model for IBSEM equipment as
viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment
operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional
activity that are within the scope of this standard: traffic management characteristics (queuing), parallel interface for
carrier transfer (SEMI E23), transport system controller architecture, and delivery of the transfer unit.
2 Scope
2.1 The scope of this standard is limited to the usage and description of interbay and intrabay AMHS transport
equipment (OHT, OHS, RGT, AGT, DWC) as perceived by a SEMI Equipment Communications Standard 2
(SECS-II) host that complies with the GEM model (as specified in §13). It defines the view of the equipment
through the SECS communication link. It does not define the internal operation of the equipment. It includes a
specific transfer command state model and transport system controller state model as the basis for all equipment of
this class.
2.2 This document assumes that the GEM fundamental requirements and selected additional capabilities (as
specified in §13) have been implemented on the IBSEM equipment. It expands the GEM standard requirements and
capabilities in the areas of state models (TSC, transfer command, vehicle and carrier state models), collection
events, alarm documentation, remote commands, data item variables, and material movement.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Evaluation of SEMI E32 (MMM)
3.1.1 The concepts defined in SEMI E32 were analyzed and included where applicable to the IBSEM, but the GEM
model was used as the basis for IBSEM requirements definition.
3.2 Interbay and Intrabay AMHS Transport Equipment Types
3.2.1 This standard is targeted at the different types of 300 mm and interbay and intrabay AMHS transport
equipment. The term IBSEM equipment refers to all types of transport equipment. The equipment types have
fundamental mechanical differences:
3.2.1.1 Overhead Hoist Transport (OHT) — An overhead rail guided transport system positioned for vertical access
to SEMI E15.1 compliant ports.
3.2.1.2 Over Head Shuttle (OHS) — An overhead rail guided transport system (monorail) positioned for access to
stocker automated interbay input and output ports. The OHS vehicle may or may not contain a transfer agent.
3.2.1.3 Rail Guided Transport (RGT) — A ground-based rail guided transport system positioned for access to SEMI
E15.1 compliant ports.
SEMI E82-0705 © SEMI 1999, 2005 2
3.2.1.4 Automated Guided Transport (AGT) — A ground-based transport system with automated guidance (i.e., no
rail guidance). Automated guidance system allows vehicles to access SEMI E15.1 compliant ports.
3.2.1.5 Direct WIP Conveyer (DWC) — An overhead transport system, based on direct WIP roller conveyers. No
vehicles are used for point to point delivery. The conveyers are positioned for vertical access to SEMI E15.1 ports.
3.2.2 Transport vehicles may contain zero or more internal buffers for carrier transport. If mechanically feasible,
the transport system may acquire or deposit carriers simultaneously. If transported in a safe manner, carrier
transport may occur while occupying the acquire/deposit transfer port(s) of the transport vehicle (e.g., a single
position hoist vehicle). In the context of this standard, a “vehicle” on a DWC is defined as a single carrier in the
transport system.
3.3 Physical Layout Limitations
3.3.1 The equipment controlled by a single TSC must allow for a carrier to be transported from any given source
port to any destination port via a single transfer command without the assistance of an external device (manual or
automated). In other words, if a source port and a destination port are controlled by a TSC, there must not exist a
physical or logical barrier that prevents a carrier from being moved between the two ports. This assumes that the
type of carrier (FOUP, Reticle Pod, etc.) is permitted at the source and destination ports.
4 Referenced Standards
4.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
4.2 Other References
Harel, D., “Statecharts: A Visual Formalism for Complex Systems,” Science of Computer Programming 8 (1987)
231-274.
1
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — Automated Guided Transport
5.1.2 AMHS — Automated Material Handling System
5.1.3 DWC — Direct WIP Conveyor
5.1.4 FOUP — Front Opening Unified Pod
5.1.5 GEM — Generic Equipment Model
5.1.6 ITS — Interbay or Intrabay Transport System
5.1.7 OHS — Over Head Shuttle
5.1.8 OHT — Overhead Hoist Transport
1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945, http://www.elsevier.nl/homepage/browse.htt