semi合集-English.pdf - 第2349页

SEMI E82-0705 © SEMI 1999, 2005 45 STEP COMMENTS HOST TSC COMMENTS 2. Host Command Send (HCS) INFOUPDATE . CARRIERID = “123” . LOTID = “” S2,F41-> 3. <-S2,F42 Host Command Acknowled g e (HCA) 12.5 Stage Delete Comm…

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SEMI E82-0705 © SEMI 1999, 2005 44
STEP COMMENTS HOST TSC COMMENTS
9. <-S1,F4 Selected Equipment
Status Data (SSD)
. CarrierInfo - L,3
.
. (one CarrierInfo
for each carrier)
.
. VehicleInfo - L,2
.
. (one VehicleInfo
for each vehicle)
.
. TransferCommand - L,n
.
. (one
TransferCommand for each
. Active TRANSFER
command)
10. The HOST updates its model of
the system with the
information from the vehicle
and carrier status data.
11. Host Command Send (HCS)
RESUME
S2,F41-> HOST enables the system
to continue operations.
12. <-S2,F42 Host Command Acknowled
g
e
(HCA)
13. <-S6,F11 Event Report Send (ERS)
TSCAutoCompleted
14. Event Report Acknowledge
(ERA)
S6,F12->
15. System continues
processing all commands
that were in process or
q
ueued before/durin
g
the
Host crash or
communication
loss/initialization.
System will also now
process new commands.
12.4 Database Operation
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to u
p
ate the
TSC database with information
associated with carrier 123
2. Host Command Send (HCS)
INFOUPDATE
. CARRIERID = “123”
. LOTID = “LOT456”
. OPERATION = “OP480”
S2,F41-> The Lot and Operation
information associated
with the carrier are
sent to the TSC.
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to remove
the LotID associated with
carrier 123 from the TSC
database
SEMI E82-0705 © SEMI 1999, 2005 45
STEP COMMENTS HOST TSC COMMENTS
2. Host Command Send (HCS)
INFOUPDATE
. CARRIERID = “123”
. LOTID = “”
S2,F41->
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
12.5 Stage Delete Command
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to delete
ALL Stage commands.
2.
Host Command Send (HCS)
STAGEDELETE
S2,F41-> All stage commands are
deleted. No parameters
are included in the
message.
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
13 GEM Capabilities
13.1 The purpose of this section is to specify any SEMI E30 additional capabilities that are required to be supported
by this class of equipment.
13.2 Requirement
13.2.1 This standard requires that the SEMI E30 fundamental requirements and additional capabilities have been
implemented on the IBSEM equipment with the exception of Trace Data Collection, Remote Control, Process
Program Management, and Limits Monitoring and Spooling. The TRANSFER Command State Model will serve as
the Equipment Processing State Model specified in SEMI E30. If these capabilities are implemented, they will be
implemented as required by SEMI E30. The SEMI E30 additional capabilities required by IBSEM are:
Establish Communications,
Dynamic Event Report Configuration,
Variable Data Collection,
Status Data Collection,
Alarm Management,
Equipment Constants,
Equipment Terminal Services,
Clock, and
Control (host-initiated).
SEMI E82-0705 © SEMI 1999, 2005 46
RELATED INFORMATION 1
IBSEM UNIQUE CAPABILITIES
NOTICE: This related information is not an official part of SEMI E82, but was approved for publication by full
letter ballot procedures.
R1-1 Transfer Command Message Examples (SML Format)
R1-1.1 Variable data values specified in the following TRANSFER commands have been chosen arbitrarily for the
purpose of demonstrating message structure/content.
R1-1.2 Transfer Command Message Example for a Single Carrier Transfer
S2,F49
<L [4]
<U2 0> /* DATAID */
<A[0] ‘’> /* OBJSPEC */
<A[8] ‘TRANSFER’> /* RCMD */
<L [2]
<L [2]
<A[11] ‘COMMANDINFO’> /* CPNAME
1
*/
<L[3]
<L[2]
<A[9] ‘COMMANDID’> /* CPNAME */
<A[6] ‘111111’> /* CPVAL */
>
<L[2]
<A[8] ‘PRIORITY’> /* CPNAME */
<U2 5> /* CPVAL */
>
<L[2]
<A[7] ‘REPLACE’> /* CPNAME */
<U2 0> /* CPVAL */
>
>
>
<L [2]
<A[12] ‘TRANSFERINFO’> /* CPNAME
2
*/
<L[3]
<L[2]
<A[9] ‘CARRIERID’> /* CPNAME */
<A[6] ‘123456’> /* CPVAL */