semi合集-English.pdf - 第2352页

SEMI E82-0705 © SEMI 1999, 2005 48 > <L [2 ] <A[12] ‘TRANSFERINFO’> /* CPNAME 2 */ < L [ 3 ] < L [ 2 ] <A[9] ‘CARRIERID’> /* CPNAME */ <A[6] ‘123456’> /* CPVAL */ > < L [ 2 ] <A[10]…

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SEMI E82-0705 © SEMI 1999, 2005 47
>
<L[2]
<A[10] ‘SOURCEPORT’> /* CPNAME */
<A[6] ‘PORTXX’> /* CPVAL */
>
<L[2]
<A[8] ‘DESTPORT’> /* CPNAME */
<A[6] ‘PORTYY’> /* CPVAL */
>
>
>
>
>
R1-1.2 Transfer Command Message Example for a Double Carrier Transfer
S2,F49
<L [4]
<U2 0> /* DATAID */
<A[0] ‘’> /* OBJSPEC */
<A[8] ‘TRANSFER’> /* RCMD */
<L [3]
<L [2]
<A[11] ‘COMMANDINFO’> /* CPNAME
1
*/
<L[3]
<L[2]
<A[9] ‘COMMANDID’> /* CPNAME */
<A[6] ‘111111’> /* CPVAL */
>
<L[2]
<A[8] ‘PRIORITY’> /* CPNAME */
<U2 5> /* CPVAL */
>
<L[2]
<A[7] ‘REPLACE’> /* CPNAME */
<U2 0> /* CPVAL */
>
>
SEMI E82-0705 © SEMI 1999, 2005 48
>
<L [2]
<A[12] ‘TRANSFERINFO’> /* CPNAME
2
*/
<L[3]
<L[2]
<A[9] ‘CARRIERID’> /* CPNAME */
<A[6] ‘123456’> /* CPVAL */
>
<L[2]
<A[10] ‘SOURCEPORT’> /* CPNAME */
<A[6] ‘PORTX1’> /* CPVAL */
>
<L[2]
<A[8] ‘DESTPORT’> /* CPNAME */
<A[6] ‘PORTY1’> /* CPVAL */
>
>
>
<L [2]
<A[12] ‘TRANSFERINFO’> /* CPNAME
2
*/
<L[3]
<L[2]
<A[9] ‘CARRIERID’> /* CPNAME */
<A[6] ‘654321’> /* CPVAL */
>
<L[2]
<A[10] ‘SOURCEPORT’> /* CPNAME */
<A[6] ‘PORTX2’> /* CPVAL */
>
<L[2]
<A[8] ‘DESTPORT’> /* CPNAME */
<A[6] ‘PORTY2’> /* CPVAL */
>
>
>
>
>
SEMI E82-0705 © SEMI 1999, 2005 49
R1-2 Parallel Interface for Carrier Transfer - SEMI E23 Required Transfer
POD
Ceiling
Raised Floor
Overhead Vehicle (OHV)
Stocker
(Side View)
SEMI E23 devices
(Location for OHV)
SEMI E23 device
(Location for AGV/RGV)
Floor
running
AGV/RGV
A
utomated or Rail
Guided Vehicle (AGV/RGV)
POD
E23 Plug
Figure R1-1
SEMI E23 Example Diagram for OHV/AGV/RGV
Figure R1-2
SEMI E23 Example Diagram for DWC