semi合集-English.pdf - 第2383页

SEMI E84-0305 © SEMI 1999, 2005 27 L_REQ (P->A) READY (P->A) HO_AVBL (P->A) ES (P->A) VA (P->A) VS_0/1 (P->A) A M_AVBL (A->P) TR_REQ (A->P) BUSY (A->P) COMPT (A->P) HO_AVBL is Confirmed OFF …

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SEMI E84-0305 © SEMI 1999, 2005 26
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0/1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
step numbers are
for reference only
3
1
4
7
8
9
6
5
2
10
NOTE 1: The HO_AVBL signal turns OFF while the active equipment is confirming the signal in step 5.
Figure 27
Example of Handoff Available Signal
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0/1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
step numbers are
for reference only
3
1
4
7
8
9
6
5
2
10
NOTE 1: The HO_AVBL signal turns OFF after the T_REQ signal is turned ON. The active equipment confirms the signal is
OFF in step 5.
Figure 28
Example of Handoff Available Signal
SEMI E84-0305 © SEMI 1999, 2005 27
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0/1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL is
Confirmed
OFF
End of
Handshake
step numbers are
for reference only
3
1
4
7
8
9
6
5
2
10
NOTE 1: The HO_AVBL signal turns OFF after the VA signal is turned ON. The active equipment confirms the signal is OFF in
step 5.
Figure 29
Example of Handoff Available Signal
6.3 Error Indication and Detection
6.3.1 Error Indication
6.3.1.1 To support operational reliability, this specification will define the following capabilities to indicate errors
on the interface:
a)
inform handoff unavailable which means the passive equipment (or passive OHS) is not available for material
handoff operation to the active equipment.
b)
inform emergency stop request to the active equipment (or active stocker).
c) inform handoff timeout error (see the Application Notes in Appendix 1 for examples of appropriate error
messages).
6.3.2 Error Detection
6.3.2.1 Interlock timeouts are required to detect handoff sequence error between the active and passive equipment.
This specification defines the interlock timeouts to be monitored by the active equipment and the passive equipment.
Table 7 shows the interlock timeouts for active equipment. Table 8 shows the timeouts for the passive equipment.
TAx (x is a number) represents the timer for the active equipment, and TPx (x is a number) represents the timer for
the passive equipment. The range for all timers (except TD0) shall be from 1 second to 999 seconds. All timer
setpoints shall be user programmable.
6.3.2.2
The delay timer specifies the delay time between VALID signals within one continuous sequence of
handoffs. Specifically, it signifies the delay following the VALID signal turning OFF on the completion of the first
handoff and the VALID signal turning ON at the start of the second handoff. The delay timer is required because
the passive equipment may need a certain time margin to detect the second VALID signal transition to ON. Table 9
shows the delay timer. All timer setpoints shall be user programmable.
6.3.2.3
The recommended and optional delay timer TD0 defines the timing between CS_0 or CS_1 ON and VALID
ON for the active equipment as shown in the signal time diagrams. In this way, the passive equipment can predict
SEMI E84-0305 © SEMI 1999, 2005 28
the timing in which the active equipment will output the signal allowing the transfer interlock to be performed
accurately.
Table 7 Active Equipment Timer
Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)
TA1 VALID ON - L_REQ ON
VALID ON - U_REQ ON
1–999 2
TA2 TR_REQ ON - READY ON 1–999 2
TA3 COMPT ON - READY OFF 1–999 2
#1
The minimum timer value does not define the response time of the active equipment.
#2
These timer values must be implemented for detecting timeouts and are not meant to specify the delay time between signals. The equipment
response time must be faster than the timeout of the timer.
Table 8 Passive Equipment Timer
Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)
TP1 L_REQ ON - TR_REQ ON
U_REQ ON - TR_REQ ON
1–999 2
TP2 READY ON - BUSY ON 1–999 2
TP3 BUSY ON - CARRIER DETECT
BUSY ON - CARRIER REMOVE
1–999 60
TP4 U_REQ OFF - BUSY OFF
L_REQ OFF - BUSY OFF
1–999 60
TP5 READY OFF - VALID OFF 1–999 2
TP6 VALID OFF - VALID ON (Continuous handoff) 1–999 2
#1
The minimum timer value does not define the response time of the passive equipment.
#2
These timer values must be implemented for detecting timeouts and are not meant to specify the delay time between signals. The equipment
response time must be faster than the timeout of the timer.
Table 9 Delay Timer
Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)
TD0 CS ON - VALID ON 0.1–0.2 0.1
TD1 VALID OFF - VALID ON 1–999 1
6.3.3 Error Recovery
6.3.3.1 Error recovery procedures are not defined in this specification. Recovery procedures may require operator
assistance and/or proprietary procedures specific to the equipment. It is recommended that the recovery procedure
(ex, abort interlock sequence and set to restart/complete) be provided on the active equipment and the passive
equipment.
6.4 Connector Type, Signal, and Pin Assignment
6.4.1 The connector type for the passive equipment side must be type DB-25 socket housing (female) as specified
in ISO 2110:1989. The connector will have female 4-40 threaded jack screw locks. Suitable 25 pin connectors
known as Type “D” are similar to Amphenol MIN RAC 17 series with jack screw locks. It is recommended that the
connector on the passive equipment should be appropriately labeled. As shown in Figure 30, this standard specifies
the connector on the passive side optical PI/O for floor based vehicles (RGV, AGV, others) (case 1), as well as the
active to passive connector between an overhead delivery system and production equipment (case 2). Figure 31
defines the PI/O point of interface for the interbay AMHS (OHS and stocker). If the OHS is the active device in the
interbay AMHS then the stocker is the passive device. Likewise, if the OHS is the passive device, then the stocker
is the active device.