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SEMI E87-0705 © SEMI 1999, 2005 1 SEMI E87-0705 SPECIFICATION FOR CARRI ER MANAGEMENT (CMS) This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This edition was approved for …

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SEMI E86-0200 © SEMI 1999, 200031
}; // end Skill
// -------------------------- SkillRequirement --------------------------
interface SkillRequirement : NamedEntity {
void setDescription (in string description) raises (FrameworkErrorSignal);
string getDescription ( ) raises (FrameworkErrorSignal);
void setDesignator (in string designator) raises (FrameworkErrorSignal);
string getDesignator ( ) raises (FrameworkErrorSignal);
void setRequiredResult (in string result) raises (FrameworkErrorSignal);
string getRequiredResult ( ) raises (FrameworkErrorSignal);
TimeWindow effectivity ( ) raises (FrameworkErrorSignal);
}; // end SkillRequirement
}; // end SkillManagement
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SEMI E87-0705 © SEMI 1999, 2005 1
SEMI E87-0705
SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published September
1999; previously published March 2004.
1 Purpose
1.1 This document provides a standardized behavior for host view communication with production equipment
during the coordination, execution, and completion of automated and manual carrier transfers to and from the
equipment and, if it exists, its internal buffer space.
2 Scope
2.1 This is a standard that covers host and equipment communication for SEMI E15.1 300 mm load ports.
2.2 The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and
manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this document provides
state models and scenarios that define the host interaction with the equipment for the following:
Carrier transfer between AMHS vehicles and production equipment load ports.
Carrier transfers to/from production equipment internal buffer space.
Equipment and load port access mode switching.
Carrier to load port association.
CarrierID verification and Carrier slot map verification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This standard applies to semiconductor equipment with SEMI E15.1 compliant load ports. It may also be
applied to other manufacturing equipment that supports automated carrier transfers, and/or contains an internal
buffer. This standard is intended to be used for production equipment. It may or may not be applied to other types of
equipment. Also, stocker load ports are not addressed by this standard.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E53 — Event Reporting
SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking
SEMI E87-0705 © SEMI 1999, 2005 2
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
NOTICE: As listed or revised, all documents cited shall be the latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — Automated Guided Transport
5.1.2 AGV — Automated Guided Vehicle
5.1.3 AMHS — Automated Material Handling System
5.1.4 FIMS — Front-Opening Interface Mechanical Standard
5.1.5 FOUP — Front Opening Unified Pod
5.1.6 GEM — Generic Equipment Model
5.1.7 OHT — Overhead Hoist Transport
5.1.8 PGV — Person Guided Vehicle
5.1.9 PIO — Parallel Input/Output Interface
5.1.10 RGT — Rail Guided Transport
5.1.11 RGV — Rail Guided Vehicle
5.2 Definitions
5.2.1 Automated Material Handling System — an automated system to store and transport materials within the
factory.
5.2.2 automation — the degree to which activities of machines or production systems are self-acting. In this
standard automation provides methods that will reduce the amount of operator intervention required.
5.2.3 buffer — a set of one or more locations for holding carriers at/inside the production equipment.
5.2.4 carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates.
5.2.5 CarrierID — a readable and unique identifier for the carrier.
5.2.6 CarrierID read — the process of the equipment reading the CarrierID from the carrier.
5.2.7 carrier ID tag (tag, ID tag) — a physical device for storing Carrier ID and other information. There are two
basic types of tags, read-only tags and read/write tags. [SEMI E99]
5.2.8 Collection Event —
a collection event is an event (or grouping of related events) on the equipment that is
considered to be significant to the host.
5.2.9 docked position — the position where the carrier is ready for substrate extraction or insertion.
5.2.10 FIMS port — the substrate access port where the FOUP is opened and closed.
5.2.11 fixed buffer equipment — production equipment that has only fixed load ports and no internal buffer for
carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing.
5.2.12 host — the factory computer system or an intermediate system that represents the factory and the user to the
equipment.
5.2.13 internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports.
5.2.14 internal buffer equipment — equipment that uses an internal buffer.
5.2.15 load — the operation of placing a carrier on a load port.
5.2.16 load port — the interface location on the equipment where carriers are loaded and unloaded.