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SEMI E87-0705 © SEMI 1999, 2005 17 # Previous State Trigger New State Actions Comment 3 (no state) Normal: A carrierID not currently existing at the equipment is suc cessfully read . Abnormal: A carrierID is read success…

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SEMI E87-0705 © SEMI 1999, 2005 16
about the carrier. When the carrierID is provided by the Bind or the Carrier Notification service, the carrier object
shall be instantiated in the ID NOT READ substate. When the carrierID is provided by the carrier ID reader, the
carrier shall be instantiated in the WAITING FOR HOST substate. When the Carrier is instantiated by the
ProceedWithCarrier service, the carrier shall be instantiated in the ID VERIFICATION OK substate. Finally when
the carrier is instantiated by the CancelCarrier service, the carrier will be instantiated in the ID VERIFICATION
FAILED substate.
10.7.3.3.1 ID NOT READ — This is a substate of CARRIER ID STATUS. This state is active whenever the
CarrierID has not been read by the equipment.
10.7.3.3.2 ID VERIFICATION FAILED — This is a substate of CARRIER ID STATUS and is active when the
carrierID has failed verification by the host following the CancelCarrier service. This is a final state.
10.7.3.3.3 ID VERIFICATION OK — This is a substate of CARRIER ID STATUS and is active as soon as the
CarrierID has been accepted. The ID is determined to be accepted by either successful verification by the equipment
or the host, or by bypassing ID read because a carrier ID reader is not available and the BypassReadID variable is
set to true. This is a final state.
10.7.3.3.4 WAITING FOR HOST — This is a substate of CARRIER ID STATUS and is active during the period of
time when the carrierID has been read by the equipment successfully or unsuccessfully and has not yet been verified
by the host.
10.7.3.4 CARRIER SLOT MAP STATUS — This is a substate of CARRIER and indicates the current status of the
carrier with respect to its slot map. It has four substates, SLOT MAP NOT READ, WAITING FOR HOST, SLOT
MAP VERIFICATION FAILED, SLOT MAP VERIFICATION OK. The initial default entry sub-state is SLOT
MAP NOT READ.
10.7.3.4.1 SLOT MAP NOT READ — This is a substate of CARRIER SLOT MAP STATUS and is the default
entry state. It is active when the Carrier is first loaded at the equipment until the Slot Map has been read successfully
by the equipment at the Substrate Port.
10.7.3.4.2 SLOT MAP VERIFICATION FAIL — This is a substate of CARRIER SLOT MAP STATUS and is
active when the Slot Map has been read by the equipment and has failed verification by the host. This is a final
state.
10.7.3.4.3 SLOT MAP VERIFICATION OK — This is a substate of CARRIER SLOT MAP STATUS and is active
as soon as the slot map has been verified. This is a final state.
10.7.3.4.4 WAITING FOR HOST — This is a substate of CARRIER SLOT MAP STATUS and is active when the
equipment is waiting for input from the host.
10.7.4 Carrier State Transition Table
10.7.4.1 Table 7 indicates the triggers and the expected behavior of the instantiated carrier object.
Table 7 Carrier State Transition Definition
# Previous State Trigger New State Actions Comment
1 (no state) A carrier is instantiated. CARRIER None. No event is required for this
transition
2 (no state) Normal: A Bind or Carrier
Notification service is received.
ID NOT READ None. Data required to be available for
this event report:
CarrierID
CarrierIDStatus
SEMI E87-0705 © SEMI 1999, 2005 17
# Previous State Trigger New State Actions Comment
3 (no state) Normal: A carrierID not
currently existing at the
equipment is successfully read.
Abnormal: A carrierID is read
successfully but an equipment
based verification failed.
WAITING FOR
HOST
None. Data required to be available for
this event report:
CarrierID
PortID
CarrierIDStatus
Normally, this transition will
happen after a successful ID read
if a bind service has not been
issued (host based verification) or
abnormally if a bind service is
followed by a successful ID read
and an unsuccessful equipment
based verification.
4 (no state) ID Read fail or
UnknownCarrierID Events:
ProceedWithCarrier service is
received.
ID
VERIFICATION
OK
A carrier is
instantiated
having the
carrierID
provided by the
Proceed
WithCarrier
service.
Data required to be available for
this event report:
CarrierID
CarrierIDStatus
This transition can happen only if
a bind service has not been
received.
5 (no state) ID Read fail or
UnknownCarrierID Events: A
CancelCarrier service is
received.
ID
VERIFICATION
FAIL
A carrier is
instantiated
having the
carrierID
provided by the
Cancel Carrier
service.
Data required to be available for
this event report:
CarrierID
CarrierIDStatus
This transition can happen only if
a bind service has not been
received.
6 ID NOT
READ
Carrier ID is read successfully
and the equipment has verified
the carrierID successfully.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
7 ID NOT
READ
Carrier ID is read
unsuccessfully.
WAITING FOR
HOST
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
8 WAITING
FOR HOST
A ProceedWithCarrier service
is received.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
9 WAITING
FOR HOST
A Cancel Carrier Service is
received.
ID
VERIFICATION
FAIL
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
10 ID NOT
READ
BypassReadID variable is set to
FALSE, and a carrier is
received when the id reader is
not in service or not installed.
WAITING FOR
HOST
Wait for
ProceedWith-
Carrier.
Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
SEMI E87-0705 © SEMI 1999, 2005 18
# Previous State Trigger New State Actions Comment
11 ID NOT
READ
BypassReadID varia
b
le is set to
TRUE, and a carrier is received
when the id reader is not in
service or not installed.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
12 (no state) A carrier is instantiated. SLOT MAP
NOT READ
None. No event is required for this
transition.
13 SLOT MAP
NOT READ
Slot Map is read and verified
successfully by the equipment.
SLOT MAP
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
CarrierAccessingStatus
SlotMapStatus
14 SLOT MAP
NOT READ
N
ormal host based verification:
Slot Map is read successfully
and the equipment is waiting
for host verification.
Equipment based verification
fail: Slot Map is read
successfully but equipment
based verification has failed.
Slot map read fail: Slot Map
cannot be read.
Abnormal substrate position
within the carrier: The Slot
Map read has indicated an
abnormal substrate position.
WAITING FOR
HOST
Save new slot
map in the
SlotMap attribute.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
SlotMap (if valid)
Reason
SlotMapStatus
15 WAITING
FOR HOST
A ProceedWithCarrier service
is received.
SLOT MAP
VERIFICATION
OK
Proceed with the
Carrier as
instructed.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
SlotMapStatus
16 WAITING
FOR HOST
A CancelCarrier service is
received.
SLOT MAP
VERIFICATION
FAIL
Prepare the
Carrier for
Unload.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
CarrierAccessingStatus
SlotMapStatus
17 (no state) A carrier object is instantiated. NOT
ACCESSED
None. No event is required for this
transition
18 NOT
ACCESSED
The equipment starts accessing
the carrier.
IN ACCESS None. Data required to be available for
this event report:
CarrierID
CarrierAccessingStatus
19 IN ACCESS The equipment finishes
accessing the carrier normally.
CARRIER
COMPLETE
None. Data required to be available for
this event report:
CarrierID
CarrierAccessingStatus