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SEMI E87-0705 © SEMI 1999, 2005 28 Verification Method Desired Host Actions Before Verification Equipment Action When Carrier is Loaded Host Actions After Load Host Based None. The production equipment checks the carrie …

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SEMI E87-0705 © SEMI 1999, 2005 27
Verification
Method Desired
Host Actions before
Load
Equipment Action When Carrier Is Loaded Host Actions after Load
Carrier Notification
Service: The host
executes the
CarrierNotification
service to inform the
equipment of the
future arrival of a
carrier to an
unspecified port.
Carrier Notification Service: The production
equipment reads the Carrier ID from the
carrier, compares it to the CarrierID supplied
with a CarrierNotification service.
Verification Passed: Transition 6 of the
Carrier State Model occurs. The production
equipment proceeds with processing.
Verification Passed: None.
Verification Failed: Not Applicable; because
there is no association between a load port
and a carrier, equipment based verification
failure is not possible. If a carrier that has not
been instantiated arrives at a load port, the
equipment shall consider this as host based
verification.
Verification Failed: Not Applicable,
because there is no association
between a load port and a carrier,
equipment based verification failed
is not possible. If a carrier that has
not been instantiated arrives at a load
port, the equipment shall consider
this as host based verification.” The
host will respond with either a
ProceedWithCarrier or a
CancelCarrier Service. (See Host
Based verification method).
Host Based None required, the
host may issue a
ReserveAtPort service.
The production equipment reads the
CarrierID and reports it to the host in an event
report. Following carrierID read the
equipment initiates Transition 3 of the Carrier
State Model and a carrier object with the
carrierID equal to the one determined by the
carrierID read is instantiated. The carrier shall
not be opened or moved to an internal buffer
in the production equipment until and unless
the ProceedWithCarrier service is received
from the host.
Verification Passed: The host sends
a ProceedWithCarrier service
indicating the verification passed.
Verification Failed: The host uses
the CancelCarrier or
CancelCarrierAtPort service to force
the carrier to the unload position.
14.3 Slot Map Verification
14.3.1 Table 13 defines the methods for verification of the Carrier Slot Map. Some user’s factory operations may
not require strict management of the slot map. In this case the user may use the host based verification method.
Table 13 Slot Map Verification Methods
Verification
Method Desired
Host Actions Before
Verification
Equipment Action When
Carrier is Loaded
Host Actions After Load
Production
Equipment Based
The host provides a
Slot Map with the
Bind service or the
ProceedWithCarrier
service.
The production equipment
checks the carrier slot map
and compares it to the slot
map supplied by the host.
Either transition 13 or 14 of
the Carrier State Model
occurs.
Verification Passed: None, the production equipment
proceeds with the carrier.
Verification Failed: If the host decides to cancel
processing, the host issues the CancelCarrier service. If
the host decides to continue processing, the host issues
the ProceedWithCarrier service.
SEMI E87-0705 © SEMI 1999, 2005 28
Verification
Method Desired
Host Actions Before
Verification
Equipment Action When
Carrier is Loaded
Host Actions After Load
Host Based None. The production equipment
checks the carrier slot map
and reports it to the host in
an event report. The host has
the responsibility for
verifying the slot map.
Verification Passed: The host sends a
ProceedWithCarrier indicating the verification passed.
Verification Failed: If the host decides to cancel
processing, the host issues the CancelCarrier service. If
the host decides to continue processing, the host issues
the ProceedWithCarrier service.
14.4 This table clarifies the relation of the reservation and verification to the related services.
Table 14 Reservation and Verification Relation to Service
Information Provided with Service Reser-
vation
CarrierID
Verification
Carrier SlotMap
Verification
Service Used
Port ID Carrier ID Carrier
SlotMap
1 Yes Equipment based Equipment based Bind Yes Yes Yes
2 Yes Equipment based Host based Bind Yes Yes No
3 Yes Host based Host based ReserveAtPort Yes No No
ProceedWithCarrier (following ID
read and host verification).
No Yes No
4 Yes Host based Equipment based ReserveAtPort Yes No No
ProceedWithCarrier to provide
slotmap (following ID read and
host verification).
No Yes Yes
5 No Equipment based Equipment based CarrierNotification No Yes Yes
6 No Equipment based Host based CarrierNotification No Yes No
7 No Host based Equipment based ProceedWithCarrier to provide
slotmap (following ID read and
host verification).
No Yes Yes
8 No Host based Host based ProceedWithCarrier (following ID
read and host verification).
No Yes No
15 Carrier Release Control
15.1 For both fixed buffer and internal buffer equipment, where Carrier Read/Write technology is used, the carrier
must remain at the write position where the tag may be accurately written on until the Host has completed all of its
read and write operations. For this purpose, a variable that affects the equipment releasing a carrier is defined.
15.2 Carrier Hold Trigger — Both fixed buffer equipment and internal buffer equipment shall allow the user to
select a trigger to release the carrier when reading/writing is complete. Carrier release does not mean the equipment
must move the carrier from the location it currently occupies, only that it is permissible to do so.
15.2.1 CarrierHold Trigger set to Host Release — If the Carrier Hold trigger is set to Host Release, both fixed
buffer and internal buffer equipment shall hold the carrier at the write position until the CarrierRelease service is
received.
15.2.2 CarrierHold Trigger set to Equipment Release — If the Carrier Hold trigger is set to Equipment Release, the
equipment shall release the carrier based on the Carrier Object state model transition to CARRIER COMPLETE or
CARRIER STOPPED.
15.3 For fixed load port equipment in AUTO access mode, it may be desirable to leave a completed carrier
clamped, locked, or at the docked position until the AMHS arrives to pick it up. This reduces the chance that an
operator may remove it. For this purpose, a variable that affects UnClamp Control is provided to allow the user to
select the desired behavior. When the equipment finishes with a carrier, the Carrier State transitions from
ACCESSING to CARRIER COMPLETE (normal) or CARRIER STOPPED (abnormal) and the equipment sends
SEMI E87-0705 © SEMI 1999, 2005 29
either the CarrierComplete event (normal) or the CarrierStopped event (abnormal). If the carrier has a door, the
door shall be closed by this point.
15.4 Fixed buffer equipment shall allow the user to select a trigger to unclamp the carrier based on AMHS arrival at
the equipment. If the access mode is MANUAL, the unclamp control trigger has no effect.
15.4.1 UnclampControl trigger set to CARRIERCOMPLETE/CARRIERSTOPPED Triggered Unclamp
— The
equipment automatically unclamps the carrier when the Carrier Status transitions to CARRIERCOMPLETE or
CARRIERSTOPPED.
15.4.2 UnclampControl trigger set to AMHS Triggered Unclamp — The equipment behavior depends upon the
Load Port Access State. If the Loadport Access State is AUTO, the carrier remains clamped, locked, or at the
docked position (it will remain at the docked position only if that is the only position on which the carrier can be
clamped) until AMHS has arrived. The AMHS arrives and begins a PIO unload sequence. The carrier must be at or
moved to the pickup position and any additional clamp mechanisms must be released by the appropriate point of the
sequence.
NOTE 2: It may be necessary to adjust timeouts for the AMHS to allow a few more seconds to move the carrier into the pickup
position.
16 Services
16.1 The purpose of this section is to define the message services required to support CMS functionality.
16.1.1 This message service definition has four parts:
A service description table.
A service parameter table.
A service parameter value table that specifies the type and range of the parameters.
A service state mapping table that defines the states in which each service is valid.
16.2 Service Message Description
16.2.1 There are two types of services:
An initial message and response between the service user and the service provider.
A notification message from the service provider to the service user that does not require a response.
16.2.2 The “TYPE” column in the following table is used to indicate whether the service consists of a
request/response message pair, “R”, or a single notification message, “N”.
Table 15 Service Message Description
Service Name Type Description
Bind R This service shall associate a CarrierID to a load port and shall cause the load port to
transition to the RESERVED state.
CancelAllCarrierOut R This service shall cause all CarrierOut services to be removed from the queue.
CancelBind R This service cancels a CarrierID to load port association and shall cause the load port to
transition to the NOT RESERVED state.
CancelCarrier R This service shall Cancel the current carrier related action, and the production equipment
shall return the carrier to the unload position of the load port, or an internal buffer position,
depending on the carrier’s position in the production equipment.
CancelCarrierAtPort R This service shall Cancel the current carrier related action, and the production equipment
shall return the carrier to the unload position of the load port.
CancelCarrierNotification R This service shall cause the equipment to destroy a carrier object instantiated through a prior
CarrierNotification.
CancelCarrierOut R This service shall cause a specified CarrierOut service to be removed from the queue by the
production equipment.