semi合集-English.pdf - 第2464页

SEMI E87-0705 © SEMI 1999, 2005 33 Parameter Name Form Description PortID Integer 1 to n. ID number of a load port. The PortID number should be the same as the load port number. PortList List 1 to n items. List of n item…

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SEMI E87-0705 © SEMI 1999, 2005 32
Parameter Name Form Description
ErrorCode Enumerated:
Valid for all services listed below
Unsupported option [service] requested
Command not valid for current state
Insufficient parameters specified
Parameters improperly specified
Bind
Load port does not exist
Load port already in use
Object identifier in use, Duplicate CarrierID
Invalid attribute value
Unknown attribute name
CancelAllCarrierOut
(none)
CancelBind
Load port does not exist
Unknown object instance – Unknown CarrierID
CancelCarrier
Load port does not exist
Unknown object instance – Unknown CarrierID
Missing Carrier
CancelCarrierAtPort
Load port does not exist
CancelCarrierNotification
Unknown object instance – Unknown CarrierID
CancelCarrierOut
Unknown object instance – Unknown CarrierID
CancelReservationAtPort
Load port does not exist
CarrierIn
Unknown object instance – Unknown CarrierID
CarrierNotification
Object identifier in use, Duplicate CarrierID
Invalid attribute value
Unknown attribute name
CarrierOut
Load port does not exist
Unknown object instance – Unknown CarrierID
CarrierReCreate
Unknown object instance – Unkown CarrierID
Invalid attribute value
Unknown attribute name
Command not valid for current state
ChangeAccess
Load port does not exist
ChangeServiceStatus
Load port does not exist
ProceedWithCarrier
Load port does not exist
Unknown object instance – Unknown CarrierID
Invalid attribute value
Unknown attribute name
ReserveAtPort
Load port does not exist
Load port already in use
Contains the code for the specific error found.
ErrorText Text Text in support of the error code.
SEMI E87-0705 © SEMI 1999, 2005 33
Parameter Name Form Description
PortID Integer
1 to n.
ID number of a load port. The PortID number should
be the same as the load port number.
PortList List
1 to n items.
List of n items
PortID
1
.
.
n PortID
n
PropertiesList List
1 to n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ServiceStatus Enumerated:
IN SERVICE,
or OUT OF SERVICE.
The desired transfer service status of the specified list
of load ports.
Status A list of ErrorCode/ErrorText pairs. Reports any errors found.
16.3.2 The “Acknowledge, request will be performed with completion signaled by a later event” response to a
service, may apply to services listed in the table below. If this does apply, the supplier must document the event that
signals completion. Any service not included in Table 17 shall respond with “Acknowledge, command has been
performed.”
16.3.2.1 Events that may signal completion are listed in Table 17.
Table 17 Deferred Completion Events
Service Events that may signal completion
CarrierOut CarrierLocation Changed Event
Load Port State Change Event (transition 9)
CarrierIn CarrierLocation Change Event
Load Port State Change Event (transition 8)
CancelCarrier CarrierLocation Changed Event
Load Port State Change Event (transition 9)
CancelCarrierAtPort CarrierLocation Changed Event
Load Port State Change Event (transition 9)
ChangeService LoadPortTransferState Change Event (transition 2 and 3)
ChangeAccess Load Port Access Mode State Change Event (transition 2 and 3)
16.4 Service Message Definitions
16.4.1 The following tables specify the allowable/required parameters for each service. The column marked
“REQ/IND” specifies which parameters are required to be supported for CMS compliance (see ¶7.3.4.3).
16.4.2 Bind
16.4.2.1 The Bind service is used to associate a CarrierID with a load port. The Bind can contain a PropertiesList of
carrier object attributes that are supplied by the host. A carrier object is instantiated when this service is used
successfully. The Bind service will be rejected if the carrier specified has already been instantiated through the Bind
or CarrierNotification service, or a carrierID read. The Bind service also triggers a transition in the Load Port
Reservation state model from NOT RESERVED to RESERVED.
SEMI E87-0705 © SEMI 1999, 2005 34
Table 18 Bind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The PortID where a carrier is expected.
CarrierID M — The expected CarrierID.
PropertiesList C — A list of name value pairs providing attributes for the
carrier object being instantiated with the Bind service.
CMStatus — M Information concerning the result of the service.
16.4.3 CancelAllCarrierOut
16.4.3.1 The CancelAllCarrierOut service is sent to internal buffer production equipment to cancel all CarrierOut
services in queue.
Table 19 CancelAllCarrierOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CMStatus — M Information concerning the result of the service.
16.4.4 CancelBind
16.4.4.1 The CancelBind request is used to cancel the association between a port and a Carrier ID. The carrier
object is destroyed when this service is used successfully. The CancelBind service also triggers a transition in the
Load Port Reservation state model from RESERVED to NOT RESERVED.
Table 20 CancelBind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which to cancel the load port to carrier association.
Either PortID or CarrierID must be specified.
CarrierID C — The CarrierID for which to cancel the load port to carrier association.
Either PortID or CarrierID must be specified.
CMStatus — M Information concerning the result of the service.
16.4.5 CancelCarrier
16.4.5.1 The CancelCarrier request is used to stop a carrier. If the carrier is at a load port, then it shall be returned to
the load/unload location of the load port and made ready for unload. If the carrier is at an internal location the carrier
will return to an internal buffer location. A subsequent CarrierOut request is required for the production equipment
to move the carrier to the external load port. The production equipment shall reject this service if issued after
substrates have been removed for processing.
Table 21 CancelCarrier Service Parameters
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The carrierID to cancel.
CMStatus — M Information concerning the result of the service.
PortID C — The PortID where the carrier object is located. This
parameter is not required if the carrier object has been
previously instantiated.