semi合集-English.pdf - 第2466页

SEMI E87-0705 © SEMI 1999, 2005 35 16.4.6 CancelCarrierAtPort 16.4.6.1 CancelCarrierAtPort is used to abort any carrier at a designat ed port. T his service can be used when the carrierID of the carrier at the design ate…

100%1 / 7923
SEMI E87-0705 © SEMI 1999, 2005 34
Table 18 Bind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The PortID where a carrier is expected.
CarrierID M — The expected CarrierID.
PropertiesList C — A list of name value pairs providing attributes for the
carrier object being instantiated with the Bind service.
CMStatus — M Information concerning the result of the service.
16.4.3 CancelAllCarrierOut
16.4.3.1 The CancelAllCarrierOut service is sent to internal buffer production equipment to cancel all CarrierOut
services in queue.
Table 19 CancelAllCarrierOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CMStatus — M Information concerning the result of the service.
16.4.4 CancelBind
16.4.4.1 The CancelBind request is used to cancel the association between a port and a Carrier ID. The carrier
object is destroyed when this service is used successfully. The CancelBind service also triggers a transition in the
Load Port Reservation state model from RESERVED to NOT RESERVED.
Table 20 CancelBind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which to cancel the load port to carrier association.
Either PortID or CarrierID must be specified.
CarrierID C — The CarrierID for which to cancel the load port to carrier association.
Either PortID or CarrierID must be specified.
CMStatus — M Information concerning the result of the service.
16.4.5 CancelCarrier
16.4.5.1 The CancelCarrier request is used to stop a carrier. If the carrier is at a load port, then it shall be returned to
the load/unload location of the load port and made ready for unload. If the carrier is at an internal location the carrier
will return to an internal buffer location. A subsequent CarrierOut request is required for the production equipment
to move the carrier to the external load port. The production equipment shall reject this service if issued after
substrates have been removed for processing.
Table 21 CancelCarrier Service Parameters
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The carrierID to cancel.
CMStatus — M Information concerning the result of the service.
PortID C — The PortID where the carrier object is located. This
parameter is not required if the carrier object has been
previously instantiated.
SEMI E87-0705 © SEMI 1999, 2005 35
16.4.6 CancelCarrierAtPort
16.4.6.1 CancelCarrierAtPort is used to abort any carrier at a designated port. This service can be used when the
carrierID of the carrier at the designated port is unknown.
Table 22 CancelCarrierAtPort Service Parameters
Parameter Name Req/Ind Rsp/Conf Description
PortID M — Any carrier that exist on the load port specified shall be
made ready for unloading.
CMStatus — M Information concerning the result of the service.
16.4.7 CancelCarrierNotification
16.4.7.1 The CancelCarrierNotification is used by the host to request the equipment cancel a previous
CarrierNotification service. This service shall cause the equipment to destroy the carrier object specified.
Table 23 CancelCarrierNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The CarrierID of the carrier object to destroy.
CMStatus — M Information concerning the result of the service.
16.4.8 CancelCarrierOut
16.4.8.1 The CancelCarrierOut service is sent to internal buffer production equipment to cancel a queued
CarrierOut.
Table 24 CancelCarrierOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — CarrierID for the CarrierOut service that is being cancelled.
CMStatus — M Information concerning the result of the service.
16.4.9 CancelReservationAtPort
16.4.9.1 The CancelReservationAtPort service is sent by the host to cancel a reservation at the load port. The load
port will enter the UNRESERVED State after receiving this service. A Port reserved by the physical initiation of a
carrier out operation may not be cancelled by this service.
Table 25 CancelReservationAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve
CMStatus — M Information concerning the result of the service.
16.4.10 CarrierIn
16.4.10.1 The CarrierIn service is only used to request the internal buffer equipment internalize a carrier that has
been moved to the load port via a previous CarrierOut service. When using host based verification, the production
equipment shall move the carrier in to the internal buffer for the first time after receiving the ProceedWithCarrier
request. If the CarrierIn service is received by the production equipment without previously having received a
CarrierOut service for the carrier, the service will be refused.
SEMI E87-0705 © SEMI 1999, 2005 36
Table 26 CarrierIn Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The CarrierID for the carrier to internalize.
CMStatus — M Information concerning the result of the service.
16.4.11 CarrierNotification
16.4.11.1 The Carrier Notification service is used by the host to inform the equipment that a Carrier with the ID
specified will be arriving at the equipment. The load port is not specified; therefore no carrier to load port
association takes place. A carrier object with the ObjID equal to the carrierID specified in the service is instantiated.
“The CarrierNotification service will be rejected if the carrier specified has already been instantiated through the
Bind or CarrierNotification service, or a carrierID read.
Table 27 CarrierNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The CarrierID of the carrier object to instantiate.
PropertiesList C The PropertiesList of the carrier to instantiate.
CMStatus — M Information concerning the result of the service.
16.4.12 CarrierOut
16.4.12.1 The CarrierOut service is sent to internal buffer production equipment, to request that the equipment
move the specified carrier to a load port, as soon as the carrier is completed. When the CarrierOut service is started,
the destination load port state becomes TRANSFER BLOCKED, and the load port’s association state becomes
ASSOCIATED.
16.4.12.2 CarrierOut Queuing
16.4.12.2.1 This service request can be queued by the production equipment. The production equipment is required
to support a queue of n size, where n is equal to the sum of the number of internal buffer locations and the number of
internal FIMS ports. The order of the queue is FIFO for each load port. If the load port is not specified in service
request, the equipment chooses which load port queue to place the CarrierOut service. The queued service does not
take effect until the current substrate handling action is complete (i.e., filling, emptying of the carrier) and the load
port is in the NOT ASSOCIATED state. When a CarrierOut service is queued and the production equipment load
port is currently in the TRANSFER BLOCKED state, the production equipment shall keep the load port in the
TRANSFER BLOCKED state. Then, after the port is cleared, the CarrierOut service shall begin.
Table 28 CarrierOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — CarrierID for the carrier to be moved out.
PortID C — If omitted, the production equipment shall select an appropriate port at the
time the carrier is ready to be moved.
CMStatus — M Information concerning the result of the service.
16.4.13 CarrierRelease
16.4.13.1 CarrierRelease request is used to tell the equipment that the carrier is ready to be moved away from the
read or write position. Equipment shall deny the request if PortID and CarrierID are mismatched.