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SEMI E87-0705 © SEMI 1999, 2005 54 R1-2.12 Abnorma l CarrierID Verification 3 R1-2.12.1 Production equipment based verificati on, Bind Service received, ProceedWithCarrier R1-2.12.2 P roduction e quipment based veri fica…
SEMI E87-0705 © SEMI 1999, 2005 53
# Comment Dir Message LTS LRS LCAS CIDS CSMS
11 Slot map is verified by host, and result
is OK.
12 Host commands to proceed. H->E ProceedWithCarrier
13 Process completes.
14 Carrier completes. H<-E CarrierComplete
15 Host commands to carrier-out. H->E CarrierOut
16 Carrier-out starts. H<-E TransferBlocked TB R
17 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
18 Unloading transfer starts. H<-E TransferBlocked TB
A
SVO
19 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.10 Abnormal CarrierID Verification 1
R1-2.10.1 Host based verification, CancelCarrier
R1-2.10.2 Indicated states: LTS = Load Port Transfer State, LAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-10 Abnormal CarrierID Verification 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is Failed.
WFH
5 Host commands to return. H->E CancelCarrier
TB
6 Carrier is made ready to unload. H<-E ReadyToUnload RTU
A
IVF
SNR
R1-2.11 Abnormal CarrierID Verification 2
R1-2.11.1 Production equipment based verification, Bind service received, CancelCarrier
R1-2.11.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-11 Abnormal CarrierID Verification 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR SNR
5 CarrierID is verified by production
equipment, and result is Failed. The carrier
object created by the Bind service is
destroyed. A carrier object with the id
determined by read is created.
H<-E WaitingForHost (T)
/
WFH
5 Host commands to return. H->E CancelCarrier
TB
6 Carrier is made ready to unload. H<-E ReadyToUnload RTU
NR
A
IVF
(T)
/
SNR
SEMI E87-0705 © SEMI 1999, 2005 54
R1-2.12 Abnormal CarrierID Verification 3
R1-2.12.1 Production equipment based verification, Bind Service received, ProceedWithCarrier
R1-2.12.2 Production equipment based verification, ProceedWithCarrier
R1-2.12.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-12 Abnormal CarrierID Verification 3
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR SNR
5 CarrierID is verified by production
equipment, and result is Failed.
H<-E WaitingForHost (T)
/
WFH
6 Host commands to proceed. H->E ProceedWithCarrier
7 (Go to next step.)
TB
NR
A
IVO
(T)
/
SNR
R1-2.13 Abnormal Slot Map Verification 1
R1-2.13.1 Fixed buffer production equipment, FOUP, Host based verification, CancelCarrier
R1-2.13.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-13 Abnormal Slot Map Verification 1
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result
is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier is docked.
SNR
7 Slot map is read. H<-E WaitingForHost
8 Slot map is verified by host, and result
is Failed.
WFH
9 Host commands to return. H->E CancelCarrier
TB
10 Carrier is made ready to unload. ReadyToUnload RTU
NR
A
IVO
SVF
R1-2.14 Abnormal Slot Map Verification 2
R1-2.14.1 Internal buffer production equipment, FOUP, Production equipment based verification, CancelCarrier
R1-2.14.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
SEMI E87-0705 © SEMI 1999, 2005 55
Table R1-14 Abnormal Slot Map Verification 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by production
equipment, and result is Failed.
H<-E WaitingForHost WFH
11 Host commands to return. H->E CancelCarrier
12 Carrier returns to internal buffer.
RTL
NR
NA
IVO
SVF
R1-2.15 Carrier-Out Queuing
R1-2.15.1 Internal Buffer Equipment
R1-2.15.2 Initial condition: Two more carriers are within the production equipment
R1-2.15.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State
R1-15 Carrier-Out Queuing
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to carrier-out #1. H->E CarrierOut
RTL NR NA
2 Carrier-out #1 starts. H<-E TransferBlocked
3 Host commands to carrier-out #2 (Queued). H->E CarrierOut
TB R
4 Carrier-out #1 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
5 Unloading transfer #1 starts. H<-E TransferBlocked
6 Unloading transfer #1 completes.
NR
7 Carrier-out #2 starts.
TB
R
8 Carrier-out #2 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
9 Unloading transfer #2 starts. H<-E TransferBlocked TB
A
10 Unloading transfer #2 completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.16 Carrier-Out Dequeuing (Cancellation)
R1-2.16.1 Internal Buffer Production equipment
R1-2.16.2 Initial condition: One more carrier-out services are queued, One carrier-out service is active
R1-2.16.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State.