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SEMI E87-0705 © SEMI 1999, 2005 55 Table R1-14 A b normal Slot Map Verification 2 # Comment Dir Message LTS LRS LCAS CIDS CSMS 0 Initial condition. NR NA (T) (T) 1 Load port is associated with speci fied carrierID, and r…

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SEMI E87-0705 © SEMI 1999, 2005 54
R1-2.12 Abnormal CarrierID Verification 3
R1-2.12.1 Production equipment based verification, Bind Service received, ProceedWithCarrier
R1-2.12.2 Production equipment based verification, ProceedWithCarrier
R1-2.12.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-12 Abnormal CarrierID Verification 3
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR SNR
5 CarrierID is verified by production
equipment, and result is Failed.
H<-E WaitingForHost (T)
/
WFH
6 Host commands to proceed. H->E ProceedWithCarrier
7 (Go to next step.)
TB
NR
A
IVO
(T)
/
SNR
R1-2.13 Abnormal Slot Map Verification 1
R1-2.13.1 Fixed buffer production equipment, FOUP, Host based verification, CancelCarrier
R1-2.13.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-13 Abnormal Slot Map Verification 1
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result
is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier is docked.
SNR
7 Slot map is read. H<-E WaitingForHost
8 Slot map is verified by host, and result
is Failed.
WFH
9 Host commands to return. H->E CancelCarrier
TB
10 Carrier is made ready to unload. ReadyToUnload RTU
NR
A
IVO
SVF
R1-2.14 Abnormal Slot Map Verification 2
R1-2.14.1 Internal buffer production equipment, FOUP, Production equipment based verification, CancelCarrier
R1-2.14.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
SEMI E87-0705 © SEMI 1999, 2005 55
Table R1-14 Abnormal Slot Map Verification 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by production
equipment, and result is Failed.
H<-E WaitingForHost WFH
11 Host commands to return. H->E CancelCarrier
12 Carrier returns to internal buffer.
RTL
NR
NA
IVO
SVF
R1-2.15 Carrier-Out Queuing
R1-2.15.1 Internal Buffer Equipment
R1-2.15.2 Initial condition: Two more carriers are within the production equipment
R1-2.15.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State
R1-15 Carrier-Out Queuing
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to carrier-out #1. H->E CarrierOut
RTL NR NA
2 Carrier-out #1 starts. H<-E TransferBlocked
3 Host commands to carrier-out #2 (Queued). H->E CarrierOut
TB R
4 Carrier-out #1 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
5 Unloading transfer #1 starts. H<-E TransferBlocked
6 Unloading transfer #1 completes.
NR
7 Carrier-out #2 starts.
TB
R
8 Carrier-out #2 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
9 Unloading transfer #2 starts. H<-E TransferBlocked TB
A
10 Unloading transfer #2 completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.16 Carrier-Out Dequeuing (Cancellation)
R1-2.16.1 Internal Buffer Production equipment
R1-2.16.2 Initial condition: One more carrier-out services are queued, One carrier-out service is active
R1-2.16.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State.
SEMI E87-0705 © SEMI 1999, 2005 56
Table R1-16 Carrier-Out Dequeuing (Cancellation)
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to cancel all carrier-out services from
queue.
H->E CancelAllCarrierOut
2 All carrier-out services are canceled from queue.
TB R
3 Current carrier-out service completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
4 Unloading transfer starts. H<-E TransferBlocked TB
A
5 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.17 Carrier Association Cancellation
R1-2.17.1 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-17 Carrier Association Cancellation
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified carrierID,
and reserved for loading.
H->E
H<-E
Bind
Associated
2 Host decides to cancel current carrier delivery.
R A INR SNR
3 Host commands to cancel association. H->E
H<-E
CancelBind
NotAssociated
RTL
NR NA (T) (T)
R1-2.18 Access Mode Change
R1-2.18.1 Initial condition: Access mode = AUTO
R1-2.18.2 Indicated states: AMS = Access Mode State
Table R1-18 Access Mode Change
# Comment Dir Message AMS
0 Initial condition. A
1 Host commands to change access mode to MANUAL. H->E ChangeAccess M
2 Access mode is changed to MANUAL. H<-E Manual
R1-2.19 Load Port Service Status Change
R1-2.19.1 Initial condition: Load port service status = IN SERVICE
R1-2.19.2 Indicated states: LTS = Load Port Transfer State
Table R1-19 Load Port Service Status Change
# Comment Dir Message LTS
0 Initial condition. IS
1 Host commands to change service status to OUT OF SERVICE. H->E ChangeServiceStatus OS
2 Service status is changed to OUT OF SERVICE. H<-E OutofService