semi合集-English.pdf - 第2501页

SEMI E87.1-0702 © SEMI 2000, 2002 5 Variable Name Class Format CarrierLocationMatrix S V L,n 1. L,2 1. <LocationID 1 > 2. <CarrierID 1 > . . n. L,2 1. <LocationID n > 2. <CarrierID n > LoadPortRes…

100%1 / 7923
SEMI E87.1-0702 © SEMI 2000, 2002 4
6 Variable Data Item Mapping
6.1 This section shows the specific SECS-II data classes, and formats needed for SECS-II implementations of
SEMI E87 variable data items.
Table 4 Variable Data Item Mapping Table
Variable Name Class Format
AccessMode DVVAL 51 (U1)
Enumerated:
0 = MANUAL
1 = AUTO
AccessMode
i
SV 51 (U1)
Enumerated:
0 = MANUAL
1 = AUTO
AvailPartitionCapacity DVVAL 51
AvailPartitionCapacity
i
SV 51
BufferCapacityList SV L,n
1. <BufferPartitionInfo
1
>
.
.
n. <BufferPartitionInfo
n
>
BufferPartitionInfo DVVAL L,4
1. <PartitionID>
2. <PartitionType>
3. <AvailPartitionCapacity>
4. <PartitionCapacity>
BufferPartitionInfo
i
SV L,4
1. <PartitionID
i
>
2. <PartitionType
i
>
3. <AvailPartitionCapacity
i
>
4. <PartitionCapacity
i
>
CarrierAccessingStatus DVVAL 51 (U1)
Enumerated as:
0 = NOT ACCESSED
1 = IN ACCESS
2 = CARRIER COMPLETE
3 = CARRIER STOPPED
CarrierID DVVAL A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
CarrierID
i
SV A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
CarrierIDStatus DVVAL 51 (U1)
Enumerated as:
0 = ID NOT READ
1 = [ID] WAITING FOR HOST
2 = ID VERIFICATION OK
3 = ID VERIFICATION FAILED
SEMI E87.1-0702 © SEMI 2000, 2002 5
Variable Name Class Format
CarrierLocationMatrix SV L,n
1. L,2
1. <LocationID
1
>
2. <CarrierID
1
>
.
.
n. L,2
1. <LocationID
n
>
2. <CarrierID
n
>
LoadPortReservationState DVVAL 51 (U1)
Enumerated as:
0 = NOT RESERVEED
1 = RESERVED
LoadPortReservationState
I
SV 51 (U1)
Enumerated as:
0 = NOT RESERVED
1 = RESERVED
LoadPortReservationStateList SV L,n
1.<LoadPortReservationState
1
>
.
.
n.<LoadPortReservationState
N
>
LocationID DVVAL A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
LocationID
i
SV A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionCapacity DVVAL 51
PartitionCapacity
i
SV 51
PartitionID DVVAL A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionID
i
SV A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionType DVVAL A[1-64]
PartitionType
i
SV A[1-64]
PortAssociationState DVVAL 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationState
i
SV 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationStateList SV L,n
1. <PortAssociationState
1
>
.
.
n. <PortAssociationState
n
>
PortID DVVAL 51
PortID
i
SV 51
PortStateInfo DVVAL L,2
1. <PortAssociationState>
2. <PortTransferState>
SEMI E87.1-0702 © SEMI 2000, 2002 6
Variable Name Class Format
PortStateInfo
i
SV L,2
1. <PortAssociationState
i
>
2. <PortTransferState
i
>
PortStateInfoList SV L,n
1. <PortStateInfo
1
>
.
n. <PortStateInfo
n
>
PortTransferState DVVAL 51 (U1)
Enumerated as:
0 = OUT OF SERVICE
1 = TRANSFER BLOCKED
2 = READY TO LOAD
3 = READY TO UNLOAD
PortTransferState
i
SV 51 (U1)
Enumerated as:
0 = OUT OF SERVICE
1 = TRANSFER BLOCKED
2 = READY TO LOAD
3 = READY TO UNLOAD
PortTransferStateList SV L,n
1. <PortTransferState
1
>
.
.
n. <PortTransferState
n
>
Reason DVVAL 51 (U1)
Enumerated as:
0 = VERIFICATION NEEDED
1 = VERIFICATION BY EQUIPMENT UNSUCCESSFUL
2 = READ FAIL
3 = IMPROPER SUBSTRATE POSITION
SlotMapStatus DVVAL 51 (U1)
Enumerated as:
0 = SLOT MAP NOT READ
1 = [SLOT] WAITING FOR HOST
2 = SLOT MAP VERIFICATION OK
3 = SLOT MAP VERIFICATION FAILED
SlotMap
DVVAL
L, n n= capacity (1...25)
1. Enumerated
2. Enumerated
3.
.
.
n
Each as
51 (U1)
Enumerated as:
0 = UNDEFINED
1 = EMPTY
2 = NOT EMPTY
3 = CORRECTLY OCCUPIED
4 = DOUBLE SLOTTED
5 = CROSS SLOTTED
UnAllocatedPartitionCapacity DVVAL 51
UnAllocatedPartitionCapacity
i
SV 51