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SEMI E88-1104 E © SEMI 1999, 2004 5 6.13 Transfer Completed Port OP LP2 LP1 BP PGV, AGV, OHV Access ible Stoc ker Cr ane Acc essi ble Stoc ker Ins ide Stoc ker Ou tsi de OP LP BP Stocker Crane Accessible Stoc ker Ins ide…

SEMI E88-1104

6.1.2 Output to the Interbay Output Port

6.1.2.1 The destination for a transfer command to

move a carrier to an interbay output port must be a

loading port. It is the responsibility of the Host to

ensure that sufficient capacity exists in the destination

stocker when delivering from a source stocker to a

destination stocker (i.e., an interbay move). For

example, it would be the responsibility of the Host to

check the remaining capacity of the destination stocker

prior to issuing the transfer command to send the carrier

to the interbay output port of the source stocker.

6.1.3 Output to the Intrabay Output Port

6.1.3.1 The destination for a transfer command to

move a carrier to an intrabay output port must be a

loading port.

6.1.4 Store to the Stocker Shelf

6.1.4.1 The specific stocker shelf location is to be

controlled by the Stocker Controller (SC). The Host

does not specify a shelf ID in a transfer command. The

Host sends the name of a zone as the destination in the

transfer command

6.1.4.2 The carrier is stored to a stocker shelf

temporarily when the Host requested output port

destination is occupied. This is the responsibility of the

Stocker Controller. The carrier count of the stocker is

incremented due to this temporary storage (i.e., the

current capacity decreases).

6.1.4.3 For multi-crane stockers, the carrier is

temporarily stored to a stocker shelf when the source

and destination is not accessible by the same stocker

crane. This is the responsibility of the Stocker

Controller. The carrier count of the zone containing the

location where the carrier is temporarily stored is

incremented due to this temporary storage (i.e. the

current capacity decreases).

6.2 Quantity Control in the Stocker (Capacity

Planning)

6.2.1 The number of carriers in the stocker is

controlled by the Host. A list of carrier database entries

in the specified stocker’s SC database will be available

to the Host upon request via a remote command.

6.3 Number of Stocker Cranes

6.3.1 No Limitation. May be zero for systems that do

not include a crane. Host does not control the stocker

crane directly.

6.4 Port Type

6.4.1 The independent input port and the independent

output port are required for the Stocker SEM. The

swapping type is considered as an independent port.

6.5 Plural Sets of Input/Output Ports

6.5.1 Plural sets of Input/Output ports connected to the

interbay or intrabay transport system must be

considered. (This would be considered a Multi-loop

type interface connection to the stocker.) Examples of

plural sets of interfaces are as follows:

 Main Loop/Sub Loop,

 Right-handed rotation/Left-handed rotation, and



Double Track (i.e., Stacked Track).

6.6 Carrier ID Reader

 Manual Input Port: Carrier ID Reader is

mandatory.

 Automated Input Port: Carrier ID Reader is a

customer option.

 Carrier ID Reader at any output port: Carrier ID

Reader is a customer option.

6.6.1 The intrabay automated input port is sometimes

used as the manual Input Port. If one port is used for

both an automated and a manual, the Carrier ID Reader

is mandatory for this port. If there is a Carrier ID

Reader, the scenario for a stocker transfer without a

Carrier ID Reader is not applicable.

6.7 Tag

6.7.1 Same assumptions as Carrier ID Reader.

6.8 Carrier Exchanger/Gas Purger

6.8.1 Out of scope of Stocker SEM.

6.9 Robot Arm in the Passive Type Stocker

6.9.1 No assumption is made regarding the passive

type stocker.

6.10 Empty or Not Empty Carriers

6.10.1 No assumption is made regarding empty and not

empty carriers.

6.11 Monitor/Dummy

6.11.1 No assumption.

6.12 Operation Mode

6.12.1 No assumption.

SEMI E88-1104

6.13 Transfer Completed Port

LP2

LP1

PGV, AGV, OHV Accessible

Stocker Crane Accessible

Stocker Inside

Stocker Outside

Stocker Crane Accessible

Stocker Inside

Stocker Outside

PGV, AGV, OHV Accessible

OP - ouput port

BP - buffer port

LP1 - loading port 1

LP2 - loading port 2

OP - ouput port

BP - buffer port

LP - loading port

Case 3

Case 2

Case 1

Case 3

Case 2

Case 1

Figure 2

Output Shuttle Examples: L-Shaped Shuttle on Left, I-Shaped Shuttle on Right

6.13.1 The Transfer Completed Port is always the LoadingPort (LP) specified in the transfer command. If the end

user desires that the Host issue a transfer to the TSC prior to the carrier arriving at the LP, the states defined in the

Stocker Carrier State Model may be utilized.

7 Communication Requirements

7.1 It is required that any Stocker SEM compliant equipment follow the Communications State Model in SEMI

E30. In addition, Stocker SEM compliant equipment shall support either SEMI E37 and SEMI E37.1 or SEMI E4.

8 State Models

8.1 State Model Requirements

8.1.1 The state models included in this standard are a requirement for Stocker SEM equipment. This standard

requires implementation of all SEMI E30 state models (such as control, communication, on-line/off-line, etc.

according to the GEM capabilities required per Section 13). A state model consists of a state model diagram, state

definitions, and a state transition table. All state transitions in this standard, unless otherwise specified, shall

correspond to collection events.

8.1.2 A state model is the host’s view of the equipment, and does not necessarily describe the internal equipment

operation. All Stocker SEM state model transitions shall be mapped into the appropriate internal equipment events

that satisfy the requirements of those transitions. In certain implementations, the equipment may enter a state and

have already satisfied all of the conditions required by the Stocker SEM state model for transition to another state.

The equipment makes the required transition without any additional actions in this situation.

8.1.3 Some equipment may need to include additional substates other than those in this standard. Additional

substates may be added, but shall not change the Stocker SEM defined state transitions. All expected transitions

between Stocker SEM states shall occur.

8.2 SC State Model

8.2.1 SC State Model Requirements

8.2.1.1 The purpose of the SC state model is to provide information to the host regarding the overall status of the

stocker system. The SC state model is valid when the SEMI E30 (GEM) state is ON-LINE. The SC state model is

not valid when the SEMI E30 (GEM) state is OFF-LINE. Since a stocker may consist of many components (e.g.,

SEMI E88-1104

stocker crane, conveyor, ID reader, etc.), it may be possible to continue ON-LINE operation when the operation

mode of some stocker components (as viewed by the SC) is a manual state. The details of what happens when

individual components of the stocker enter a manual state are specific to the Stocker SEM equipment supplier.

When the SEMI E30 Control state changes from OFF-LINE to ON-LINE, the SC State Model is started from the SC

INIT state.

8.2.2 SC State Model

PAUSED

PAUSING

AUTO

ALARMS

NO ALARMS

SC INIT

8 7

AVAILABILITY

SYSTEM

Figure 3

Generic Stocker SEM SC State Model Diagram

8.2.3 SC State Definitions

8.2.3.1 SC INIT — SC initialization of stocker components is occurring. This is a non-operational state. No

commands from the host will be acknowledged, queued or processed. The system will not move out of this state if

there are carriers moving on any of the stocker units controlled by the SC. Such devices must be manually or

automatically recovered before transitioning to the next state.

8.2.3.2 PAUSING — A system PAUSE command has been received and is being processed. All carriers that are

currently moving will continue until their physical movement stops (their transfer command may still be active).

Carriers that are currently moving may continue to move but they must not begin another movement. TRANSFER

commands are accepted and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE,

and LOCATE commands will also be processed.

8.2.3.3 PAUSED — No carriers are in the process of moving on any of the stocker units controlled by the SC.

Carriers may be at any port position including the OP, BP, and LP positions. TRANSFER commands are accepted

and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE, and LOCATE commands

will also be processed.

8.2.3.4 AUTO — Stocker is in the normal operational state. Commands are actively processed.

8.2.3.5 NO ALARMS — There are no alarms present in the system.

8.2.3.6 ALARMS — There are one or more alarms present in the system.