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SEMI E88-1104 E © SEMI 1999, 2004 10 8.4 Stocker Carrie r State Model 8.4.1 Stocker Carrier State Model Requirements 8.4.1.1 The purpose of the stocker carrier stat e model is to provid e information to the host regardin…

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SEMI E88-1104
E
© SEMI 1999, 2004 9
Transition # Previous State Trigger New State Actions Comments
4 TRANSFER-
RING
The SC pauses execution
of the TRANSFER
command due to an
anomaly condition.
PAUSED S6F11
TransferPaused for
a specific
CommandID
It is an important distinction
to make that the TRANSFER
command is paused and not
just the transfer agent.
The Stocker Controller state
will be ALARM.
5 PAUSED The SC resumes execution
of the TRANSFER
command since the
anomaly condition has
been cleared.
TRANSFER-
RING
S6F11
TransferResumed
for a specific
CommandID
If this was the only remaining
stocker alarm, the Stocker
Controller state will transition
to NO ALARMS.
6 ACTIVE The TRANSFER
command has completed
by the stocker and SC
(either successfully or
unsuccessfully).
None S6F11
TransferComplete
d sent to Host with
appropriate
ResultCode
ResultCode = 0 if
successful
ResultCode is
nonzero if
unsuccessful
Carrier(s) could be located at
any location or port located
along the path of the transfer,
if the TRANSFER command
completed unsuccessfully.
Supplier Option — The
location of the carrier(s)
associated with an
unsuccessful transfer
command must be a legal
SourcePort for a new
TRANSFER command.
7 ACTIVE Host sends ABORT
command for a specified
TRANSFER command to
SC.
ABORTING S6F11
TransferAbort-
Initiated
8 ABORTING The abort procedure for
the TRANSFER command
has completed by the
stocker and SC.
None S6F11
TransferAbort-
Completed
Carrier could be located at
any location or port located
along the path of the ACTIVE
transfer.
Supplier Option — The
location of the carrier
associated with the aborted
transfer command must be a
legal SourcePort for issuing a
new TRANSFER command.
9 ABORTING TRANSFER command
cannot be aborted.
ACTIVE S6F11
TransferAbort-
Failed
TRANSFER command could
not be aborted due to the
physical state of the
equipment. Such conditions
must be documented by the
Stocker SEM equipment
Supplier.
10 CANCELING Transport system is unable
to cancel the TRANSFER
command because the
transfer is now ACTIVE.
TRANSFER-
RING
S6F11
TransferInitiated
11 CANCELING Transport system is unable
to cancel the TRANSFER
command and it is still
queued.
QUEUED
S6F11
TransferCancel-
Failed
SEMI E88-1104
E
© SEMI 1999, 2004 10
8.4 Stocker Carrier State Model
8.4.1 Stocker Carrier State Model Requirements
8.4.1.1 The purpose of the stocker carrier state model is to provide information to the host regarding carrier tracking
(the Host will not control carriers) while the carrier is in the domain of the stocker. The carrier is in the domain of
the stocker when it is in storage or transport internal to the stocker or on a stocker interface port (manual, interbay,
or intrabay). The equipment shall track each carrier in compliance with the Stocker Carrier State Model.
8.4.2 Stocker Carrier State Model
INSTALLED
WAIT IN
WAIT OUT
STORED
COMPLETED
ALTERNATE
TRANSFERRING
11
WAIT IN
WAIT OUT
STORED
COMPLETED
ALTERNATE
TRANSFERRING
6
COMPLETED
A
LTERNATE
4
9
2
3
5
8
1
10
7
C
12
13
14
16
15
Figure 5
Generic Stocker SEM Carrier State Model Diagram
8.4.3 Stocker Carrier State Definitions
8.4.3.1 INSTALLED — Carrier in stocker database.
8.4.3.2 WAIT IN (INSTALLED sub-state) — Carrier at final internal port location of the stocker. Carrier is ready to
be transferred to storage or output location and no further movement or action should be taken on this carrier prior to
transfer.
8.4.3.3 WAIT OUT (INSTALLED sub-state) — Carrier is at an Output, Buffer, or Loading Port.
8.4.3.4 TRANSFERRING (INSTALLED sub-state) — Carrier ‘moving’ between locations in the stocker. The
carrier may not be physically moving but may be on the crane (or other position) waiting for a new TRANSFER
command as the result of an anomaly condition.
8.4.3.5 STORED (INSTALLED sub-state) — Carrier is sitting at a storage location.
8.4.3.6 COMPLETED (STORED sub-state) — The carrier is stored at a shelf location as a result of completing a
transfer for which this shelf represents the destination of the transfer command.
8.4.3.7 ALTERNATE (STORED sub-state) — The carrier is temporarily stored at a shelf location. The transfer
command completion is pending until the destination and the crane become available.
SEMI E88-1104
E
© SEMI 1999, 2004 11
8.4.4 Stocker Carrier State Transition Table
Table 3 Stocker Carrier State Transition Table
Transition
#
Previous State Trigger New State Action Comments
1 none Carrier arrives at a
WaitIn position of the
stocker.
WAIT IN S6F11
CarrierWaitIn
2 WAIT IN Stocker is executing a
TRANSFER command
for the carrier.
TRANSFERRING S6F11 Carrier-
Transferring
3 TRANSFERRING Completion of a
TRANSFER command
with a DEST of
internal stocker
storage.
COMPLETED S6F11
CarrierStored
Carrier is at an
internal storage
destination.
4 COMPLETED Stocker is executing a
TRANSFER command
for the carrier.
TRANSFERRING S6F11 Carrier-
Transferring
5 TRANSFERRING Carrier has arrived at
the output port.
WAIT OUT S6F11
CarrierWaitOut
6 WAIT OUT Carrier has advanced
(automatically) on a
port beyond the output
port.
WAIT OUT S6F11
CarrierWaitOut
7 WAIT OUT Carrier is removed
from the stocker
domain (removed from
the output LP).
None S6F11
CarrierRemoved
8 TRANSFERRING The destination of the
move command is
occupied.
ALTERNATE S6F11
CarrierStoredAlt
SC is waiting for the
Destination to become
available.
9 ALTERNATE The port becomes
available and transfer
command is first in
queue.
TRANSFERRING S6F11
CarrierResumed
Carrier continues with
move to the
Destination.
10 None Carrier entry is created
or modified in the SC
database.
COMPLETED S6F11
CarrierInstall-
Completed
Could be due to an
INSTALL remote
command or initiated
by the Stocker
Controller.
11 INSTALLED Carrier entry is
removed from the SC
database.
None S6F11
CarrierRemove-
Completed
Could be due to a
REMOVE remote
command.
12 ALTERNATE Transfer command is
Aborted.
COMPLETED S6F11
CarrierStored
13 WAIT OUT Carrier on a bi-
directional port is
ready to be moved to a
storage or output
location.
WAIT IN S6F11
CarrierWaitIn
Examples of a trigger
could be the operator
pressing a button or
the host issuing a
transfer command for
the carrier.
14 None The result of ID read at
an output port that did
not match the expected
ID.
WAITOUT S6F11
CarrierWaitOut