semi合集-English.pdf - 第2537页

SEMI E88-1104 E © SEMI 1999, 2004 34 STEP COMMENTS HOST SC COMMENTS 4.  S6,F11 Event Report Send (ERS) TransferInitiated · CommandID · CarrierID · CarrierLoc · CarrierZoneName · Dest = “LP” 5. Event Report Acknowledge (…

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SEMI E88-1104
E
© SEMI 1999, 2004 33
STEP COMMENTS HOST SC COMMENTS
6. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
7.
S6,F11
Event Report Send (ERS)
CraneActive
8. Event Report Acknowledge (ERA)
S6,F12
9.
S6,F11
Event Report Send (ERS)
CraneIdle
10. Event Report Acknowledge (ERA)
S6,F12
11.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID
· CarrierID
· CarrierLoc
· ResultCode = “0”
· CarrierZoneName
12.
Event Report Acknowledge (ERA)
S6,F12
13.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID
· CarrierLoc = “LP1”
· CarrierZoneName
· PortType = “LP”
14. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
15. Carrier leaves the domain of
the stocker as it is acquired
by the transport vehicle.
16.
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = AUTOMATED
17. Event Report Acknowledge (ERA)
S6,F12
18.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
19. Event Report Acknowledge (ERA)
S6,F12
13.1.4 Carrier Transfer to a Stocker Output Port Requiring Intermediate Storage
13.1.4.1 The carrier is requested by the Host to be transferred from a stocker input port (with an ID reader) to a
manual output port but requires intermediate storage due to the destination output port being fully occupied with
carriers.
STEP COMMENTS HOST SC COMMENTS
1. Carrier 123456 is sitting at
the stocker crane accessible
input port position.
2. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID
· PRIORITY
· TRANSFERINFO
1. CARRIERID
2. SOURCE
3. DEST = “LP”
S2,F49
In this scenario SOURCE is the
name of an in
p
ut
p
ort
p
osition
and DEST is the name of a
loading port. Either
CARRIERID or SOURCE is
optional.
3.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
SEMI E88-1104
E
© SEMI 1999, 2004 34
STEP COMMENTS HOST SC COMMENTS
4.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID
· CarrierID
· CarrierLoc
· CarrierZoneName
· Dest = “LP”
5. Event Report Acknowledge (ERA)
S6,F12
6.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID
· CarrierLoc
· CarrierZoneName
7. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
8.
S6,F11
Event Report Send (ERS)
CraneActive
9. Event Report Acknowledge (ERA)
S6,F12
10.
S6,F11
Event Report Send (ERS)
CraneIdle
11. Event Report Acknowledge (ERA)
S6,F12
12.
S6,F11
Event Report Send (ERS)
CarrierStoredAlt
· CommandID
· CarrierID
· CarrierLoc = “132”
· Dest = “LP”
· CarrierZoneName
13. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CarrierResumed
· CommandID
· CarrierID
· CarrierLoc = “132”
· Dest = “LP”
· CarrierZoneName
15. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
16.
S6,F11
Event Report Send (ERS)
CraneActive
17. Event Report Acknowledge (ERA)
S6,F12
18.
S6,F11
Event Report Send (ERS)
CraneIdle
19. Event Report Acknowledge (ERA)
S6,F12
20.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID
· CarrierID
· CarrierLoc
· ResultCode = “0”
· CarrierZoneName
21.
Event Report Acknowledge (ERA)
S6,F12
SEMI E88-1104
E
© SEMI 1999, 2004 35
STEP COMMENTS HOST SC COMMENTS
22.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID
· CarrierLoc = “LP”
· CarrierZoneName
· PortType = “LP”
23. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
24. Carrier leaves the domain of
the stocker as it is acquired
manually by a PGV.
25.
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = MANUAL
26. Event Report Acknowledge (ERA)
S6,F12
27.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
28. Event Report Acknowledge (ERA)
S6,F12
13.1.5 Carrier Transfer to an Automated Stocker Output with Multiple Loading Ports
13.1.5.1 Three carriers are requested to the stocker output. The output shuttle consists of multiple carrier positions
including the stocker crane set down port (OP – location 03) and two AGV accessible port locations (LPs –
locations 05 and 06). The port shuttle also has a BP (location 04) that is the location reached by a carrier before
reaching the LP positions. The Host sends the three Transfer commands to the stocker and they are queued. The
first two Transfer commands send carriers to LP locations 05 and 06 respectively. These carriers are to be loaded by
the same AGV. The third carrier is also requested to LP 05. Each carrier is transferred to the OP where it then
automatically travels forward on the shuttle toward the BP and LPs (see figure in Section 6.16). The first two
carriers arrive at the LPs. The vehicle removes the two carriers from the LPs. The third carrier then shuttles
forward to the LP location 05.
STEP COMMENTS HOST SC COMMENTS
1. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID = “060658”
· PRIORITY = “20”
· TRANSFERINFO
1. CARRIERID = “11111”
2. SOURCE
3. DEST = “06”
S2,F49
In this scenario SOURCE is the
name of a CarrierLoc or
ZoneName and DEST is the name
of a “loading port.” Either
CARRIERID or SOURCE may be
empty.
2.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
3.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID = “060658”
· CarrierID = “11111”
· CarrierLoc
· CarrierZoneName
· Dest = “06”
4. Event Report Acknowledge (ERA)
S6,F12
5.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID = “11111”
· CarrierLoc
· CarrierZoneName
6. Event Report Acknowledge (ERA)
S6,F12