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SEMI E90-0705 © SEMI 1999, 2005 11 9.3.16 SUBSTRATE READING STATUS — The s u perstate of NOT CONFI RMED, WAITING FOR HOST, CONFIRMED and CONF IRMATION FA ILED that represents th e status of the subst rate ID confirmation…
SEMI E90-0705 © SEMI 1999, 2005 10
AT SOURCE
AT
DESTINATION
1
AT WORK
8
NEEDS
PROCESSING
PROCESSING COMPLETE
10
IN PROCESS
14
SUBSTRATE
PROCESSED ABORTED
REJECTED
C
LOST
STOPPED SKIPPED
4
NOT
CONFIRMED
WAITING FOR
HOST
CONFIRMED
CONFIRMATION
FAILED
17
2120
16
13
7
5 6
32
12
11
9
18 19
SUBSTRATE TRANSPORT SUBSTRATE PROCESSING SUBSTRATE READING STATUS
Figure 3
Substrate Object State Model
A-1.1.1.1
9.3.5 IN PROCESS — Substrate is being processed. One or more substrate properties are being changed by the
processing instructions or measurement of the substrate in the equipment. The nature of the process depends upon
the equipment processing capabilities.
9.3.6 LOST — The terminal state when the substrate has been broken and/or removed from the equipment by an
external entity and it no longer exists at the equipment.
9.3.7 NEEDS PROCESSING — Processing requirements exist that have not yet been fulfilled. This is the default
entry state when the substrate is originally received. In some cases, the substrate may return to this state while it
waits for additional processing to be performed.
9.3.8 PROCESSED — All substrate processing has successfully completed. No further processing will be
performed by the equipment.
9.3.9 PROCESSING COMPLETE — The state in which the substrate has completed all processing associated with
a recipe specification. The substrate processing completed because the process requirement was aborted, stopped or
successfully completed. The substrate is no longer changed by the recipe’s processing instructions or its
measurment/inspection requirements completed. This state is a super-state of the terminal states of the substrate;
PROCESSED, ABORTED, REJECTED, LOST, STOPPED, or SKIPPED.
9.3.10 REJECTED — The state which the substrate has been processed completely; however, the result of the
processing may have a problem. The substrate will require special treatment. This substate is not required for
equipment that is unable to identify rejected substrates.
9.3.11 SKIPPED — As directed by an operator or a host, the substrate was not processed.
9.3.12 STOPPED — The process has been stopped during the processing. The substrate will require special
treatment.
9.3.13 SUBSTRATE — The superstate of the SUBSTRATE TRANSPORT and SUBSTRATE PROCESSING.
SUBSTRATE TRANSPORT and SUBSTRATE PROCESSING are concurrent substates. The state is created when
the substrate is initially registered to the equipment, and deleted when the substrate is removed from the equipment.
9.3.14 SUBSTRATE PROCESSING — The superstate of NEEDS PROCESSING, IN PROCESS, PROCESSING
COMPLETE which represents the processing state of the substrate.
9.3.15 SUBSTRATE TRANSPORT — The superstate of the AT SOURCE, AT WORK, AT DESTINATION
which represents the transport state of the substrate within the equipment.
SEMI E90-0705 © SEMI 1999, 2005 11
9.3.16 SUBSTRATE READING STATUS — The superstate of NOT CONFIRMED, WAITING FOR HOST,
CONFIRMED and CONFIRMATION FAILED that represents the status of the substrate ID confirmation by the
equipment.
9.3.17 NOT CONFIRMED — This is the entry state for the substrate object at the time of its creation when a
substrate reader is available and enabled in the equipment.
9.3.18 WAITING FOR HOST — The status of the substrate when the substrate ID could not be identified by the
reader, was discovered to be at a wrong source location or there was no matching ID in the source set.
9.3.19 CONFIRMED — The state of the substrate when it’s substrate ID has been confirmed by the equipment or
the host after it was read.
9.3.20 CONFIRMATION FAILED — The state of the substrate when the host decides to cancel the substrate.
9.4 Substrate State Transition
Table 1 Substrate State Model Transition Table
No. Current State Trigger New State Action Comment
1 no state The substrate is registered. AT SOURCE
2 AT SOURCE The substrate is taken from the
source substrate location and
placed into the equipment.
AT WORK Update substrate
location history.
Substrate tracking through the
equipment substrate locations
begin.
3 AT WORK The substrate has moved to the
source substrate location.
AT SOURCE Update substrate
location history.
This transition is not required
for compliance to this standard.
4 AT WORK The substrate has moved out
from current equipment
substrate location towards a new
equipment substrate location.
AT WORK Update substrate
location history.
The substrate has moved
between equipment substrate
locations. This transition is not
required for compliance to this
standard. This transition is not
required if the equipment only
provides a single Equipment
Substrate Location.
5 AT WORK The substrate is moved to the
destination substrate location.
AT
DESTINATION
Update substrate
location history.
6 AT
DESTINATION
The substrate is taken from the
destination substrate location
and placed into the equipment.
AT WORK Update substrate
location history.
This transition is not required
for compliance to this standard.
7 AT
DESTINATION
The substrate is removed from
the equipment by a normal
transfer sequence.
(Extinction) The substrate
object is deleted
in the equipment.
8 AT
DESTINATION
The user informs or the
equipment detects that the
substrate is AT SOURCE.
AT SOURCE Update substrate
location history.
This transition is not required
for compliance to this standard.
9 Any
SUBSTRATE
substate
The equipment detects or is
informed by the user that a
substrate has been removed.
(Extinction) The substrate
object is deleted
in the equipment.
The removal may be detected
by the equipment or informed
by the user. This transition
would not occur during normal
wafer movement. So if
transition 7 occurs, there is no
need to report a transition 9.
10 no state The substrate object is created. NEEDS
PROCESSING
11 NEEDS
PROCESSING
Substrate starts actual
processing. One or more
substrate properties begin to be
affected by the equipment recipe
instructions or measurement of
the substrate.
IN PROCESS The document for each
equipment implementation
shall describe the trigger for
this transition.
SEMI E90-0705 © SEMI 1999, 2005 12
No. Current State Trigger New State Action Comment
12 IN PROCESS The processing completes
b
ecause the processing activities
were aborted, stopped or
completed. One or more
substrate properties are no
longer affected by the
processing instructions or
measurement of the substrate.
PROCESSING
COMPLETE
One of the
substates
PROCESSED,
ABORTED,
STOPPED,
REJECTED,
LOST,
SKIPPED is
determined.
This is a terminal state. The
substrate either returns to the
specified destination or it is no
longer at the equipment.
13 IN PROCESS The process associated with the
processing instructions
completed and the substrate is to
be processed again.
NEEDS
PROCESSING
The documentation for each
equipment implementation
shall describe the trigger for
this transition. This transition
is not required for compliance
to this standard.
14 NEED
PROCESSING
The substrate has been removed
from the equipment by an
external agent or it is physically
missing (LOST) or the substrate
has been not processed
(SKIPPED).
PROCESSING
COMPLETE
One of the
substrates LOST,
SKIPPED, is
determined.
15 Not used.
16 no state The substrate object is created NOT
CONFIRMED
none This transition is not reported.
17 NOT
CONFIRMED
Substrate was successfully read
and SubstID provided in the
ContentMap matched the
AcquiredID read by the
equipment.
CONFIRMED Issue an event for
transition 17.
Data required to be available
for this event report:
SubstID
AcquiredID
18 NOT
CONFIRMED
Substrate ID reading has failed
after several retries
WAITING FOR
HOST
Issue an event for
transition 18.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
19 NOT
CONFIRMED
Substrate ID was successfully
read but the acquired ID is
different from the one the
equipment used to instantiate the
substrate object.
WAITING FOR
HOST
Issue an event for
transition 19.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
AcquiredID
20 WAITING FOR
HOST
Equipment has received a
“ProceedWithSubstrate” service.
CONFIRMED Issue an event for
transition 20.
Data required to be available
for this event report:
SubstID
AcquiredID (if valid)