semi合集-English.pdf - 第2572页
SEMI E90-0705 © SEMI 1999, 2005 12 No. Current State Trigger New State Action Comment 12 IN PROCESS The processing completes b ecause the process ing activities were aborted, stopped or completed. One or m ore substrate …
SEMI E90-0705 © SEMI 1999, 2005 11
9.3.16 SUBSTRATE READING STATUS — The superstate of NOT CONFIRMED, WAITING FOR HOST,
CONFIRMED and CONFIRMATION FAILED that represents the status of the substrate ID confirmation by the
equipment.
9.3.17 NOT CONFIRMED — This is the entry state for the substrate object at the time of its creation when a
substrate reader is available and enabled in the equipment.
9.3.18 WAITING FOR HOST — The status of the substrate when the substrate ID could not be identified by the
reader, was discovered to be at a wrong source location or there was no matching ID in the source set.
9.3.19 CONFIRMED — The state of the substrate when it’s substrate ID has been confirmed by the equipment or
the host after it was read.
9.3.20 CONFIRMATION FAILED — The state of the substrate when the host decides to cancel the substrate.
9.4 Substrate State Transition
Table 1 Substrate State Model Transition Table
No. Current State Trigger New State Action Comment
1 no state The substrate is registered. AT SOURCE
2 AT SOURCE The substrate is taken from the
source substrate location and
placed into the equipment.
AT WORK Update substrate
location history.
Substrate tracking through the
equipment substrate locations
begin.
3 AT WORK The substrate has moved to the
source substrate location.
AT SOURCE Update substrate
location history.
This transition is not required
for compliance to this standard.
4 AT WORK The substrate has moved out
from current equipment
substrate location towards a new
equipment substrate location.
AT WORK Update substrate
location history.
The substrate has moved
between equipment substrate
locations. This transition is not
required for compliance to this
standard. This transition is not
required if the equipment only
provides a single Equipment
Substrate Location.
5 AT WORK The substrate is moved to the
destination substrate location.
AT
DESTINATION
Update substrate
location history.
6 AT
DESTINATION
The substrate is taken from the
destination substrate location
and placed into the equipment.
AT WORK Update substrate
location history.
This transition is not required
for compliance to this standard.
7 AT
DESTINATION
The substrate is removed from
the equipment by a normal
transfer sequence.
(Extinction) The substrate
object is deleted
in the equipment.
8 AT
DESTINATION
The user informs or the
equipment detects that the
substrate is AT SOURCE.
AT SOURCE Update substrate
location history.
This transition is not required
for compliance to this standard.
9 Any
SUBSTRATE
substate
The equipment detects or is
informed by the user that a
substrate has been removed.
(Extinction) The substrate
object is deleted
in the equipment.
The removal may be detected
by the equipment or informed
by the user. This transition
would not occur during normal
wafer movement. So if
transition 7 occurs, there is no
need to report a transition 9.
10 no state The substrate object is created. NEEDS
PROCESSING
11 NEEDS
PROCESSING
Substrate starts actual
processing. One or more
substrate properties begin to be
affected by the equipment recipe
instructions or measurement of
the substrate.
IN PROCESS The document for each
equipment implementation
shall describe the trigger for
this transition.
SEMI E90-0705 © SEMI 1999, 2005 12
No. Current State Trigger New State Action Comment
12 IN PROCESS The processing completes
b
ecause the processing activities
were aborted, stopped or
completed. One or more
substrate properties are no
longer affected by the
processing instructions or
measurement of the substrate.
PROCESSING
COMPLETE
One of the
substates
PROCESSED,
ABORTED,
STOPPED,
REJECTED,
LOST,
SKIPPED is
determined.
This is a terminal state. The
substrate either returns to the
specified destination or it is no
longer at the equipment.
13 IN PROCESS The process associated with the
processing instructions
completed and the substrate is to
be processed again.
NEEDS
PROCESSING
The documentation for each
equipment implementation
shall describe the trigger for
this transition. This transition
is not required for compliance
to this standard.
14 NEED
PROCESSING
The substrate has been removed
from the equipment by an
external agent or it is physically
missing (LOST) or the substrate
has been not processed
(SKIPPED).
PROCESSING
COMPLETE
One of the
substrates LOST,
SKIPPED, is
determined.
15 Not used.
16 no state The substrate object is created NOT
CONFIRMED
none This transition is not reported.
17 NOT
CONFIRMED
Substrate was successfully read
and SubstID provided in the
ContentMap matched the
AcquiredID read by the
equipment.
CONFIRMED Issue an event for
transition 17.
Data required to be available
for this event report:
SubstID
AcquiredID
18 NOT
CONFIRMED
Substrate ID reading has failed
after several retries
WAITING FOR
HOST
Issue an event for
transition 18.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
19 NOT
CONFIRMED
Substrate ID was successfully
read but the acquired ID is
different from the one the
equipment used to instantiate the
substrate object.
WAITING FOR
HOST
Issue an event for
transition 19.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
AcquiredID
20 WAITING FOR
HOST
Equipment has received a
“ProceedWithSubstrate” service.
CONFIRMED Issue an event for
transition 20.
Data required to be available
for this event report:
SubstID
AcquiredID (if valid)
SEMI E90-0705 © SEMI 1999, 2005 13
No. Current State Trigger New State Action Comment
21 WAITING FOR
HOST
Equipment has received a
“CancelSubstrate” service.
CONFIRMATION
FAILED
Issue an event for
transition 21 and
update the
substrate
processing status
to SKIPPED
taking the
appropriate
transition. The
substrate is
returned or
placed into its
destination
location.
9.5 Substrate Object Attribute Definition
9.5.1 Table 2 defines attributes for substrate objects. These attributes can be accessed by using GetAttr and SetAttr
messages as defined in SEMI E39 (OSS).
Table 2 Substrate Object Attribute Table
Attribute Name Definition Access Reqmt Format
AcquiredID Contains the ID read from the substrate. Empty string before
the substrate is read. The attribute shall be updated as soon
the Substrate ID has been successfully read.
[Equipment with substrate ID reader only]
RO N Text
BatchLocID Identifier for current batch location. RO N Text (batch process
equipment only)
LotID Identifier of the lot associated with the substrate by the user. RW N Text
MaterialStatus Current status of the substrate that represents criteria of the
processing quality. The criteria is equipment design
dependent.
RO N Enumerated:
equipment dependent
ObjID Object Identifier. RO Y Text equal to the Substrate
ID
ObjType Object type. RO Y Text = “Substrate”
SubstDestination Identifier of the substrate location on which the substrate
shall be finally restored.
When a carrier is used for restoring the substrate, the value
shall be the concatenation of carrier identifier (carrier ID)
string and a numeric string representing the substrate position
in the carrier to represent the carrier and position of the
substrate restored.
RO Y Text
If empty string, then same
as source substrate location
SubstHistory History of locations visited. RO Y List of structures consisting
of SubstLocID
or
BatchLocID+“.”+SubstPosI
nBatch (batch process
equipment only), TimeIn,
TimeOut
SubstIDStatus Status of the substrate ID. This attribute is mandatory only
when the equipment provided a substrate reader.
RO N Enumerated
NOT CONFIRMED
WAITING FOR HOST
CONFIRMED
CONFIRMATION
FAILED