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SEMI E90-0705 © SEMI 1999, 2005 13 No. Current State Trigger New State Action Comment 21 WAITING FOR HOST Equipment has rece ived a “CancelSubstrate” s ervice. CONFIRMATION FAILED Issue an event fo r transition 21 and up…

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SEMI E90-0705 © SEMI 1999, 2005 12
No. Current State Trigger New State Action Comment
12 IN PROCESS The processing completes
b
ecause the processing activities
were aborted, stopped or
completed. One or more
substrate properties are no
longer affected by the
processing instructions or
measurement of the substrate.
PROCESSING
COMPLETE
One of the
substates
PROCESSED,
ABORTED,
STOPPED,
REJECTED,
LOST,
SKIPPED is
determined.
This is a terminal state. The
substrate either returns to the
specified destination or it is no
longer at the equipment.
13 IN PROCESS The process associated with the
processing instructions
completed and the substrate is to
be processed again.
NEEDS
PROCESSING
The documentation for each
equipment implementation
shall describe the trigger for
this transition. This transition
is not required for compliance
to this standard.
14 NEED
PROCESSING
The substrate has been removed
from the equipment by an
external agent or it is physically
missing (LOST) or the substrate
has been not processed
(SKIPPED).
PROCESSING
COMPLETE
One of the
substrates LOST,
SKIPPED, is
determined.
15 Not used.
16 no state The substrate object is created NOT
CONFIRMED
none This transition is not reported.
17 NOT
CONFIRMED
Substrate was successfully read
and SubstID provided in the
ContentMap matched the
AcquiredID read by the
equipment.
CONFIRMED Issue an event for
transition 17.
Data required to be available
for this event report:
SubstID
AcquiredID
18 NOT
CONFIRMED
Substrate ID reading has failed
after several retries
WAITING FOR
HOST
Issue an event for
transition 18.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
19 NOT
CONFIRMED
Substrate ID was successfully
read but the acquired ID is
different from the one the
equipment used to instantiate the
substrate object.
WAITING FOR
HOST
Issue an event for
transition 19.
Wait for the host
to issue either
“ProceedWithSu
bstrate” or
“CancelSubstrate
” services.
Data required to be available
for this event report:
SubstID
AcquiredID
20 WAITING FOR
HOST
Equipment has received a
“ProceedWithSubstrate” service.
CONFIRMED Issue an event for
transition 20.
Data required to be available
for this event report:
SubstID
AcquiredID (if valid)
SEMI E90-0705 © SEMI 1999, 2005 13
No. Current State Trigger New State Action Comment
21 WAITING FOR
HOST
Equipment has received a
“CancelSubstrate” service.
CONFIRMATION
FAILED
Issue an event for
transition 21 and
update the
substrate
processing status
to SKIPPED
taking the
appropriate
transition. The
substrate is
returned or
placed into its
destination
location.
9.5 Substrate Object Attribute Definition
9.5.1 Table 2 defines attributes for substrate objects. These attributes can be accessed by using GetAttr and SetAttr
messages as defined in SEMI E39 (OSS).
Table 2 Substrate Object Attribute Table
Attribute Name Definition Access Reqmt Format
AcquiredID Contains the ID read from the substrate. Empty string before
the substrate is read. The attribute shall be updated as soon
the Substrate ID has been successfully read.
[Equipment with substrate ID reader only]
RO N Text
BatchLocID Identifier for current batch location. RO N Text (batch process
equipment only)
LotID Identifier of the lot associated with the substrate by the user. RW N Text
MaterialStatus Current status of the substrate that represents criteria of the
processing quality. The criteria is equipment design
dependent.
RO N Enumerated:
equipment dependent
ObjID Object Identifier. RO Y Text equal to the Substrate
ID
ObjType Object type. RO Y Text = “Substrate”
SubstDestination Identifier of the substrate location on which the substrate
shall be finally restored.
When a carrier is used for restoring the substrate, the value
shall be the concatenation of carrier identifier (carrier ID)
string and a numeric string representing the substrate position
in the carrier to represent the carrier and position of the
substrate restored.
RO Y Text
If empty string, then same
as source substrate location
SubstHistory History of locations visited. RO Y List of structures consisting
of SubstLocID
or
BatchLocID+“.”+SubstPosI
nBatch (batch process
equipment only), TimeIn,
TimeOut
SubstIDStatus Status of the substrate ID. This attribute is mandatory only
when the equipment provided a substrate reader.
RO N Enumerated
NOT CONFIRMED
WAITING FOR HOST
CONFIRMED
CONFIRMATION
FAILED
SEMI E90-0705 © SEMI 1999, 2005 14
Attribute Name Definition Access Reqmt Format
SubstLocID Identifier for current equipment substrate location. RO Y Text (If batch process
equipment, this data is
empty while the substrate
belongs to a batch)
SubstPosInBatch Current substrate position in a batch. RO N Text (batch process
equipment only, and empty
if substrate position in a
batch is not informed)
SubstProcState Processing state of the substrate.
“NEEDS PROCESSING”: initial value to indicate that
processing in the equpment is required and has not started.
“IN PROCESS”: processing has started.
“PROCESSED”: processing has completed normally.
“ABORTED”: processing has terminated abnormally.
“STOPPED”: processing has terminated at completion of
certain processing step.
“REJECTED”: the substrate has been identified as needing
special treatment.
“LOST”: the substrate has been removed from the equipment
by an external agent or it is physically missing.
“SKIPPED”: the substrate was not processed.
RO Y Enumerated:
NEEDS PROCESSING
IN PROCESS
PROCESSED
ABORTED
STOPPED
REJECTED
LOST
SKIPPED
SubstSource Identifier of the substrate location on which the substrate has
been initially registered.
When a carrier is used for registering the substrate, the value
shall be the concatenation of carrier identifier (carrier ID)
string and a numeric string representing the substrate position
in the carrier to represent the carrier and position of the
substrate registered.
RO Y Text
SubstState Transport state of the substrate. RO Y Enumerated:
AT SOURCE
AT WORK
AT DESTINATION
SubstType The type of the substrate. It includes wafers, flat panels, CD’s
or masks.
RW N Enumerated:
WAFER
FLAT PANEL
CD
MASK
SubstUsage How the substrate is used, such as “product”, “test”, and
“filler”.
RW N Enumerated:
PRODUCT
TEST
FILLER
Additional types defined
and added by the
equipment.
9.5.2 SubstHistory attribute is a composite data type. The constitute data is defined in Table 3.
Table 3 Attribute Data Definition
Data Identifier Description Form
BatchLocID+“.”+Su
bstPosInBatch
Batch location, on which the group of substrates (e.g., batch) has
visited, with substrate position information in a batch (recorded
while the substrate belongs to a batch).
For example, if BatchLocID = “Chamber-A” and
SubstPosInBatch = “30”, then what is recorded is “Chamber-
A.30”.
Text (batch process equipment only,
and if substrate position in a batch is
not informed “.”+SubstPosInBatch
portion is not recorded).