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SEMI E90-0705 © SEMI 1999, 2005 17 11.5 Batch Location Object Attributes 11.5.1 Table 7 define s attributes for batch location objects. These attributes can be accessed by using GetAttr and SetAttr messages as defined in…

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10.5 Substrate Location Object Attributes
10.5.1 Table 5 defines attributes for substrate location objects. These attributes can be accessed by using GetAttr
and SetAttr messages as defined in SEMI E39 (OSS).
Table 5 Substrate Location Object Attribute Table
Attribute Name Definition Access Reqmt Format
DisableEvents When set to TRUE, the transitions for this
substrate location do not generate events to
the host.
RW Y Boolean
TRUE = Disable
FALSE = Enable
ObjID Object Identifier. RO Y Text equal to the Substrate Location ID
ObjType Object type. RO Y Text = “SubstLoc”
SubstID Substrate Identifier relevant to the location. RO Y Text
SubstLocState Substrate Location state. RO Y Enumerated:
UNOCCUPIED, OCCUPIED
11 Batch Location Object
11.1 A Batch Location Object (BLO) provides a model for identifying a group of substrates (e.g., batch) locations.
Each BLO on an equipment is assigned a batch location ID to uniquely identify it. The assignment shall be
documented by the equipment supplier. The batch location is a persistent object.
11.2 Batch Location State Model
11.2.1 Figure 5 shows the dynamic behavior of the batch location using the Harel state chart representation.
OCCUPIEDUNOCCUPIED
BATCH LOCATION
C
2
1
Figure 5
Dynamic Behavior Model of Batch Location
11.3 Batch Location State Definitions
11.3.1 BATCH LOCATION — the superstate of UNOCCUPIED and OCCUPIED.
11.3.2 UNOCCUPIED — the state in which the batch location does not hold or have any substrate of batch.
11.3.3 OCCUPIED — the state in which the batch location holds one or more substrates of batch.
11.4 Batch Location State Transition
Table 6 Batch Location State Model Transition Table
No. Current State Trigger New State Action Comment
1 UNOCCUPIED A group of substrates (e.g.,
batch), even if they are a part of
group, moves onto the batch
location.
OCCUPIED None.
2 OCCUPIED All substrates of the group (e.g.,
batch) moves off the location.
UNOCCUPIED Update substrate
tracking history.
SEMI E90-0705 © SEMI 1999, 2005 17
11.5 Batch Location Object Attributes
11.5.1 Table 7 defines attributes for batch location objects. These attributes can be accessed by using GetAttr and
SetAttr messages as defined in SEMI E39 (OSS).
Table 7 Batch Location Object Attribute Table
Attribute Name Definition Access Reqmt Format
ObjID Object Identifier. RO N Text equal to the Batch Location ID
ObjType Object type. RO N Text = “BatchLoc”
BatchLocState Batch Location state. RO N Enumerated:
UNOCCUPIED, OCCUPIED
BatchSubstIDMap Ordered list of substrate identifiers
corresponding to the positions in a batch
(e.g., slot positions of a batch container or
a process carrier).
RO N Ordered list of SubstID
(Ordered list indicates position in the
batch and SubstID can be actual
substrate identifier, blank “” when
location is empty or “filler” when
such substrate is used.)
This attribute is updated each time a
substrate is moved into or out of the
batch or as soon as the equipment
has the information.
DisableEvents When set to TRUE, the transitions for this
substrate location do not generate events
to the host.
RW Y Boolean
TRUE = Disable
FALSE = Enable
12 Substrate Tracking Services
12.1 Creating and Deleting Substrate Objects
12.1.1 Equipment may create substrate objects as appropriate during equipment operation. On some equipment (at
the option of the equipment designer), substrate objects may also be registered (created) at the equipment through
the host-initiated Create service defined in SEMI E39. Equipment is not required to provide host-initiated Register
(Create) Substrate or Remove Substrate services for fundamental compliance to STS. Table 8 defines the attribute
settings that may be initialized through this service.
12.1.2 In general, it depends on the application whether or not attributes are initialized by the user of the create
service. In some situation, it may be necessary to match the new substrate with a location, for example, while in
other situations it would be unnecessary. Each application must specify its own requirements.
12.1.3 ObjType is a required argument of the Create service and should not be reset by including it as an attribute
setting. In the table, M indicates Mandatory, O indicates Optional, and R specifies Restricted (shall be ignored if
used).
Table 8 Substrate Attributes Settable through Create
Substrate Attribute Name Use as AttrSetting in Create Service
LotID O
MaterialStatus O
ObjID M
ObjType R
SubstDestination O
SubstHistory O
SubstLocID O
SubstProcState O
SubstSource O
SubstState O
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Substrate Attribute Name Use as AttrSetting in Create Service
SubstType O
SubstUsage O
12.1.4 Use of attribute settings for the Delete service are optional and specific to the application.
12.2 Table 9 defines services required for substrate tracking. These services must be supported with substrate
object.
Table 9 Substrate Tracking Service Message Definition Table
Message Service Name Type Description
CancelSubstrate R Request to the equipment to skip the substrate and move into its source location or
destination location. Equipment instantiated substrate ID is required by this service. This
service is only required when the equipment provides capabilities for reading substrate
identifiers.
Change substrate state R Request to change substrate state. This message can be used to inform the equipment that
external intervention has occurred and the state of the substrate (SubstState) must be
corrected. For example, changing from AT DESTINATION state to AT SOURCE state.
ProceedWithSubstrate R Request to the equipment to accept the substrate. Equipment instantiated substrate ID is
required by this service. This service is only required when the equipment provides
capabilities for reading substrate identifiers.
UpdateSubstrateObject R Request to create a substrate object or to continue updating existent substrate object
attributes for the specified substrate identifier with the substrate information provided with
the service. If the substrate object was previously instantiated, the attribute(s) of the
substrate are updated as specified with this service. If transfer is not completed or substrate
is not at the equipment the service request fails. This service is used when substrates are
moved directly between linked equipment without the use of a carrier. This is an optional
service.
12.3 Substrate Tracking Service Parameter Dictionary
Table 10 Substrate Tracking Service Parameter
Dictionary Parameter Form Description
ErrorCode Enumerated Contains the code for the specific error found.
ErrorText Text Text in support of the error code.
STAcknowledge Enumerated Acknowledge of request.
Status A list of ErrorCode/ErrorText pairs Report any errors found.
STStatus A structure consisting of STAcknowledge
and Status
Return information for a service.
SubstID Text Identifier of a substrate.
SubstLocID Text Identifier of substrate location.
SubProcState Enumerated Processing State of a substrate.
SubstState Enumerated Transport State of a substrate.