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SEMI E90-0705 © SEMI 1999, 2005 21  Table 15 Variables Required for Substrate Ob ject State Model Transitions  Table 16 Vari ables Require d for Substrat e Location Object State Model Transitions  Table 17 Vari ables …

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SEMI E90-0705 © SEMI 1999, 2005 20
Parameter Req/Ind Rsp/Conf Description
SubstrateObjectAttributes M = SubstrateID, SubstType, and at least one of the following
must be included: SubstState, SubstProcState. See
UpdateSubstrateObject service message definition for
additional requirements.
OperationID C — Used if multiple requests will be linked to events. Set to
zero otherwise.
ObjectLinkID — C Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus — M Acknowledge of the service acceptance and a list of error
code and error text pairs if any.
ObjectActionParameterResult — C List of return parameters regarding the result of the
request as name/value pairs. Service returns the substrate
object attributes updated that the request specified.
Table 13 ProceedWithSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “ProceedWithSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
Table 14 CancelSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “CancelSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI
E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
13 Variable Data
13.1 The host may inquire about any data related to specific Substrates, Substrate Locations and Batch Locations at
any time by using the OSS service GetAttr.
13.2 Implementations of Specification for Substrate Tracking that use the Event Reporting capability specified by
SEMI E30 (GEM) have the following requirement: For the objects defined by Specification for Substrate Tracking,
the identifier of that object and all of the attributes of that object shall be available for inclusion in event reports
associated with that object. The tables listed below specify the object attribute variables that must be available for
state model transitions:
SEMI E90-0705 © SEMI 1999, 2005 21
Table 15 Variables Required for Substrate Object State Model Transitions
Table 16 Variables Required for Substrate Location Object State Model Transitions
Table 17 Variables Required for Batch Location Object State Model Transitions
13.3 Table 18 provides the definition of Status Variable Data that equipment shall support for the persistent objects
defined by this standard, namely Substrate Location and Batch Location.
13.4 Variables in each table are presented in alphabetical order.
Table 15 Variables Required for Substrate Object State Model Transitions
Variable Name Description Access Form Comment
AcquiredID Contains the ID read from the substrate.
Empty string before the substrate ID is
read.
RO Text. Empty string if read
failed.
AcquiredIDList A list of AcquiredIDs related by the
same Substrate Object State Model
state transition that triggered a
collection event.
RO Ordered list of
AcquiredID.
This variable is
mandatory only
when the
equipment
provides a
substrate reader.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of
substrates
involved in the
related state model
transition.
SubstBatchLocID Current BatchLocID for the substrate
associated with the last event.
RO Text. Batch process
equipment only.
Empty if substrate is
not part of a batch.
SubstBatchLocIDList A list of SubstBatchLocIDs related by
the same Substrate Object State Model
state transition that triggered a collection
event.
RO Ordered list of
SubstBatchLocID.
Batch process
equipment only.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstDestination Destination Substrate Location for the
substrate associated with the last event.
RO Text. If empty string, then
same as source
Substrate Location.
SubstDestinationList A list of SubstDestinations related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstDestination.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SEMI E90-0705 © SEMI 1999, 2005 22
Variable Name Description Access Form Comment
SubstHistory List of history of locations visited for the
substrate associated with the last event.
RO List of structures consisting
of Location ID, Time In, and
Time Out.
SubstHistoryList A list of SubstHistorys related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstHistory.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstID Identifier of substrate associated with last
event.
RO Text.
SubstIDList A list of substrate identifiers related by
the same Substrate Object State Model or
Substrate Location Object State Model
state transition that triggered a collection
event with which this variable was
associated.
RO Ordered list of
SubstID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstIDStatus Status of the substrate ID.
RO Enumerated:
NOT CONFIRMED
WAITING FOR HOST
CONFIRMED
CONFIRMATION FAILED
This variable is
mandatory only
when the equipment
provides a substrate
reader.
SubstIDStatusList
A list of SubstIDStatuses related by the
same Substrate Object State
Model state transition that triggered a
collection event.
RO Ordered list of
SubstIDStatus.
This variable is
mandatory only
when the equipment
provides a substrate
reader.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of substrates
involved in the
related state model
transition.
SubstSubstLocID Current substrate location for the
substrate associated with the last event.
RO Text. If batch process
equipment, this data
is empty while the
substrate belongs to a
batch.