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SEMI E90-0705 © SEMI 1999, 2005 22 Variable Name Description Access Form Comment SubstHistory List of history of locations v isited for the substrate associated with the las t event. RO List of structures consisting of L…

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SEMI E90-0705 © SEMI 1999, 2005 21
Table 15 Variables Required for Substrate Object State Model Transitions
Table 16 Variables Required for Substrate Location Object State Model Transitions
Table 17 Variables Required for Batch Location Object State Model Transitions
13.3 Table 18 provides the definition of Status Variable Data that equipment shall support for the persistent objects
defined by this standard, namely Substrate Location and Batch Location.
13.4 Variables in each table are presented in alphabetical order.
Table 15 Variables Required for Substrate Object State Model Transitions
Variable Name Description Access Form Comment
AcquiredID Contains the ID read from the substrate.
Empty string before the substrate ID is
read.
RO Text. Empty string if read
failed.
AcquiredIDList A list of AcquiredIDs related by the
same Substrate Object State Model
state transition that triggered a
collection event.
RO Ordered list of
AcquiredID.
This variable is
mandatory only
when the
equipment
provides a
substrate reader.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of
substrates
involved in the
related state model
transition.
SubstBatchLocID Current BatchLocID for the substrate
associated with the last event.
RO Text. Batch process
equipment only.
Empty if substrate is
not part of a batch.
SubstBatchLocIDList A list of SubstBatchLocIDs related by
the same Substrate Object State Model
state transition that triggered a collection
event.
RO Ordered list of
SubstBatchLocID.
Batch process
equipment only.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstDestination Destination Substrate Location for the
substrate associated with the last event.
RO Text. If empty string, then
same as source
Substrate Location.
SubstDestinationList A list of SubstDestinations related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstDestination.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SEMI E90-0705 © SEMI 1999, 2005 22
Variable Name Description Access Form Comment
SubstHistory List of history of locations visited for the
substrate associated with the last event.
RO List of structures consisting
of Location ID, Time In, and
Time Out.
SubstHistoryList A list of SubstHistorys related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstHistory.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstID Identifier of substrate associated with last
event.
RO Text.
SubstIDList A list of substrate identifiers related by
the same Substrate Object State Model or
Substrate Location Object State Model
state transition that triggered a collection
event with which this variable was
associated.
RO Ordered list of
SubstID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstIDStatus Status of the substrate ID.
RO Enumerated:
NOT CONFIRMED
WAITING FOR HOST
CONFIRMED
CONFIRMATION FAILED
This variable is
mandatory only
when the equipment
provides a substrate
reader.
SubstIDStatusList
A list of SubstIDStatuses related by the
same Substrate Object State
Model state transition that triggered a
collection event.
RO Ordered list of
SubstIDStatus.
This variable is
mandatory only
when the equipment
provides a substrate
reader.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of substrates
involved in the
related state model
transition.
SubstSubstLocID Current substrate location for the
substrate associated with the last event.
RO Text. If batch process
equipment, this data
is empty while the
substrate belongs to a
batch.
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Variable Name Description Access Form Comment
SubstLocIDList A list of substrate location identifiers
related by the same Substrate Object
State Model state transition that triggered
a collection event.
RO Ordered list of
SubstSubstLocID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of substrates
involved in the
related state model
transition.
If batch process
equipment, this will
be a list of empty
strings while the
substrate belongs to a
batch.
SubstLotID The LotID of the Substrate Object
associated with last event.
RO Text.
SubstLotIDList
A list of substrate LotIDs related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstLotID.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstMtrlStatus Processing quality criteria associated
with the last event.
RO Enumerated (equipment
specific).
SubstMtrlStatusList A list of MtrlStatus related by the same
Substrate Object State Model state
transition that triggered a collection
event.
RO
Ordered list of
SubstMtrlStatus.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstPosInBatch Current substrate position in a batch for
the substrate associated with the last
event.
RO Text. Batch process
equipment only.
Empty if substrate
position in a batch is
not informed or the
substrate is not part
of a batch.
SubstPosInBatchList A list of SubstPosInBatchs related by
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstPosInBatch.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstProcState Processing state of the substrate
associated with the last event.
RO Enumerated:
NEEDS PROCESSING
IN PROCESS
PROCESSED
ABORTED
STOPPED
REJECTED
May not be
implemented when
the equipment does
not have capability of
process.