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SEMI E90.1-0705 © SEMI 2001, 2005 2 Table 1 Services Message Mapp ing Table Service Name Stream, Function SECS-II Message Name change substrate s tate (not ye t defined) (not yet defined) register substrate S14,F9/10 Cre…

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SEMI E90.1-0705 © SEMI 2001, 2005 1
SEMI E90.1-0705
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL
SUBSTRATE TRACKING
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2001;
previously published July 2003.
1 Purpose
1.1 This document maps the services and data of SEMI E90 to SECS-II streams and functions, and data definitions.
2 Scope
2.1 This is a specification covering equipment supporting automated substrate tracking.
2.2 This document applies to all implementations of SEMI E90 that use the SECS-II message protocol (SEMI E5).
Compliance to this standard requires compliance to both SEMI E90 and SEMI E5.
2.3 This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of
the users of this standard to establish appropriate safety and health practices and determine the applicability of
regulatory limitations prior to use.
2.4 This standard is provisional. To have the provisional status removed, the following must be completed:
Table 1, Services Message Mapping Table
Table 3, Services Parameters to SECS-II Data Items Mapping
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E53 — Event Reporting
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Mapping
4.1 This section shows the specific SECS-II streams and functions that shall be used for SECS-II implementation of
the services defined in SEMI E90, as well as the parameter mapping for data attached to services.
4.2 Message Mapping
4.2.1 Services Message Mapping — Table 1 defines the relationships between SEMI E90 services and SECS-II
messages.
4.2.2 Event Message Mapping — Table 2 defines the relationships between SEMI E90 collection events and SECS-
II messages.
SEMI E90.1-0705 © SEMI 2001, 2005 2
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
change substrate state (not yet defined) (not yet defined)
register substrate S14,F9/10 Create Object Request/Acknowledge (SEMI E39.1)
remove substrate S14,F11/12 Delete Object Request/Acknowledge (SEMI E39.1)
UpdateSubstrateObject S14F19/F20 Generic Service Request/Acknowledge
ProceedWithSubstrate S14F19/F20 Generic Service Request/Acknowledge
CancelSubstrate S14F19/F20 Generic Service Request/Acknowledge
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All state model
transitions
If SEMI E30 style events:
S6F11/12
If SEMI E53 style events:
S6F11/12
S6F13/14
If SEMI E30 style events:
Event Report Send/Acknowledge
If SEMI E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
4.3 Parameter Mapping — Table 3 defines the relationships between SEMI E90 service parameters and SECS-II
data definitions.
Table 3 Service Parameters to SECS-II Data Items Mapping
Parameter Name Range SECS-II Data Item
ErrorCode Enumerated. ERRCODE
ErrorText 1 to 80 characters. ERRTEXT
ObjectAction “UpdateSubstrateObject”. SVCNAME
ObjectActionStatus List of service acknowledge and status. L,2
1. SVCACK
2. Status
ObjectAction-
ParameterResult
(List of) name value pairs providing information about
the attributes successfully set.
L,n
1. L,2
1. SPNAME
1
2. SPVAL
1
:
n. L,2
1. SPNAME
n
2. SPVAL
n
ObjectLinkID 51. LINKID
OperationID 51. OPID
STAcknowledge 0 if success; 1 if error
(Conforms to ObjAck in SEMI E39.1)
OBJACK
Status List of error information. L,n n = number of errors
1. L,2
1. <ErrorCode
1
>
2. <ErrorText
1
>
.
.
n. L,2
1. <ErrorCode
n
>
2. <ErrorText
n
>
SEMI E90.1-0705 © SEMI 2001, 2005 3
Parameter Name Range SECS-II Data Item
STStatus STAcknowledge and Status. L,2
1. <STAcknowledge>
2. <Status>
SubstID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstIDList
(ordered list of)
List of Substrate IDs. L,n n = number of substrate identifiers
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstLocID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstLocIDList
(ordered list of)
List of Substrate Location ID’s corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstLocID
1
>
.
.
n. <SubstLocID
n
>
SubstProcState Enumerated per Variable SubstProcState. U1
SubstProcStateList
(ordered list of)
List of Substrate Processing States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstProcState
1
>
.
.
n. <SubstProcState
n
>
SubstrateObject-
Attributes
(List of) substrate object attribute names and values. L,n
1. L,2
1. SPNAME
1
2. SPVAL
1
:
n. L,2
1. SPNAME
n
2. SPVAL
n
SubstState Enumerated per Variable SubstState. U1
SubstStateList
(ordered list of)
List of Substrate Transport States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifers in
SubstIDList (ordered list of)
1. <SubstState
1
>
.
.
n. <SubstState
n
>
4.4 SECS-II Data Items without Corresponding SEMI E90 Parameters — Table 4 contains the SECS-II data items
that do not correspond to SEMI E90’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
“TimeIn” from SubstHistory variable data definition TIMESTAMP
“TimeOut” from SubstHistory variable data definition TIMESTAMP
5 Variable Data Item Mapping
5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E90 variable data items.