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SEMI E90.1-0705 © SEMI 2001, 2005 3 Parameter Name Range SECS-II Data Item STStatus STAcknowledge and Status. L,2 1. <STAcknowledge> 2. <Status > SubstID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJI…

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SEMI E90.1-0705 © SEMI 2001, 2005 2
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
change substrate state (not yet defined) (not yet defined)
register substrate S14,F9/10 Create Object Request/Acknowledge (SEMI E39.1)
remove substrate S14,F11/12 Delete Object Request/Acknowledge (SEMI E39.1)
UpdateSubstrateObject S14F19/F20 Generic Service Request/Acknowledge
ProceedWithSubstrate S14F19/F20 Generic Service Request/Acknowledge
CancelSubstrate S14F19/F20 Generic Service Request/Acknowledge
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All state model
transitions
If SEMI E30 style events:
S6F11/12
If SEMI E53 style events:
S6F11/12
S6F13/14
If SEMI E30 style events:
Event Report Send/Acknowledge
If SEMI E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
4.3 Parameter Mapping — Table 3 defines the relationships between SEMI E90 service parameters and SECS-II
data definitions.
Table 3 Service Parameters to SECS-II Data Items Mapping
Parameter Name Range SECS-II Data Item
ErrorCode Enumerated. ERRCODE
ErrorText 1 to 80 characters. ERRTEXT
ObjectAction “UpdateSubstrateObject”. SVCNAME
ObjectActionStatus List of service acknowledge and status. L,2
1. SVCACK
2. Status
ObjectAction-
ParameterResult
(List of) name value pairs providing information about
the attributes successfully set.
L,n
1. L,2
1. SPNAME
1
2. SPVAL
1
:
n. L,2
1. SPNAME
n
2. SPVAL
n
ObjectLinkID 51. LINKID
OperationID 51. OPID
STAcknowledge 0 if success; 1 if error
(Conforms to ObjAck in SEMI E39.1)
OBJACK
Status List of error information. L,n n = number of errors
1. L,2
1. <ErrorCode
1
>
2. <ErrorText
1
>
.
.
n. L,2
1. <ErrorCode
n
>
2. <ErrorText
n
>
SEMI E90.1-0705 © SEMI 2001, 2005 3
Parameter Name Range SECS-II Data Item
STStatus STAcknowledge and Status. L,2
1. <STAcknowledge>
2. <Status>
SubstID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstIDList
(ordered list of)
List of Substrate IDs. L,n n = number of substrate identifiers
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstLocID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstLocIDList
(ordered list of)
List of Substrate Location ID’s corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstLocID
1
>
.
.
n. <SubstLocID
n
>
SubstProcState Enumerated per Variable SubstProcState. U1
SubstProcStateList
(ordered list of)
List of Substrate Processing States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstProcState
1
>
.
.
n. <SubstProcState
n
>
SubstrateObject-
Attributes
(List of) substrate object attribute names and values. L,n
1. L,2
1. SPNAME
1
2. SPVAL
1
:
n. L,2
1. SPNAME
n
2. SPVAL
n
SubstState Enumerated per Variable SubstState. U1
SubstStateList
(ordered list of)
List of Substrate Transport States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifers in
SubstIDList (ordered list of)
1. <SubstState
1
>
.
.
n. <SubstState
n
>
4.4 SECS-II Data Items without Corresponding SEMI E90 Parameters — Table 4 contains the SECS-II data items
that do not correspond to SEMI E90’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
“TimeIn” from SubstHistory variable data definition TIMESTAMP
“TimeOut” from SubstHistory variable data definition TIMESTAMP
5 Variable Data Item Mapping
5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E90 variable data items.
SEMI E90.1-0705 © SEMI 2001, 2005 4
Table 5 Variable Data Item Mapping
Variable Name Class Format
BatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocState DVVAL 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchLocState
i
SV 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchSubstIDMap DVVAL L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
BatchSubstIDMap
i
SV L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstBatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstDestination DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstHistory DVVAL L,n n = number of substrate locations visited by the substrate
1. L,3
1. <SubstLocID
1
>
2. <TimeIn
1
>
3. <TimeOut
1
>
.
.
n. L,3
1. <SubstLocID
n
>
2. <TimeIn
n
>
3. <TimeOut
n
>
SubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocState DVVAL 51 (U1 )
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocState
i
SV 51 (U1)
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocSubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocSubstrID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLotID DVVAL A[1..80]
SubstMtrlStatus DVVAL U1 (equipment dependent enumeration)