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SEMI E90.1-0705 © SEMI 2001, 2005 5 Variable Name Class Format SubstPosInBatch DVVAL A (range is equipment dependent) SubstProcState DVVAL 51 (U1 ) Enumerated as: 0 – NEEDS PROCESSING 1 – IN PROCESS 2 – PROCESSED 3 – ABO…

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SEMI E90.1-0705 © SEMI 2001, 2005 4
Table 5 Variable Data Item Mapping
Variable Name Class Format
BatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocState DVVAL 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchLocState
i
SV 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchSubstIDMap DVVAL L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
BatchSubstIDMap
i
SV L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstBatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstDestination DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstHistory DVVAL L,n n = number of substrate locations visited by the substrate
1. L,3
1. <SubstLocID
1
>
2. <TimeIn
1
>
3. <TimeOut
1
>
.
.
n. L,3
1. <SubstLocID
n
>
2. <TimeIn
n
>
3. <TimeOut
n
>
SubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocState DVVAL 51 (U1 )
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocState
i
SV 51 (U1)
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocSubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocSubstrID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLotID DVVAL A[1..80]
SubstMtrlStatus DVVAL U1 (equipment dependent enumeration)
SEMI E90.1-0705 © SEMI 2001, 2005 5
Variable Name Class Format
SubstPosInBatch DVVAL A (range is equipment dependent)
SubstProcState DVVAL 51 (U1 )
Enumerated as:
0 – NEEDS PROCESSING
1 – IN PROCESS
2 – PROCESSED
3 – ABORTED
4 – STOPPED
5 – REJECTED
6 – LOST
7 – SKIPPED
SubstrateReaderEnabled EC Binary
0 = Disabled
1 = Enabled
SubstSource DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstState DVVAL 51 (U1 )
Enumerated as:
0 – AT SOURCE
1 – AT WORK
2 – AT DESTINATION
SubstSubstLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstType DVVAL 51 (U1 )
Enumerated as:
0 – WAFER
1 – FLAT PANEL
2 – CD
3 – MASK
SubstUsage DVVAL 51 (U1)
Enumerated as:
0 – PRODUCT
1 – TEST
2 – FILLER
6 SECS-II Attribute Definitions
6.1 Substrate Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for the
SEMI E90 Substrate Object.
Table 6 Substrate Object SECS-II Attribute Definitions
Attribute Name Attribute Date Form: SECS-II Structure
“BatchLocID” <OBJID> BatchLocID
“ObjType” “Substrate”
“ObjID” <OBJID> SubstID (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
§6.)
“LotID” 20 (A) LotID
“MaterialStatus” 51 (U1) MaterialStatus
MaterialStatus is an equipment specific enumerated value
“SubstDestination” <OBJID> SubstLocID
SEMI E90.1-0705 © SEMI 2001, 2005 6
Attribute Name Attribute Date Form: SECS-II Structure
“SubstHistory” L,n n = number of substrate locations visited by the substrate
1. L,3
1. <OBJID
1
> SubstLocID
1
2. <TIMESTAMP
1
> TimeIn
1
3. <TIMESTAMP
1
> TimeOut
1
.
.
n. L,3
1. <OBJID
n
> SubstLocID
n
2. <TIMESTAMP
n
> TimeIn
n
3. <TIMESTAMP
n
> TimeOut
n
“SubstLocID” <OBJID> SubstLocID
“SubstPosInBatch” 20(A) SubstPosInBatch
“SubstProcState” 51 (U1) SubstProcState
SubstProcState enumerated per Variable SubstProcState.
“SubstSource” <OBJID> SubstLocID
“SubstState” 51 (U1) SubstState
SubstState enumerated per Variable SubstState.
“SubstType” 51 (U1) SubstType
SubstType enumerated per Variable SubstType.
“SubstUsage” 51 (U1) SubstUsage
SubstUsage enumerated per Variable SubstUsage.
“SubstIDStatus” 51 (U1) Enumerated
0 = NOT CONFIRMED
1 = WAITING FOR HOST
2 = CONFIRMED
3 = CONFIRMATION FAILED
“AcquiredID” A[0,80]
6.2 Substrate Location Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions
for the E90 Substrate Location Object.
Table 7 Substrate Location Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“DisableEvents” 11 (Boolean)
“ObjType” “SubstLoc”
“ObjID” <OBJID> SubstLocID (Conforms to the restrictions of ObjID as specified in SEMI
E39.1, §6.)
“SubstID” <OBJID> SubstID
“SubstLocState” 51 (U1) SubstLocState
SubstLocState enumerated per Variable SubstLocState.
6.3 Batch Location Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for
the SEMI E90 Batch Location Object.
Table 8 Batch Location Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjID” <OBJID> BatchLocID (Conforms to the restrictions of ObjID as specified in SEMI E39.1, §6.)
“ObjType” "BatchLoc"