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SEMI E91-0600 © SEMI 1999 , 2000 18 Table 14 Re mote Comman d vs. Process State/Prober Job State Command Na me ABO RT JOB_CANCEL JOB_CREATE PRE-DATA_DOWNLOAD (See NOTE 3.) ONLINE-LOCAL ONLINE-REMOTE PA USE PP-SELECT RESU…

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SEMI E91-0600 © SEMI 1999, 200017
Command Parameter
Command Name
Name OPT/REQ Description Format
ProberJobID REQ. Prober Job ID A[30]
PROCID REQ. Process ID A[20]
LOC OPT Port number of the cassette in which wafers to be
processed are placed.
B
PRODID OPT Product name (i.e., Device type) A[24]
SLOTNO OPT (See
NOTE 1.)
Slot number in which the wafer is held. A[2]
WAFERNO OPT (See
NOTE 1.)
Wafer number set by the host or operator. A[2]
WAFERID OPT (See
NOTE 1.)
Wafer ID read by OCR. A[28]
IDTYP REQ. ID type to recognize a wafer. A[8]
WAFSIZE OPT Wafer size A[3]
FLAT OPT Flat or Notch A[5]
FLATANGLE OPT Flat angle A[3]
ROW REQ. Row count U2
COLUMN REQ. Column count U2
DIESIZE_X OPT X die size A[6]
DIESIZE_Y OPT Y die size A[6]
REFDIECOORD_X REQ. X coordinator of reference die A[4]
REFDIECOORD_Y REQ. Y coordinator of reference die A[4]
REFDIEPOS_X REQ. X address of reference die from wafer center I4
REFDIEPOS_Y REQ. Y address of reference die from wafer center I4
BINLIST OPT Bin value array containing pass/fail information. B[n]
PRE-
DATA_DOWNLOAD
PreviousResultData REQ. Previous result data information L[n]
ONLINE-LOCAL No parameter
ONLINE-REMOTE No parameter
PAUSE No parameter
PP-SELECT PPID REQ. Product type master record name. A[]
RESUME Resume-Die OPT Specify which die to restart the processing
(e.g., last die, current die, next die).
B
START ProberJobID REQ. ID of Prober Job to be started. A[30]
STOP No parameter
NOTE 1: At least one of <SLOTNO>, <WAFERNO>, and <WAFERID> need to be set.
10.5 Remote Commands and PSEM Process Model Mapping
10.5.1 Each remote command either can or cannot be executed depending on a state other than the control state.
10.5.2 The following table shows remote commands and the relationship between process state to be operated by
these commands and Prober Job state.
SEMI E91-0600 © SEMI 1999, 2000 18
Table 14 Remote Command vs. Process State/Prober Job State
Command Name
ABORT
JOB_CANCEL
JOB_CREATE
PRE-DATA_DOWNLOAD (See NOTE 3.)
ONLINE-LOCAL
ONLINE-REMOTE
PAUSE
PP-SELECT
RESUME
START
STOP
PROCESSING STATE
INIT
IDLE X (See
NOTE 1.)
X (See
NOTE 2.)
X (See
NOTE 2.)
IDLE with ALARMS
MAINTENANCE
PROCESSING ACTIVE
...PROCESS
......SETTING UP X X X
......EXECUTING X X X
...PAUSE
......PROCESS PAUSE
.........PAUSING X X
.........PAUSED X X X
.........CHECKING X X
.........PAUSED SETTING UP X X
......ALARM PAUSED X X
...STOPPING X
...ABORTING
Prober Job STATE
Undefined X (See
NOTE 1.)
X (See
NOTE 2.)
X (See
NOTE 2.)
X
JOB CREATED X X
JOB ACTIVE
...JOB SET UP X (See
NOTE 3.)
...JOB PROCESSING X (See
NOTE 3.)
(X)
JOB STOPPING
JOB ABORTING
NOTE 1: Both IDLE and Undefined need hold true for PP-SELECT.
NOTE 2: Both IDLE and Undefined need hold true for ONLINE-REMOTE and ONLINE-LOCAL.
NOTE 3: PRE-DATA_DOWNLOAD is valid when Ready to Receive Previous Data event is reported.
SEMI E91-0600 © SEMI 1999, 200019
10.6 Restriction on the Operator by Control States
10.6.1 For the remote commands, the operator of the prober or the host is restricted by the control states of the
equipment.
Table 15 Table of Restrictions on the Operator by Control States
Operator Host
Remote Commands
LOCAL REMOTE LOCAL REMOTE
JOB_CREATE O X O O
PP-SELECT O X O O
PRE-DATA _DOWNLOAD X X O O
JOB_CANCEL O X O O
START OXX O
PAUSE O O X O
RESUME O O X O
STOP O O X O
ABORT O O X O
ONLINE-LOCAL X O X O
ONLINE-REMOTE O X O X
O: Operation is allowed.
X: Operation is prohibited.
11 Scenario
11.1 The purpose of this section is to document a typical PSEM specified operation scenario.
11.2 From Power-On to Online Remote
11.2.1 A typical scenario of transition from equipment power-on to online remote is shown below.
Comment Host Equipment Comment
(Equipment power-on)
(Equipment initialization operation)
S1,F13 Communication establishment request
Communication establishment request
confirmation
S1,F14
(Press the online transition switch.)
S1,F1 Are You There Request
Online data S1,F2
(Online transition is completed.)
S6,F11 Send ONLINE-REMOTE transition event
report
Confirm event report S6,F12
S6,F11 Send IDLE transition event report
Confirm event report S6,F12 S6,F12
11.3 1 Lot Processing in Online Remote
11.3.1 A typical scenario from 1 lot p rocessing instruction to processing completion in online remote is shown
below.