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SEMI E91-0600 © SEMI 1999 , 2000 21 12 GEM Addition Reques t 12.1 The pu rpose of th is section is t o sp ecify all GEM addition requ e sts which are required to su pport the equipment of this cla ss. 12.2 Requi rement s…

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SEMI E91-0600 © SEMI 1999, 2000 20
Comment Host Equipment Comment
ONLINE-REMOTE IDLE
Send JOB_CREATE command S2,F49
S2,F50 Confirm host command
S6,F11 Send Prober Job Created event report
Confirm event report S6,F12
(Carry in cassette)
S6,F11 Send material carry-in event report
Confirm event report S6,F12
Send START command S2,F49
S2,F50 Confirm host command
S6,F11 Send Prober Job Started event report
Confirm event report S6,F12
S6,F11 Send SETTING UP transition event
report
Confirm event report S6,F12
(Equipment setup is started.)
(Equipment setup is completed.)
S6,F11 Send Enter Processing event report
Confirm event report S6,F12
S6,F11 Send EXECUTING transition event
report
Confirm event report S6,F12
[DO] “wafer count times”
(Wafer load is completed.)
[IF]
Is Instruction data required?
[THEN]
S6,F11 Send Waiting Previous Data event report
Confirm event report S6,F12
Send PRE-DATA_DOWNLOAD command S2,F49
S2,F50 Confirm host command
[END_IF]
(Wafer processing is started.)
(Wafer processing is completed.)
S6,F11 Send wafer end event report (Result
Data)
Confirm event report S6,F12
(Wafer unload is completed.)
[END_DO]
S6,F11 Send End Processing event report
Confirm event report S6,F12
S6,F11 Send IDLE transition event report
Confirm event report S6,F12
(Carry out cassette)
S6,F11 Send material carry-out event report
Confirm event report S6,F12
NOTE 1: Each event report send order in Prober Job Started and SETTING UP transition, Enter Processing and EXECUTING transition, and
End Processing and IDLE transition may be inverted.
SEMI E91-0600 © SEMI 1999, 200021
12 GEM Addition Request
12.1 The purpose of this section is to specify all GEM addition requests which are required to support the
equipment of this class.
12.2 Requirements
12.2.1 GEM addition requests required of PSEM are as shown below:
• Establish Communications,
• Dynamic Event Report Configuration,
• Variable Data Collection,
• Status Data Collection,
• Alarm Management,
• Remote Control,
• Equipment Constants,
• Process Program Management,
• Equipment Terminal Services,
• Clock,
• Spooling, and
• Control (host-initiated).
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E93-0200 © SEMI 1999, 2004 1
SEMI E93-0200 (Withdrawn 0703)
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK ADVANCED
PROCESS CONTROL COMPONENT
This provisional specification was technically approved by the Global Information & Control Committee and
is the direct responsibility of the North American Information & Control Committee. Current edition
approved by the North American Regional Standards Committee on April 11, 2003. Initially available at
www.semi.org June 2003; to be published July 2003. Originally published September 1999, previously
published February 2000.
NOTICE: This document was balloted and approved
for withdrawal in 2003.
1 Purpose
1.1 The Advanced Process Control (APC) component
supports the Process Machine component' s execution of
process machine jobs by optimizing machine-specific
settings for the current material and machine state to
achieve desired process effects. It may also detect faults
in processing and recommend an appropriate response
to the Process Machine component. An APC compo-
nent may include statistical process control, model-
based process control, multi-variate analysis, trace
analysis, fault pattern matching, or other analysis
techniques.
1.2 The Advanced Process Control component
specification does not constrain implementation
approaches. However, subcomponents are defined to
enable integration with different types of analysis and
computation mechanisms, specifically those provided in
other software systems. The subcomponents are defined
principally along boundaries expected to align with
products addressing process control in the factory. The
number of subcomponents offered by suppliers may
vary, with some suppliers supporting all of the
subcomponent interfaces and others focusing on a
specific subset of subcomponents. These subcomponent
boundaries provide the customer with added flexibility
to integrate and use multiple suppliers’ products.
1.3 This specification provides the interfaces required
by Manufacturing Execution Systems to:
• Define control data structures to support control
algorithms.
• Launch, coordinate, and monitor the execution of
control processing and analysis algorithms.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.