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SEMI E94-0705 © SEMI 2000, 2005 1 SEMI E94-0705 SPECIFICA TION FOR CONTROL J OB MANAGEMENT This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This edition was approved for p…
SEMI E93-0200 © SEMI 1999, 2004 1
SEMI E93-0200 (Withdrawn 0703)
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK ADVANCED
PROCESS CONTROL COMPONENT
This provisional specification was technically approved by the Global Information & Control Committee and
is the direct responsibility of the North American Information & Control Committee. Current edition
approved by the North American Regional Standards Committee on April 11, 2003. Initially available at
www.semi.org June 2003; to be published July 2003. Originally published September 1999, previously
published February 2000.
NOTICE: This document was balloted and approved
for withdrawal in 2003.
1 Purpose
1.1 The Advanced Process Control (APC) component
supports the Process Machine component' s execution of
process machine jobs by optimizing machine-specific
settings for the current material and machine state to
achieve desired process effects. It may also detect faults
in processing and recommend an appropriate response
to the Process Machine component. An APC compo-
nent may include statistical process control, model-
based process control, multi-variate analysis, trace
analysis, fault pattern matching, or other analysis
techniques.
1.2 The Advanced Process Control component
specification does not constrain implementation
approaches. However, subcomponents are defined to
enable integration with different types of analysis and
computation mechanisms, specifically those provided in
other software systems. The subcomponents are defined
principally along boundaries expected to align with
products addressing process control in the factory. The
number of subcomponents offered by suppliers may
vary, with some suppliers supporting all of the
subcomponent interfaces and others focusing on a
specific subset of subcomponents. These subcomponent
boundaries provide the customer with added flexibility
to integrate and use multiple suppliers’ products.
1.3 This specification provides the interfaces required
by Manufacturing Execution Systems to:
• Define control data structures to support control
algorithms.
• Launch, coordinate, and monitor the execution of
control processing and analysis algorithms.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E94-0705 © SEMI 2000, 2005 1
SEMI E94-0705
SPECIFICATION FOR CONTROL JOB MANAGEMENT
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published February 2000;
previously published November 2004.
1 Purpose
1.1 This specification describes equipment provided services to the factory that supports a high level of factory
automation. These services provide capabilities for the host to coordinate processing and disposition of materials on
production equipment.
2 Scope
2.1 This specification may be applied to equipment that is compliant to SEMI E30 (GEM). However, it is also
intended that this standard will be useful for future generation equipment interfaces that supercede SEMI E30, such
as SEMI E53.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This standard presents a model of the ControlJob. The model delineates the services (messages) and behavior
of the ControlJob. The model is protocol independent. Thus, an ancillary standard must be selected in order to
provide a complete implementation.
3.2 This standard should not be applied to non-production equipment, such as, material transport systems or
facilities (environmental) controllers.
3.3 This specification applies to equipment for which the atomic unit of material is the same for all input and output
carriers on the equipment. It may not apply to equipment which would perform operations such as slicing or
assembly that would require or result in different input and output material objects. This specification may not
apply to equipment or equipment configurations where the equipment does not handle carriers, as in the case of a
stepper or scanner in a linked photolithography cell.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E53 — Event Reporting
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 control job — defines a unit of work on equipment for one or more carriers. The work is described by a set of
one or more process jobs to be applied to the material contained in the carriers.
5.1.2 de-queue — the act of removing an item from a queue. The de-queue implies nothing about the status of the
item after removal.
SEMI E94-0705 © SEMI 2000, 2005 2
5.1.3 equipment — the intelligent system that communicates with the host.
5.1.4 host — the intelligent system that communicates with the equipment.
5.1.5 life cycle — the processes and activities of something from its beginning (creation) to its ending.
5.1.6 multi-module equipment — equipment that has more than one distinct processing resource (e.g., chamber).
5.1.7 production equipment — equipment that measures or adds value to the product.
5.1.8 protocol independent — for software, this means that the message descriptions are independent of delivery
mechanisms.
5.1.9 set-up — a description of the current process capability of an equipment.
5.1.10 substrate — basic unit of material on which work is performed to create a product. Examples include
wafers, lead frames, CD’s, die, flat panel displays, circuit boards, and disks.
5.1.11 substrate port — the carrier location from which substrates are accessed by the equipment.
5.1.12 uni-carrier — term for an equipment mode of operation in which all material is returned to the source carrier
after processing.
5.1.13 user start — activities that are initiated on a system by another system or operator.
6 Conventions
6.1 Object Models
6.1.1 This standard uses object models to specify the control job interface.
6.1.2 Object Services Standard
6.1.2.1 This document conforms to the conventions established by SEMI E39.
6.1.3 Formal Name of an Object
6.1.3.1 The text capitalizes formal object name references, similar to the way capitalization is normally used when
discussing entities. When describing something in the general (like cities) lower case is used, but when a specific
entity is of interest (New York City), then first letters are capitalized.
6.2 State Model Methodology
6.2.1 This document uses the Harel state chart convention for describing dynamic operation of defined objects. The
outline of this convention is described in an attachment of SEMI E30. The official definition of this convention is
described in “State Charts: A Visual Formalism for Complex Systems” written by D. Harel in Science of Computer
Programming 8, 1987.
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6.2.2 The Harel convention does not have the concept of state models of “creation” and “extinction” for expressing
a temporary entity. The “job” described in this document is such an entity, and a copy of the same state model is
used for an independent job newly created. In this document, a circle with a black circle inside is used for
expressing extinction of an entity. A filled, black circle denotes the entry to the state model (the entity creation).
6.2.3 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
1) Actions taken upon exit of the previous state.
2) Actions taken upon entry of the new state.
3) Actions taken which are most closely associated with the transition.
6.2.3.1 No differentiation is made between these cases.
1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945, http://www.elsevier.nl/homepage/browse.htt