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SEMI E94-0705 © SEMI 2000, 2005 20 # Comment Dir Message CJS PJS 15 Jobs may complete before the carrier is picked up. H<-E Event (ControlJobCompleted=cjf01_01, status=OK) COMPLETE R1-2 ControlJob for a Single Wafer P…

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SEMI E94-0705 © SEMI 2000, 2005 19
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: The material contained in these Applications Notes is not an official part of SEMI E94 and is not
intended to modify or supersede the official standard. Rather, these notes are auxiliary information describing
possible methods for implementing the protocol described by the standard and are included as reference material.
The standard should be referred to in all cases. SEMI makes no warranties or representations as to the suitability of
the material set forth herein for any particular application. The determination of the suitability of the material is
solely the responsibility of the user.
Service messages are presented with a “C” language style of application interface. For illustrative purposes values
for variables may be included using the “=” in the argument list. If not used the optional arguments are not shown.
Service names (e.g., PRJob) are prefixed to function name. The scenarios assume processing is for wafers. The
services used in these scenarios are PRJob for Processing Management, ControlJob for Control Job Management,
and CMS for Carrier Management Services.
R1-1 ControlJob for a Batch Processing Tool
R1-1.1 Tool processes the contents of a single carrier as a batch. This example demonstrates the simplicity of using
control jobs for a simple situation. Wafer order is maintained, and material is returned to the source carrier.
# Comment Dir Message CJS PJS
1 Create the process job. H->E PRJobCreateEnh (PRJobID=prj01_04,
Mtrl = CS001, RecID=ILD3)
No state No state
2 H<-E PRJobCreateAck (PRJobID,
PRJobStatus)
In POOL
3 Request a control job.
Material out specification
maintains wafer order from
source carrier to destination
carrier.
H->E ControlJobCreate (CtrlJobID=cjf01_01,
ProcessingCtrlSpec= (prj01_04, null,null
), MtrlOutSpec=(CSA01,null,null),
MaterialIn= CS001, StartMethod=AUTO)
4 Request accepted. H<-E ControlJobCreateAck
(CtrlJobID=cjf01_01, JobStatus)
QUEUED
5 No CJ in selected state so the
newly created job
immediately transitions.
H<-E Event (CJSELECTED,
CtrlJobID=cjf01_01)
SELECTED
6 A carrier for the selected
control job arrives.
H<-E Event (CARRIERIDREAD, CID=CS001)
7 The equipment recognizes it
and starts execution of the
ControlJob.
H<-E Event (ControlJobStart, cjf01_01) EXECUTING
8 ControlJob starts the
ProcessJob; begins loading
wafers to the processing boat.
H<-E Event (PRJOBSETUP, prj01_01) ACTIVE/
SETUP
9 Material processing starts
after all material is in the
processing boat.
H<-E Event (PRJOBPROCESSING, prj01_04) ACTIVE/
PROCESSING
10 Equipment begins to return
material to the source carrier
(= destination carrier).
H<-E Event (PROCESSINGCOMPLETE,
PRJob=prj01_04)
ACTIVE/
PROCESSING
COMPLETE
11 Carrier is filled with wafers. H<-E Event (CarrierComplete=CS001)
12 Host wants to get it. H->E Rcommand (CarrierOut=CS001)
13 Equipment indicates carrier
can now be picked up.
H<-E Event (ReadytoUnload,
CarrierID=CS001, PortID)
14 H<-E Event (PRJOBCOMPLETE,
PRJob=prj01_01,)
No state
SEMI E94-0705 © SEMI 2000, 2005 20
# Comment Dir Message CJS PJS
15 Jobs may complete before the
carrier is picked up.
H<-E Event (ControlJobCompleted=cjf01_01,
status=OK)
COMPLETE
R1-2 ControlJob for a Single Wafer Processing Tool
R1-2.1 Will be added later.
R1-3 ControlJob for Single Wafer Processing with Recipe Variable Parameters
R1-3.1 Will be added later.
R1-4 Error Recovery of Batch Tool ControlJob, Carrier Slot Map Failure
R1-4.1 Will be added later.
R1-5 Carrier Swap During Processing
R1-5.1 Multiple carriers are loaded to a batch processing tool that has buffering, after carriers are emptied, they are
removed and new empty carriers are loaded. In this example, it requires four carriers for a batch.
CJS = Control Job State, PJS = Process Job State
# Comment Dir Message CJS PJS
1 Create the process job. H->E PRJobCreateEnh (PRJobID=prj01_01,
Mtrl = CSA01,CSA02, CSA03,
CSA04, RecID=ILD1)
No state No state
2 H<-E PRJobCreateAck (PRJobID,
PRJobStatus)
In POOL
3 Request a control job.
Material out specification
maintains wafer order from
source carrier to destination
carrier.
H->E ControlJobCreate (CtrlJobID=cjf01_01,
ProcessingCtrlSpec= (prj01_01,
null,null), ProcessOrderMgmt =
ARRIVAL,
MtrlOutSpec=(((CSA01,null),(CSB01,
null)), ((CSA02, null), (CSB02,null)),
((CSA03, null), (CSB03,null)),
((CSA04, null), (CSB04,null))),
MaterialIn= (CSA01,CSA02, CSA03,
CSA04), StartMethod=AUTO)
4 Request accepted. H<-E ControlJobCreateAck
(CtrlJobID=cjf01_01, JobStatus)
QUEUED
5 No CJ in selected state so the
newly created job
immediately transitions.
H<-E Event (CJSELECTED,
CtrlJobID=cjf01_01)
SELECTED
6 A carrier for the selected
control job arrives.
H<-E Event (CARRIERIDREAD,
CID=CSA01)
7 The equipment recognizes it
and starts execution of the
ControlJob.
H<-E Event (ControlJobStart, cjf01_01) EXECUTING
8 ControlJob starts the
ProcessJob; begins loading
wafers to the processing boat.
H<-E Event (PRJOBSETUP, prj01_01) ACTIVE/SETUP
9 H<-E Event (CarrierEmpty,CSA01)
10 The next carrier arrives. H<-E Event (CARRIERIDREAD, CSA02)
11 H->E Rcommand (CarrierOut=CSA01)
As carriers are emptied they
are removed.
Steps 9 through 11 are repeated 3 more
times
SEMI E94-0705 © SEMI 2000, 2005 21
# Comment Dir Message CJS PJS
12 Material processing starts
after all material is in the
processing boat.
H<-E Event (PRJOBPROCESSING,
prj01_01)
ACTIVE/
PROCESSING
13 Output carriers begin to
arrive.
H<-E Event (CARRIERIDREAD,
CID=CSB01)
Until all output carriers
arrive.
Step 13 is repeated 3 more times
14 Equipment begins to load
output carriers.
H<-E Event (PROCESSINGCOMPLETE,
PRJob=prj01_01)
ACTIVE/
PROCESSING
COMPLETE
15 First output carrier is filled
with wafers.
H<-E Event (CarrierComplete=CSB04)
16 Host wants to get it. H->E Rcommand (CarrierOut=CSB04)
17 Gets rest of carriers. Steps 15 and 16 are repeated 3 more
times
18 H<-E Event (PRJOBCOMPLETE,
PRJob=prj01_01,)
No state
19 H<-E Event
(ControlJobCompleted=cjf01_01,
status=OK)
COMPLETE
R1-6 Using Cleaning Wafers
R1-6.1 For this scenario we assume a single wafer processing tool, such as an RIE. The tool has three fixed load
ports; two for product material, one for cleaning material. A cleaning wafer is run before the 1
st
and 13
th
wafer of
each carrier of product wafers. Show the load and unload of the cleaning wafers and the running of the ControlJob
for processing material. Note that control jobs do not provide functionality for dispositioning collateral material
consumed during processing (the cleaning wafers). The equipment is responsible for providing mechanisms to
determine when this collateral material has been consumed (should be replaced).
Step # Comment Dir Message CJS PJS
1 Remove the previously spent
wafers.
H<-E Event (ReadytoUnload, PortID=Cleaning,
CarrierID=CC01)
No state No state
2 After host picks up the spent
wafers, the equipment is
ready to load.
H<-E Event (ReadytoLoad, PortID=Cleaning)
3 Delivered material is
identified.
H<-E Event (CarrierIDRead, CarrierID=CC02)
4 Host directs carrier to be
moved to the wafer access
position.
H->E CMSProceedwithCarrier (CarrierID=CC02)
5 Create a job to run a
cleaning wafer.
H->E PRJobCreate (PRJobID=prj01_01, Mtrl =
ACleanWafer, RecID=CleaningProcess)
6 H<-E PRJobCreateAck (PRJobID, PRJobStatus) In POOL
7 Create the jobs for the first
12 wafers in the carrier
(PW1-12).
H->E PRJobDuplicateCreate (PRJobSpecList =
(prj01_02, PW1), (prj01_03, PW2),
…(prj01_13, PW12), RecID = P64ME5,
Start=AUTO, MtrlType=WAFER)
8 H<-E PRJobCreateAck (PRJobIDList,
PRJobStatus)
In POOL
9 Another cleaning wafer H->E PRJobCreate (PRJobID=prj01_14, Mtrl =
ACleanWafer, RecID=CleaningProcess)
10 H<-E PRJobCreateAck (PRJobID, PRJobStatus) In POOL