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SEMI E94.1-1104 © SEMI 2001, 2004 3 6.2.4 SECS-II Data Items without Corresponding SEMI E94 Parameters 6.2.4.1 Table 4 contains the SEC S-II data items that do not corresp ond to SEMI E94’s service pa rameter. Table 4 A …

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SEMI E94.1-1101 © SEMI 2001, 2004 2
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
Create Object S14,F9/10 Create Object Request/Acknowledge (SEMI E39.1)
CJAbort S16,F27/28 Control Job Command Request/Acknowledge
CJCancel S16,F27/28 Control Job Command Request/Acknowledge
CJDeselect S16,F27/28 Control Job Command Request/Acknowledge
CJHOQ S16,F27/28 Control Job Command Request/Acknowledge
CJPause S16,F27/28 Control Job Command Request/Acknowledge
CJResume S16,F27/28 Control Job Command Request/Acknowledge
CJStart S16,F27/28 Control Job Command Request/Acknowledge
CJStop S16,F27/28 Control Job Command Request/Acknowledge
6.2.2 Event Message Mapping
6.2.2.1 Table 2 defines the relationships between SEMI E94 collection events and SECS-II messages.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All state model transitions If SEMI E30 style events:
S6,F11/12
If SEMI E53 style events:
S6,F11/12
S6,F13/14
If SEMI E30 style events:
Event Report Send/Acknowledge
If SEM E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
6.2.3 Parameter Mapping
6.2.3.1 Table 3 defines the relationships between SEMI E94 service parameters and SECS-II data definitions.
Table 3 Parameter to SECS-II Data Items Mapping
Parameter Name Range SECS-II Data Item
ACKcode TRUE, FALSE ACKA
Action SAVEJOBS, REMOVEJOBS CPVAL (U1)
0 = SAVEJOBS. This
command does not destroy the
Process Jobs
specified by this Control Job.
1 = REMOVEJOBS. This
command destroys all Process
Jobs specified by
this Control Job.
CtrlJobID 1–80 characters (Conforms to ObjID in SEMI E39.1,
Section 6.)
OBJID
ErrorCode Enumerated ERRCODE
ErrorInfo Error L,2
1. ErrorCode
2. ErrorText
ErrorText 1–80 characters ERRTEXT
Status Acknowledgement and error L,2
1. ACKcode
2. ErrorInfo
SEMI E94.1-1104 © SEMI 2001, 2004 3
6.2.4 SECS-II Data Items without Corresponding SEMI E94 Parameters
6.2.4.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E94’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used to identify control job commands. CTLJOBCMD
Used to satisfy SECS-II conventions for linking a multi block inquiry with
subsequent multi block message.
DATAID
6.2.5 Variable Data Item Mapping
6.2.5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E94 variable data items.
Table 5 Variable Data Item Mapping
Variable Name Class Format
CtrlJobID DVVAL <OBJID>
QueueAvailableSpace SV 5() (U1, U2, U4, U8)
QueuedCJobs SV L,n n = number of queued control jobs
1. <CtrlJobID
1
>
…
n. <CtrlJobID
n
>
SetUpName ECV 20 (A[1..80])
Zero length string is used by the equipment to indicate “unknown”.
7 SECS-II Attribute Definitions
7.1 ControlJob Object SECS-II Attributes Definitions
7.1.1 The following are the SECS-II structure definitions for the E94 ControlJob Object.
Table 6 ControlJob Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 20 (A) “ControlJob”
“ObjID” <OBJID> CtrlJobID (Conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.)
“CarrierInputSpec” L,n n = number of input carriers
1. <CARRIERID
1
>
…
n. <CARRIERID
n
>
“CurrentPRJob” L,n n = number of process jobs
1. <PRJOBID
1
>
…
n. <PRJOBID
n
>
“DataCollectionPlan” 20 (A) DataCollectionPlan
SEMI E94.1-1104 © SEMI 2001, 2004 4
Attribute Name Attribute Data Form: SECS-II Structure
“MtrlOutByStatus” L,n n = number of status dispositions
1. L,2
1. 51 (U1) MaterialStatus
1
2. L,2 DestinationMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. L,2 DestinationMap
n
1. <CARRIERID
n,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
If m = 0, the substrates may be placed by the equipment in any available slot.
“MtrlOutSpec” L,p p = number of mapping source/destination pairs
1. L,2
1. L,2 SourceMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
2. L,2 DestinationMap
1
1. <CARRIERID
1,2
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
p. L,2
1. L,2 SourceMap
p
1. <CARRIERID
p,1
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>
2. L,2 DestinationMap
p
1. <CARRIERID
p,2
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>