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SEMI E98-1102 © SEMI 2000, 2002 36 11.13 Operations Management — This section specifies the requirements related to operations, including p rocessing. 11.14 Recipe Execution — As a type of Equipment Module, Equipment pro…

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SEMI E98-1102 © SEMI 2000, 2002 35
11.3.1 Timestamp Data — Date/time information is
used by the factory for a variety of purposes, including
analysis of historical data. Should time change
significantly during processing, the assumed ordering
of events can be affected so that later events appear
earlier, large unexplained gaps can appear in a sequence
of events, or data can seem to appear from the past. For
these reasons, any change in current time shall not be
applied to material in the middle of a process.
11.3.2 Date/Time Values — Date and Time information
shall be expressed as a numeric value.
11.3.3 Local Time Change — Where local time
changes automatically, the equipment is responsible for
maintaining the correct difference between local time
and Greenwich Mean Time (GMT) in the Clock
attribute GMTDelta.
11.3.4 Optional Timestamp Format — The equipment
shall provide an option for the user to include the value
of GMTDelta as an additional field in timestamps. The
user may enable and disable use of GMTDelta by
setting and clearing the Boolean Clock attribute
UseDelta.
11.4 Equipment Control — Control is divided into
several areas: Fault Detection Control, Run to Run
Control, Material-Control, and Operational Control.
Control of each of these four areas shall be assigned to
exactly one user at any point in time. However, that
user may be the same for one or more of these areas.
11.4.1 Advanced Process Control (APC) — Two
categories of APC are described herein: run-to-run
control (between lots, carriers, or substrates), and fault-
detection control. Support for APC may be required at
the EquipmentModule level.
11.4.2 Run-to-Run Control (R2R) — The factory may
dedicate a separate session for Run-to-Run Control.
Run-to-run control consists of adjusting Variable
Parameter settings of Process Recipes within a process
job.
11.4.3 Fault Detection Control (FDC)
11.4.3.1 Fault detection is able to detect a probable
fault before it can be detected by SPC, equipment
failure, or product failure. The user may provide fault
detection through analysis of process data in
conjunction with data from external sensors.
11.4.3.2 A separate dedicated session may be used for
fault detection control because of its need for large
amounts of data. FDC may instruct the Equipment to
put itself into a downtime state as soon as it completes
work currently in process.
11.5 Event Management — Equipment shall provide
standard mechanisms for notifying the user of events of
interest to the user, together with any data the user has
associated with specific events.
11.6 Exception Management — The equipment shall
comply with SEMI E41 (EMS).
11.7 Job Management — This section is reserved for
requirements related to specifications for managing
jobs. Jobs are defined by SEMI E94 Control Job
Management and by SEMI E40 Process Management.
11.8 Material I/O Management — Material I/O
Management allows the user to request services related
to management of the carrier ports and internal buffers
required for managing the movement of product
through the factory (material logistics). Equipment
shall comply with the fundamental requirements of
SEMI E87 (CMS).
11.9 Material Management
11.9.1 Material Management is responsible for all
material present at the equipment from the time it is
loaded from the factory until it is unloaded. This
includes tracking of all material that is identifiable.
11.9.2 The location of all material that is mobile, such
as product, shall be known at all times. The factory
may inquire about what material is currently present
and where (at what MaterialLocation) that material is
placed.
11.9.3 Consumables that are not mobile; such as gold
wire on a wire-bonder, may be identified by lot number.
The equipment may be required to store current lot
numbers for non-mobile material when that information
is provided by the factory.
11.9.4 Equipment shall comply with the fundamental
requirements for SEMI E90 (STS).
11.10 Operational Control — The user with Operation
Control may issue operational commands related to
starting, stopping, process job management, and recipe
access, including upload, download, and recipe
selection.
11.11 Object Management
11.11.1 This section is reserved for requirements
concerning data and information.
11.11.2 Object Management is responsible for
providing all data and information required by the
factory through Object Services.
11.12 Performance Management — As a type of
AbstractEquipmentModule, the equipment shall con-
form to the Operational State Model defined in Section
10.5.5 and compliance to SEMI E58 (ARAMS).
SEMI E98-1102 © SEMI 2000, 2002 36
11.13 Operations Management — This section
specifies the requirements related to operations,
including processing.
11.14 Recipe Execution — As a type of
EquipmentModule, Equipment providing temporary
recipe storage and recipe execution capabilities shall
comply to the fundamental requirements for the
Execution Recipe and Recipe Executor as specified in
SEMI E42.
11.15 Recipe Management — Equipment providing
long-term storage of recipes shall comply with the
fundamental requirements for the Managed Recipe and
either the Recipe Namespace with its Recipe
Namespace Manager, or the Distributed Recipe
Namespace Segment, for all recipes stored, as specified
in SEMI E42.
12 OBEM Service Definitions
12.1 This section defines the content of service
messages specified in this document and provided by
OBEM objects. The services are described in previous
sections. This section details the parameters for each
message.
12.2 Table 17 lists the services defined in this section.
Services of Type “R” are asynchronous requests that
require a response. Services of Type N are notifications
and do not require a response.
12.3 OBEM compliant equipment is required to
understand all service requests. However, if the service
is not marked as required, then support for the service
itself (the operations) is optional for the equipment, and
a response of “request denied” may be returned.
12.4 Services are listed in alphabetical order.
Table 17 List of Services
Operation Description Type Reqd
Abort Directs an object to immediately stop all activity as soon as it is safe to do so. R Y
AddElement Add a type of AbstractEquipmentElement. R N
AddProcessCapability Add a process capability. R Y
ChangeService Set an AbstractEquipmentElement in service or out of service. R N
Cleanup Directs Equipment to return all substrates to their carriers. R N
GetDateTime Returns the current date and time. R Y
GetProgramDirectory Returns the list of identifiers of Sensor Programs stored by the specified
Sensor/ActuatorDevice.
R N
Pause Directs an object to temporarily stop its activity as soon as it is at a point where
it is safe to the process to do so.
R Y
RemoveProcessCapability Remove a process capability from the list. R Y
RemoveElement Remove an element added by the user. R Y
Resume Directs a paused object to resume its activity. R Y
SelectProgram Provides an EquipmentIODevice Program identifier to be selected and executed. R N
SetDateTime Provides current date and time for setting the equipment Clock. R Y
Shutdown Prepare for powerdown. R N
Start Directs an object to begin an activity that has been set up. R N
Startup Prepare for standby for processing. R N
Stop Directs an object to stop an activity in progress by completing work already
started and not beginning new work.
R Y
12.5 Service Parameter Definitions — Table 18 defines the parameters for OBEM services.
Table 18 Service Parameter Definitions
Parameter Definition Form
DateTime Date and time setting. To be resolved.
DeviceProgramID Identifier for EquipmentIODevice program. Integer
ErrorCode Contains the code for the specific error found. Enumerated
ErrorText Text in support of the error code. Text
SEMI E98-1102 © SEMI 2000, 2002 37
Parameter Definition Form
ObjSpec Object specifier of target object.
An empty string implies Equipment is the target.
Formatted text. See SEMI E39 for
restrictions.
ProcessCapability User-defined description Text
Property An attribute name and value. Structure of attribute name, attribute value
RequestAcknowledge Acknowledgement of request. Enumerated:
Request performed
Cannot perform now
Invalid request
Already in requested state
Will perform when able and report results
when complete
RequestStatus Result of request Structure consisting of
RequestAcknowledge and Status
Service New substate of SERVICE Enumerated: IN SERVICE, OUT OF
SERVICE
Status Reports any errors found. List of ErrorCode, ErrorText pairs
12.6 Abort — Table 19 defines the Abort service. The Abort request may be directed to the Equipment or to an
EquiipmentModule.
Table 19 Abort Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for EquipmentModule.
RequestStatus - M Result status
12.7 AddProcessCapability — Table 20 defines the service to add a ProcessCapability. This request may be
directed to the Equipment or to an EquipmentModule.
Table 20 AddProcessCapability Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M Object specifier for owner of capability
ProcessCapability M - User description of a process objective.
RequestStatus - M Result status
12.8 AddElement — Table 21 defines the service to add an AbstractEquipmentElement. This request may be
directed to the Equipment or to an EquipmentModule. Properties needed for the AbstractEquipmentElement must be
included in the list of properties.
Table 21 AddElement Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for new owner
(list of) Property M - Properties of new element
RequestStatus - M Result status