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SEMI E98.1-1102 © SEMI 2001, 2002 5 Table 6 A b stractEquipmentSubsy ste m Object Attribute Specification Attribute Name Range/Value SECS-II Format “ObjType” “AbstractEqpSubsystem” 20 “ObjID” Conforms to OBJID restricti …

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SEMI E98.1-1102 © SEMI 2001, 2002 4
Attribute Name Range/Value SECS-II Format
“InService “ Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
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“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” ”EqpElement” 20
“ResetDate” Conforms to DateTime attribute of Clock 20,30,34
“Supplier” 20
6.3 AbstractEquipmentModule
6.3.1 Table 6 specifies the elements of the AbstractEquipmentModule object.
Table 5 AbstractEquipmentModule Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“BehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
“Model” 20
“ModelRevision” 20
“Nickname” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” 0 or more 20
“ProcessType” 20
”ProcessCapabilityList” 0
“ProcessSetup” 20
“PreviousBehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
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“SoftwareVersions” 0
“Units” Conforms to SEMI E5, Section 9. 20
6.4 AbstractEquipmentSubsystem
6.4.1 Table 7 specifies the attributes of the AbstractEquipmentSubsystem.
SEMI E98.1-1102 © SEMI 2001, 2002 5
Table 6 AbstractEquipmentSubsystem Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “AbstractEqpSubsystem” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“MaterialSummary” Ordered list. See Table 8 for detail. 0
6.4.2 Table 8 specifies the elements of the MaterialSummary attribute.
Table 7 MaterialSummary Attribute Specification
Attribute Name Range/Value SECS-II Format
“MaterialCapacity” 0 or more 5()
“MaterialCount” 0 ≤ MaterialCount ≤ Material-Capacity 5()
“MaterialType” Conforms to SEMI E5, Section 9. 20
6.5 CarrierLocation Object
6.5.1 Note that the CarrierLocation inherits the attributes of the MaterialLocation.
6.5.2 Table 9 specifies the additional attributes of the CarrierLocation object. See Table 13.
Table 8 CarrierLocation Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “CarrierLoc” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
LocationState Enumerated:
0 = Unoccupied
1 = Occupied
2 = Not Aligned
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6.6 Clock
6.6.1 Table 10 specifies the attributes of the Clock object.
Table 9 Clock Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “Clock” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“DateTime” As specified by TimestampFormat. 20,30,34
“UseNet” FALSE = DISABLED
TRUE = ENABLED
11
“TimestampFormat” Enumerated: (see SEMI E54.1, Section 7.3.1.23)
0 = Text “yyyymmddhhmmsscc”
1 = Univeral Time Coordinated
2 = Standard Time and Date
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“GMTDelta” -32,768 to +32767 (minutes)
*actual value in use at locale
32
“UseDelta” Boolean:
TRUE = use GMDelta
FALSE = do not use GMDelta
11
SEMI E98.1-1102 © SEMI 2001, 2002 6
6.7 Equipment
6.7.1 Table 11 specifies the attributes of the Equipment object.
Table 10 Equipment Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “Equipment” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“AssignedOperators” List. 0
“Nickname” Any. 20
6.8 EquipmentSubsystem
6.8.1 Table 12 specifies the attributes of the AbstractEquipmentSubsystem object.
Table 11 EquipmentSubsystem Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “EqpSubsystem” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
6.9 Material Location
6.9.1 Table 13 specifies the attributes of the AbstractEquipmentSubsystem object.
Table 12 MaterialLocation Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“ObjType” “MatlLoc” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
LocationState Enumerated:
0 = Unoccupied
1 = Occupied
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MaterialType Conforms to SEMI E5, Section 9. 20
MaterialID Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
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