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SEMI E102-0600 © SEMI 2000 37 Factory Operations Durable Management MTSC AMHS Equi pment Controllers 67: JobStateChangedE vent(..previousState JobExec uting, newState JobCompleted) 65: removeFinishedJob(TrJob1) 66: JobSt…

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SEMI E102-0600 © SEMI 2000 36
33: Transfer Command Complete (IBSEM)
34: setMaterialTrackingLocation(MaterialTrackingLocation stk8)
32: DurableLocationChangedEvent
35: DurableLocationChangedEvent
36: Transfer Command to stk8 (carrier aaa, src stk8/Bay_In, dest shelf) (Stocker SEM)
37: Transfer Command Updates (Stocker SEM)
38: Transfer Command Complete (Stocker SEM)
39: Transfer Command to stk8 (carrier bbb, src stk8/Bay_In, dest shelf) (Stocker SEM)
40: Transfer Command Updates (Stocker SEM)
41: Transfer Command Complete (Stocker SEM)
42: Transfer Command to stk8 (carrier aaa, src shelf, dest stk8/agt-port) (Stocker SEM)
43: Transfer Command Updates (Stocker SEM)
44: Transfer Command Complete (Stocker SEM)
45: Transfer Command to stk8 (carrier bbb, src shelf, dest stk8/agt-port) (Stocker SEM)
46: Transfer Command Updates (Stocker SEM)
47: Transfer Command Complete (Stocker SEM)
48: Transfer Command to agt2(carrier aaa, src stk8/agt-port, dest eq3/port1, carrier bbb, src stk8/agt-port, dest eq3/port2) (IBSEM)
49: Transfer Command Updates (IBSEM)
50: setMaterialTrackingLocation(MaterialTrackingLocation agt2)
51: DurableLocationChangedEvent
52: setMaterialTrackingLocation(aMaterialTrackingLocation agt2)
53: DurableLocationChangedEvent
54: Transfer Command Complete (IBSEM)
55: setMaterialTrackingLocation(MaterialTrackingLocation eq3)
56: DurableLocationChangedEvent
57: setMaterialTrackingLocation(MaterialTrackingLocation eq3)
58: DurableLocationChangedEvent
59: makeProcessing()
60: MaterialContainerStateChangedEvent
61: makeProcessing()
62: MaterialContainerStateChangedEvent
63: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
64: informJobStateChange(aJob TrJob1, previousState JobExecuting, newState JobCompleted)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-7
Scenario Case 3 (continued)
SEMI E102-0600 © SEMI 200037
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
67: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
65: removeFinishedJob(TrJob1)
66: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
69: removeFinishedJob(TrJob2)
70: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
68: informJobStateChange(aJob TrJob2, previousState JobExecuting, newState JobCompleted)
Figure R1-8
Scenario Case 3 (continued)
SEMI E102-0600 © SEMI 2000 38
R1-2.4 Scenario 4 — Equipment Monitoring and Logical Partition Overflow Control
MTSC determines- Stk.4 is down, use Stk. 5(priority#2)(internal)
MTSC determines Stk.7 is full, use
Stk. 8(1st alternate)(internal)
10: Transfer Command to Agt1(carrier 3232,src. eq.1/Port 1, dest. Stk. 2/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt1 (IBSEM)
14: Transfer Command Complete (IBSEM)
19: Transfer Command to Stk. 2 (carrier 3232, src. Stk. 2/Bay_In, dest. Stk. 2/Bay_out)(StockerSEM)
20: Transfer Command Updates from Stk. 2 (Stocker SEM)
21: Transfer Command Complete (StockerSEM)
22: Transfer Command to Ohs1(carrier 3232, src. Stk 2/Bay_Out, dest. Stk. 5/Bay_In)(IBSEM)
23: Transfer Command Updates from Ohs1 (IBSEM)
25: Transfer Command Complete (IBSEM)
17: Stocker 4 status update DOWN (StockerSEM)
12: setMaterialTrackingLocation(MaterialTrackingLocation Agt1)
15: setMaterialTrackingLocation(MaterialTrackingLocation Stk.2)
24: setMaterialTrackingLocation(MaterialTrackingLocationOhs1)
27: setMaterialTrackingLocation(MaterialTrackingLocationStk.5)
2: requestJob (JobType Transport, Priority 1, Deadline time1, container 3232, SourceMachine eq1, SourcePort 1, DestinationMachine Stk7)
6: informJobStateChange(JobType TrJob1, previousState JobQueued, newState JobExecuting)
18: MachineResourceE10StateChangedEvent()
3: Return Job Handle TrJob1
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
26: DurableLocationChangedEvent
28: DurableLocationChangedEvent
7: makeInTransit()
8: MaterialContainerStateChangedEvent
MTSC reserves and manages AMHS equipment capacity(internal)
MTSC determines AMHS route(internal)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
1: setUnit(unitvalue)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-9
Scenario Case 4