semi合集-English.pdf - 第2847页

SEMI E102-0600 © SEMI 2000 55 R1-2.13 Scenar io 13 — Interactions at a n Individual Interface Level ( including capacity reservation) 2: reque stJob(Job Type Tra nsport , Priority 1, De adline time 1, container aaa, Dest…

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SEMI E102-0600 © SEMI 2000 54
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
29: Transfer Command Complete (StockerSEM)
30: Transfer Command to Oht1 (carrier bbb, src. Stk. 9/Bay_Out, dest. Eq5 Port 1)(IBSEM)
31: Transfer Command Updates from Oht1 (IBSEM)
34: Transfer Command Complete (IBSEM)
32: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
35: setMaterialTrackingLocation(MaterialTrackingLocation Eq5)
40: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
33: DurableLocationChangedEvent
36: DurableLocationChangedEvent
38: MaterialLocationStateChangedEvent
37: makeProcessing()
39: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
41: removeFinishedJob()
42: JobStateChangedEvent(..previousState JobExecuting, newState JobUndefined)
Figure R1-25
Scenario Case 12 (continued)
SEMI E102-0600 © SEMI 200055
R1-2.13 Scenario 13 — Interactions at an Individual Interface Level (including capacity reservation)
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine stk9)
3: returns Job Handle TrJob1
7: makeInTransit()
22: setMaterialTrackingLocation(materialTrackingLocation Ohs2)
23: DurableLocationChangedEvent
27: setMaterialTrackingLocation(materialTrackingLocation stk9MTL1)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
12: Transfer (aaa, Bay_Out) (Internal Interface)
13: Transfer Command to Stk4 (src Stk4, dest st4/Bay_Out) (Stocker SEM)
14: Transfer Command Updates (Stocker SEM)
15: Transfer Command Complete (Stocker SEM)
16: Transfer complete (Internal Interface)
18: Transfer (aaa, stk4/Bay_Out, stk9/Bay_In) (Internal Interface)
19: Transfer Command to Ohs2 (src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
20: Transfer Command Update (IBSEM)
21: Transfer Update (Internal Interface)
25: Transfer Command Complete (IBSEM)
26: Transfer Complete (Internal Interface)
29: Transfer (carrier aaa, src Bay_In, dest shelf) (Internal Interface)
30: Transfer Command to stk9 (src Bay/In, dest shelf) (Stocker SEM)
31: Transfer Command Updates (Stocker SEM)
8: MaterialContainerStateChangedEvent
MTSC determines AMHS Route (Internal Service)
9: getUnit()
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, NewState JobExecuting)
17: removeMaterial(MaterialContainer aaa)
24: addMaterialToTrack(MaterialContainer aaa)
1: setUnit( unitvalue)
10: getMaterialTrackingLocation(unitvalue)
11: reserveCapacity(MaterialContainer aaa)
28: DurableLocationChangedEvent
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-26
Scenario Case 13
SEMI E102-0600 © SEMI 2000 56
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
36: makeInTransit()
37: MaterialContainerStateChangedEvent
39: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
34: removeMaterial(MaterialContainer aaa)
35: addMaterialToTrack(MaterialContainer aaa)
38: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
40: removeFinishedJob(Job TrJob1)
41: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
32: Transfer Command Complete (Stocker SEM)
33: Transfer Command Complete (Internal Interface)
Figure R1-27
Scenario Case 13 (continued)