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SEMI E105-0701 © SEMI 2000, 2001 13 FO checks the logistic condition. (1) Start time of Lot-1 on EQ2 (10:00). (2) EQ2 is ready to load. (3) Lot-1 has arrived at Operation 20. If all conditions are OK, FO issues the Macro…

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SEMI E105-0701 © SEMI 2000, 2001 12
RELATED INFORMATION 2
SCENARIOS FOR SCHEDULING AND DISPATCHING.
NOTE: This related information is not an official part of SEMI E105. This related information was approved for publication by
full letter ballot procedures on August 28, 2000.
These scenarios show possible implementations of the SEMI Scheduling Component. The information shown here is
intended to be a guide rather than describe prescriptive implementation rules. Some of the message sequences and
implied functionality included in these scenarios will vary across different implementations.
This section focuses primarily on the interface between the Scheduling Component and factory operations
component. The messaging between the lower level components is for informational purposes, and may not actually
reflect what is developed in the future when standards for those components have been completed.
R2-1 Scenario 1 — Simulator Based Scheduler/Dispatcher, Stocker is Not Managed by Scheduling Component
R2-1.1 Lot 1 is scheduled for equipment 2 at 10:00. Lot is held in stocker until ready to start on equipment 2.
Factory operations makes the carrier delivery decisions.
STK1 STK2
Operation 10 -----------> Operation 20
EQ1 EQ2
Lot-1 processing on EQ1 is finished at 09:30
<Scheduling Result>
10:00 11:00 12:00 13:00
14:00
EQ2 <-------------> <---------------------> <----------->
S/D provides the next EQ
information for Lot-1.
S/D sends dispatch list.
Lot-1 / EQ2 / Start at
10:00 / Receipe-A
FO checks the condition to issue
transport request to MTSC
(1) Next Lot for EQ2 (Lot-1) has
arrived at Operation 20
(Assumption)
(2) It is 9:30 (Before 09:45)
(3) Next EQ2 is ready to load.
FO decides to transfer Lot-1 to
STK-2 and issues the Macro
Command.
(1) Source : Port-1 of EQ1
(2) Destination : STK2
At 9:30
1:
4: ActivityForecast(Lot 1, Equipment 2, Start 10:00)
3: forecastForMaterialGroupByTime(Lot 1)
2: Ready to Unload (Lot-1)
FO checks the forecast list and judges
(1) Keep this Lot-1 on EQ1 Port
or
(2) Return Lot-1 to STK2
5: Estimated transport time inquiry from EQ1 to EQ2
6: Estimated Time (15min)
S/D - Scheduling
Component
FO - Factory Operations
Component
MTSC - Material
Transport & Storage
Component
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-1
Scenario Case 1
SEMI E105-0701 © SEMI 2000, 200113
FO checks the logistic condition.
(1) Start time of Lot-1 on EQ2 (10:00).
(2) EQ2 is ready to load.
(3) Lot-1 has arrived at Operation 20.
If all conditions are OK, FO issues the Macro Command
(1) Source : STK-2
(2) Destination : Port-1 of EQ2
(3) Carrier-1
At 09:55
13: P1 Start
14: P1 Complete
7: Macro Command (Carrier-1)
8: Complete
11: Macro Command (Carrier-1)
12: Complete
9: Estimated transport time inquiry from STK2 to EQ2
10: Estimated Time (5min)
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-2
Scenario Case 1 Continued
SEMI E105-0701 © SEMI 2000, 2001 14
R2-2 Scenario 2 — Simulator Based Scheduler/Dispatcher, Stocker is Not Managed by Scheduling Component
R2-2.1 Lot 1 is scheduled for equipment 2. Lot is transported directly from Eqp1 to Eqp 2. Factory Operations
makes the carrier delivery decisions.
S/D provides the next Lot
information for EQ2.
S/D sends dispatch list.
Lot-1 / EQ2 / Start at 10:00
/ Receipe-A
STK1 STK2
Operation 10 -----------> Operation 20
EQ1 EQ2
Lot-1 processing in EQ1 is finished at 09:40.
<Scheduling Result>
10:00 11:00 12:00 13:00 14:00
EQ2 <-------------> <---------------------> <----------->
Lot-1 Lot-2 Lot-3
FO does not send the Macro Command
to MTSC. Because
(1) Lot-1 has not arrived at Operation 20
1:
4: ActivityForecast(Lot 1, Equipment 2, Start at 10:00)
5: Ready to Unload (Lot-1)
3: forecastForMaterialGroupByTime(Lot 1)
At 9:30
2: Ready to Load (EQ2)
At 09:40
6: Inquiry Estimated Transport Time
7: Estimated Transport Time (15 min)
S/D - Scheduling
Component
FO - Factory Operations
Component
MTSC - Material Transport
& Storage Component
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
MTSC keeps the historical data
of transportation time between
each source and destination of
Micro Transfer Command. The
estimated transport time is
calculated using the historical
data.
Figure R2-3
Scenario Case 2