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SEMI E107-1102 © SEMI 2001, 2002 6 Table 7 Die Coordinat es Coordinate Information Meaning Coordinate Information Meaning TopLeftXY 0 x y TopRightX Y x 0 y BottomLeftXY y 0 x BottomRightXY y x 0 TopLeftYX 0 y x TopRightY…

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SEMI E107-1102 © SEMI 2001, 2002 5
8.1.6 Map Data Format of YMS Link — This section is reserved for data format of above items.
0 1 2 3 4 5
11
10
9
8
7
6
5
4
3
2
1
0
Die Address X
(The case of BottomLeft)
(3,10)
(4,10)
(2,10)
(4,11)
(3,11)
(4,1)
(3,1)
(2,2)
(5,10)
(0,0)
Wafer Center Position
Reference Die
Reference Die Center
Offset in µ m of the center of a
reference die from the center of
substrate,
RefDiePosX, RefDiePosY
Die with address X,Y on Wafer
DieSizeY
DieSizeX
The case when WaferOrientation is 180
Die Address Y
Wafer Size
Figure 1
Wafer Coordinates
(The case of BottomLeftXY)
Fail Bit Data Location X
(µ m)
Fail Bit Data Location Y
(µ m)
0
Die Origin Position
line-fail
b
it-fail
block-fail
(XCenter,YCenter)
YSize
XSize
die
(XMin,YMin)
(XMax,YMin)
(XMin,YMax) (XMax,YMax)
Figure 2
Die Coordinates
SEMI E107-1102 © SEMI 2001, 2002 6
Table 7 Die Coordinates
Coordinate Information Meaning Coordinate Information Meaning
TopLeftXY
0 x
y
TopRightXY
x 0
y
BottomLeftXY
y
0 x
BottomRightXY
y
x 0
TopLeftYX
0 y
x
TopRightYX
y 0
x
BottomLeftYX
x
0 y
BottomRightYX
x
y 0
9 Map Data Format for YMS Link Data
9.1 Because this standard defines extensional data for YMS Link Data map for generic test data map standardized
by SEMI G81 and G85, data format of each item for YMS Link Data is defined independently as extra definition
here.
9.2 It is very appropriate for this document to define such format with XML Schema, for SEMI G85 defines the
generic test data map in XML. List 1 below defines YMS Link Data map format.
List 1. YMS Link Data Map Format
<xsd:schema xmlns:xsd=" http://www.w3.org/2001/XMLSchema"
xmlns:mdf=" http://www.semi.org/ATE" targetNamespace=" http://www.semi.org/YMSLDF" >
<xsd:import namespace=" http://www.semi.org/ATE" />
<! -- Commonized Part may be imported from schemaLocation " somehere/mdfSchema.xsd" -->
<xsd:complexType name=" ymsldfMap" >
<xsd:extension base=" Map" >
<xsd:all>
<xsd:element name=" Comment" type=" string256Type" use=" optional" />
<xsd:element name=" TestProgramName" type=" string256Type" use=" optional" />
<xsd:element name=" TestEquipmentId" type=" string256Type" use=" optional" />
<xsd:element name=" DieCoordinate" type=" dieCoordinateType" use=" optional" />
<xsd:element name=" ErrorClassList" type=" errorClassListType" use=" optional" />
<xsd:element name=" FailBitDataTemplate" type=" failBitDataTemplateType" use=" optional" />
<xsd:element name=" FailBitData" type=" failBitDataType" use=" optional" />
<xsd:element name=" AnalogDataTemplate" type=" analogDataTemplateType" use=" optional" />
<xsd:element name=" Invalid" type=" string14Type" use=" optional" />
<xsd:element name=" AnalogData" type=" failBitDataType" use=" optional" />
<xsd:element name=" ErrorTotal" type=" unsignedInt10Type" use=" optional" />
<xsd:element name=" TestDie" type=" unsignedInt10" use=" optional" />
</xsd:all>
</xsd:extension>
</xsd:complexType>
<! -- EnumSchemas -->
<xsd:simpleType name=" dieCoordinateType" >
<xsd:restriction base=" xsd:string" >
SEMI E107-1102 © SEMI 2001, 2002 7
<xsd:enumeration value=" TopLeftXY" />
<xsd:enumeration value=" BottomLeftXY" />
<xsd:enumeration value=" TopLeftYX" />
<xsd:enumeration value=" BottomLeftYX" />
<xsd:enumeration value=" TopRightXY" />
<xsd:enumeration value=" BottomRightXY" />
<xsd:enumeration value=" TopRightYX" />
<xsd:enumeration value=" BottomRightYX" />
</xsd:restriction>
</xsd:simpleType>
<! -- Complicated Lists -->
<xsd:complexType name=" errorClassListType" >
<xsd:element name=" ErrorClass" type=" errorClassType" minOccurs=" 1" maxOccurs=" 255" />
</xsd:complexType>
<xsd:complexType name=" errorClassType" >
<xsd:sequence>
<xsd:element name=" ErrorClassNumber" type=" charIntegerType" />
<xsd:element name=" ErrorQuality" type=" string16Type" use=" optional" />
<xsd:element name=" ErrorDescription" type=" string256Type" use=" optional" />
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name=" failBitDataType" >
<xsd:sequence>
<xsd:element name=" failBitDataUnit" type=" failBitDataUnitType" minOccurs=" 1" maxOccurs=" unbounded" />
</xsd:sequence>
</xsd:complexType>
<xsd:simpleType name=" failBitDataUnitType" >
<xsd:list itemType=" failBitDataParticleType" />
</xsd:simpleType>
<xsd:simpleType name=" failBitDataParticleType" >
<xsd:union memberTypes=" Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize
Area DefectCate XMinPhysic XMaxPhysic YMinPhysic YMaxPhysic IoNumber XMinLogic XMaxLogic
YMinLogic YMaxLogic" />
</xsd:simpleType>
<xsd:simpleType name=" Seq" type=" unsignedInt10Type" />
<xsd:simpleType name=" XAddress" type=" int5Type" />
<xsd:simpleType name=" YAddress" type=" int5Type" />
<xsd:simpleType name=" XMin" type=" float14Type" />
<xsd:simpleType name=" XMax" type=" float14Type" />
<xsd:simpleType name=" YMin" type=" float14Type" />
<xsd:simpleType name=" YMax" type=" float14Type" />
<xsd:simpleType name=" XCenter" type=" float14Type" />
<xsd:simpleType name=" YCenter" type=" float14Type" />
<xsd:simpleType name=" XSize" type=" float14Type" />
<xsd:simpleType name=" YSize" type=" float14Type" />
<xsd:simpleType name=" Area" type=" float14Type" />
<xsd:simpleType name=" DefectCate" type=" string16Type" />