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SEMI E109-0305 © SEMI 2001, 2005 1 SEMI E109-0305 SPECIFICATION FOR RETICLE A ND POD MANAGEMENT (RPMS) This specification was technically approved by the Globa l Information & Control Committee and is the direct resp…
SEMI E107-1102 © SEMI 2001, 2002 15
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SEMI E109-0305 © SEMI 2001, 2005 1
SEMI E109-0305
SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 10, 2004. Initially available at www.semi.org
February 2005; to be published March 2005. Originally published July 2001; previously published
November 2004.
1 Purpose
1.1 This document provides standardized behavior for lithography, reticle inspection, and bare reticle stocker
equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle
stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod
transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within
the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of
reticles, and other relevant information such as tracking reticle usage.
2 Scope
2.1 This is a standard that covers host and equipment communication for equipment that handles reticles. This only
includes equipment that handles reticles both in and outside of a reticle pod.
2.2 The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and
manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification
and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this
document provides state models and scenarios that define the host interaction with the equipment for the following:
Reticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle
inspection equipment reticle load ports.
Reticle transfers to/from lithography production equipment internal reticle library space.
Equipment and reticle load port access mode switching.
Reticle Pod to load port association.
Reticle Pod ID verification and Reticle Pod slot map verification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This standard applies to semiconductor equipment that handles reticles and reticle carriers. This standard is
intended to be used for lithography production, bare reticle storage, and reticle inspection equipment. It may or may
not be applied to other types of equipment.
4 Referenced Standards
4.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E53 — Event Reporting
SEMI E109-0305 © SEMI 2001, 2005 2
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O interface
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specifcation of Concepts, Behavior, and Services
SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — Automated Guided Transport
5.1.2 AGV— Automated Guided Vehicle
5.1.3 AMHS — Automated Material Handling System
5.1.4 ARHS — Automated Reticle Handling System
5.1.5 GEM — Generic Equipment Model
5.1.6 IRL — Internal Reticle Library
5.1.7 OHT — Overhead Hoist Transport
5.1.8 PGV — Person Guided Vehicle
5.1.9 PIO — Parallel Input/Output Interface
5.1.10 RGT — Rail Guided Transport
5.1.11 RGV — Rail Guided Vehicle
5.1.12 RSP – Reticle SMIF Pod
5.2 Definitions
5.2.1 Automated Material Handling System — an automated system to store and transport materials within the
factory.
5.2.2 Automated Reticle Handling System — a specific type of Automated Material Handling System to store and
transport reticles and reticle pods within the factory.
5.2.3 automation — the degree to which activities of machines or production systems are self-acting. In this
standard automation provides methods that will reduce the amount of operator intervention required.
5.2.4 buffer — a set of one or more locations for holding reticles at/inside the production equipment.
5.2.5 collection event — a collection event is an event (or grouping of related events) on the equipment that is
considered to be significant to the host.
5.2.6 content map — ordered list of reticle identifiers corresponding to slot 1,2,3…n. (Note that this is redundant
with the definition in Table 6).
5.2.7
host — the factory computer system or an intermediate system that represents the factory and the user to the
equipment.
5.2.8 Internal Pod Buffer — storage area for reticle pod that is internal to the equipment.
5.2.9 internal reticle library — a set of locations within the equipment to store reticles. These locations exclude
load ports.
5.2.10 kitting — the act of placing a group of 1 or more reticles in a reticle pod for removal from a bare reticle
stocker. This is accomplished via a ReticleTransferJob that specifies one or more reticles for removal from the
stocker, or by one or more MoveReticle services that specify a destination that is a Pod Location.
5.2.11 load — the operation of placing a pod on a load port.
5.2.12 load port — the interface location on the equipment where pods are loaded and unloaded.