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SEMI E109-0305 © SEMI 2001, 2005 9 9.5.4 Reticle Pod L oad Port Tr ansfer State Tr ansition Table Table 5 Reticle Pod Load Port Tr ansfer Stat e Transition Definition # Previous State Trigger New State Actions Comments 1…

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SEMI E109-0305 © SEMI 2001, 2005 8
9.5 Reticle Pod Load Port Transfer State Model
9.5.1 The purpose of the Reticle Pod Load Port Transfer State Model is to define the host view of a reticle pod
transfer, which includes the host interactions with the equipment necessary to transfer reticle pods to and from
equipment reticle pod load ports. Each reticle pod load port on the equipment shall maintain an independent
instance of this state model.
9.5.2 Reticle Pod Load Port Transfer State Model Diagram
9.5.2.1 Figure 1 is the diagram for the Reticle Pod Load Port Transfer State Model.
9.5.3 Reticle Pod Load Port Transfer State Definitions
9.5.3.1 RETICLE POD LOAD PORT TRANSFER — The super state for the IN SERVICE and OUT OF SERVICE
states.
9.5.3.2 OUT OF SERVICE — Transfer to/from this reticle pod load port is disabled. A transition to IN SERVICE
is required to continue using this reticle pod load port for transfers.
9.5.3.3 IN SERVICE — Transfer to/from this reticle pod load port is enabled. A transition to OUT OF SERVICE
disables the reticle pod load port for transfer use.
9.5.3.4 TRANSFER READY — A sub-state of IN SERVICE. The reticle pod
load port is available for pod transfer.
The transfer can either be manual or automated, and can be a load or an unload. This state contains two sub-states,
which are used depending on whether or not a reticle
pod is present on the load port (READY TO LOAD and
READY TO UNLOAD).
9.5.3.5 READY TO LOAD — A sub-state of TRANSFER READY. When transitioning to the TRANSFER
READY state, if a reticle pod is not present on the specified reticle pod load port, this is the active sub-state. In this
state, the reticle pod load port is available to be loaded with an external reticle pod.
9.5.3.6 READY TO UNLOAD — A sub-state of TRANSFER READY. When transitioning to the TRANSFER
READY state, if a reticle pod is present on the specified reticle pod load port, this is the active sub-state. In this
state, the reticle pod load port is available for unloading of a reticle pod from the reticle pod load port to material
handling equipment. When the reticle pod load port is being used by the equipment, the state shall transition to
TRANSFER BLOCKED.
9.5.3.7 TRANSFER BLOCKED — The reticle pod transfer state is neither READY TO LOAD nor READY TO
UNLOAD. Because of reticle pod load port related activity being performed, transfer is not available to/from this
reticle pod load port at this time.
RETICLE POD LOAD PORT TRANSFER
OUT OF SERVICE
IN SERVICE
TRANSFER BLOCKED
TRANSFER READY
READY TO
LOAD
READY TO
UNLOAD
2 3
6
8 97
10
4 C
5 C
1 H
Figure 1
Reticle Pod Load Port Transfer State Model Diagram
SEMI E109-0305 © SEMI 2001, 2005 9
9.5.4 Reticle Pod Load Port Transfer State Transition Table
Table 5 Reticle Pod Load Port Transfer State Transition Definition
# Previous State Trigger New State Actions Comments
1 (no state) System reset. OUT OF
SERVICE
or
IN SERVICE
(History)
This transition is based on what the
current transfer status was prior to system
reset.
Data required to be available for this
event report:
PortID
2 OUT OF
SERVICE
The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of IN SERVICE.
IN SERVICE Reticle Pod Load port is now usable for
transfer.
Data required to be available for this
event report:
PortID
3 IN SERVICE The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of OUT OF SERVICE.
OUT OF
SERVICE
Reticle Pod Load port is now rendered
unusable for transfer. Attempted usage
of the reticle pod load port for reticle pod
transfer after the state transition results in
an alarm.
Data required to be available for this
event report:
PortID
4 IN SERVICE Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
TRANSFER
READY
or
TRANSFER
BLOCKED
This is the default entry into IN
SERVICE. The state is TRANSFER
BLOCKED if the reticle pod, or reticle
pod load port, is not available for pod
transfer. Otherwise, the state is
TRANSFER READY.
Data required to be available for this
event report:
PortID
5 TRANSFER
READY
Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
Failed Transfer: If a transfer fails,
this transition is activated by
transition #10.
READY TO
LOAD
or
READY TO
UNLOAD
When entering the TRANSFER READY
state, if a reticle pod is present, the sub-
state is READY TO UNLOAD, else the
sub-state is READY TO LOAD.
If the state is READY TO LOAD, data
required to be available for this event
report:
PortID
If the state is READY TO UNLOAD,
data required to be available for this
event report:
PortID
PodID
SEMI E109-0305 © SEMI 2001, 2005 10
# Previous State Trigger New State Actions Comments
6 READY TO
LOAD
Manual: “The equipment
recognizes the logical indication of
the start of a manual load transfer.
This trigger is configurable by the
user, exam
p
les are included in table
8.”
Automated: The PIO load transfer
is beginning and the PIO ready
signal is activated.
TRANSFER
BLOCKED
Data required to be available for this
event report:
PortID
7 READY TO
UNLOAD
Manual: The equipment recognizes
a logical indication of the start of
an unload transfer.
Automated: The PIO unload
transfer is beginning and the PIO
ready signal is activated.
TRANSFER
BLOCKED
Data required to be available for this
event report:
PortID
8 TRANSFER
BLOCKED
Manual: The reticle pod unload
transfer has completed, and the
reticle load port is now empty and
ready for load transfer.
Automated: The PIO unload
transfer ends with a PIO complete
signal.
READY TO
LOAD
Data required to be available for this
event report:
PortID
9 TRANSFER
BLOCKED
Manual: Activities using reticles
contained within the pod have
completed the reticle pod is ready
to be removed.
Automated: Handling for reticles
destined for the reticle pod has
completed, or a CancelPod/
CancelPodAtPort service has been
issued, and the reticle pod is ready
to be removed. This is indicated
by a PIO unload request signal.
READY TO
UNLOAD
The reticle pod on the reticle pod load
p
ort can now be unloaded from the reticle
load port to an external entity.
Data required to be available for this
event report:
PortID
PodID
10 TRANSFER
BLOCKED
The transfer was unsuccessful, and
the reticle pod was not loaded or
unloaded.
TRANSFER
READY
The sub-state of TRANSFER READY,
which is decided by transition #5.
Data required to be available for this
event report:
PortID
10 Reticle Pod Object
10.1 Information about a reticle pod is encapsulated as an object. This allows the host to exchange information
with the equipment about one or more specific reticle pods using services defined in SEMI E39, Object Services
Standard. A reticle pod has properties (attributes) that are defined in Table 6, Pod Attribute Definition.
10.2 Object Instantiation
10.2.1 The reticle pod object is a software representation of the reticle pod in the equipment. Under normal
circumstances this object is instantiated by the equipment when the host uses the Bind, ReticleTransferJob, or
PodNotification service or when the equipment successfully reads the PodID from the reticle pod. A reticle pod
object is instantiated by PodID read only if there are no currently existing objects of the same object type with the
PodID just read. A reticle pod object can also be instantiated by either the ProceedWithPod or CancelPod Services
on an UNASSOCIATED port. (This implies a failed PodID read event.) The ContentMap attribute will be an empty
list (a list of zero) when the instantiation is done by PodID read. The SlotMap attribute should be a list consisting of
all slots enumerated as “UNDEFINED” when the reticle pod object is instantiated by PodID read.