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SEMI E109-0305 © SEMI 2001, 2005 41 17.3 Reticle Location State Definitions 17.3.1 RETI CLE LOCAT ION — th e superstate of UNOCCUPIED and OCCUPIED. 17.3.2 UNOCCUPIED — the state in which the reticle location does not hol…

SEMI E109-0305 © SEMI 2001, 2005 40

16 Reticle Pod Release Control

16.1 For equipment, where Pod Read/Write technology is used and the Host initiates writing, the reticle pod or

reticle cassette must remain at the write position where the tag may be accurately written on until the Host has

completed its entire read and write operations. For this purpose, a variable that affects the equipment releasing a

pod is defined.

16.2 Pod Hold Trigger — Equipment shall allow the user to select a trigger to release the carrier pod when

reading/writing is complete. Release does not mean the equipment must move the pod from the location it currently

occupies, only that it is permissible to do so.

16.2.1 Pod Hold Trigger set to Host Release — If the Pod Hold trigger is set to Host Release, equipment shall hold

the pod at the write position until the PodRelease service is received.

16.2.2 PodHold Trigger set to Equipment Release — If the Pod Hold trigger is set to Equipment Release, the

equipment shall release the reticle pod based on the when the equipment has finished removing all reticles from the

pod, finished placing all reticles in the pod, and in the case where the equipment initiates writing until the equipment

has finished writing.

16.3 Fixed Buffer Equipment shall allow the user to select a trigger to unclamp the reticle pod based on AMHS

arrival at the equipment. If the access mode is MANUAL, the unclamp control trigger has no effect.

16.3.1 UnclampControl trigger set to PODCOMPLETE Triggered Unclamp

— The equipment automatically

unclamps the reticle pod when the reticle

pod status is COMPLETE.

16.3.2 UnclampControl trigger set to AMHS Triggered Unclamp

— The equipment behavior depends upon the

Reticle Load Port Access State. If the Reticle Pod Load port Access State is AUTO, the reticle pod remains

clamped until AMHS has arrived. The AMHS arrives and begins a PIO unload sequence.

17 Reticle Location Object Definition

17.1 A Reticle Location Object (RLO) provides a model for identifying reticle locations. Each RLO on an

equipment is assigned a reticle location ID to uniquely identify it. The assignment shall be documented by the

equipment supplier. There are two types of substrate locations: reticle pod reticle location, which is the location or

position (e.g., slot) in the reticle pod, and equipment reticle location, which is on the equipment resource. The

equipment reticle location is a persistent object, while the reticle pod reticle locations are dynamic objects that shall

be created or deleted by the placement or removal of reticle pods on the equipment. The intent is to follow E90 in

regards to location object management. The reticle location object is a subtype of the substrate location object.

17.1.1 Source reticle locations and Destination reticle locations are the points at which reticles transfer to/from the

equipment’s internal reticle locations (often locations at which processing occurs). A reticle pod reticle location is

the Source or Destination reticle location when a pod is used to transfer the reticle. An equipment reticle location

can be the Source or Destination reticle location when the reticle is transferred directly (without a pod).

17.2 Reticle Location State Model  Figure 9 below shows the dynamic behavior of the reticle location using the

Harel state chart representation.



UNOCCUPIED OCCUPIED

RETICLE LOCATION

Figure 9

Reticle Location State Model Diagram

SEMI E109-0305 © SEMI 2001, 2005 41

17.3 Reticle Location State Definitions

17.3.1 RETICLE LOCATION — the superstate of UNOCCUPIED and OCCUPIED.

17.3.2 UNOCCUPIED — the state in which the reticle location does not hold or have a reticle.

17.3.3 OCCUPIED — the state in which the reticle location holds a reticle.

17.4 Substrate Location State Transition

Table 19 Reticle Location State Model Transition Table

# Current State Trigger New State Action Comment

1 UNOCCUPIED Reticle moves onto the substrate

location.

OCCUPIED None. Data required to be

available for this event:

ReticleID

2 OCCUPIED Reticle moves off the location. UNOCCUPIED Update reticle

tracking history.

Data required to be

available for this event:

ReticleID

17.5 Reticle Location Object Attributes

17.5.1 Table 20 defines attributes for Reticle location objects. These attributes can be accessed by using GetAttr

and SetAttr messages as defined in SEMI E39 (OSS).

Table 20 Reticle Location Object Attribute Table

Attribute Name Definition Access Reqmt Format

ObjID Object Identifier RO Y Text equal to the Reticle Location ID

ObjType Object type RO Y Text = “ReticleLoc”

ReticleID Reticle IDentifier relevant to the location RO Y Text

ReticleLocation-

State

Reticle Location state RO Y Enumerated:

UNOCCUPIED

OCCUPIED

18 Services

18.1 The purpose of this section is to define the message services required to support Reticle Management

functionality.

18.1.1 This message service definition has four parts:

 A service description table.

 A service parameter table.

 A service parameter value table that specifies the type and range of the parameters.

 A service state mapping table that defines the states in which each service is valid.

18.2 Service Message Description

18.2.1 There are two types of services:

 An initial message and response between the service user and the service provider.

 A notification message from the service provider to the service user that does not require a response.

18.2.2 The “TYPE” column in the following table is used to indicate whether the service consists of a

request/response message pair, “R”, or a single notification message, “N”.

SEMI E109-0305 © SEMI 2001, 2005 42

18.2.3 The “Requirement” level column in the following table is used to indicate whether the service is a

fundamental requirement, “F”, or an additional capability “A” for RPMS.

Table 21 Service Message Description

Service Name Type Requirement

level

Description

Bind R F This service shall associate a PodID to a load port and shall cause the load port

to transition to the RESERVED state.

CancelAllPodOut R A This service shall cause all PodOut services to be removed from the queue.

CancelBind R F This service cancels a PodID to load port association and shall cause the load

port to transition to the NOT RESERVED state.

CancelMoveReticle R A This service cancels a prior MoveReticle service provided that MoveReticle

service has not been started.

CancelPod R F This service shall Cancel the current pod related action, and the production

equipment shall return the pod to the unload position of the load port, or an

internal buffer position, depending on the pod’s position in the production

equipment.

CancelPodAtPort R F This service shall Cancel the current pod related action, and the production

equipment shall return the pod to the unload position of the load port.

CancelPodNotificatio

R F This service shall cause the equipment to destroy a pod object instantiated

through a prior PodNotification.

CancelPodOut R A This service shall cause a specified PodOut service to be removed from the

queue by the production equipment.

CancelReservation-

AtPort

R F This service shall cause the equipment to remove the reservation at the specified

Port and to deactivate the visible signal.

CancelReticle-

TransferJob

R A The service cancels a reticle PodID to load port associations and shall cause the

load port to transition to the NOT RESERVED state. Also it shall cause the

equipment to refrain from removing the reticles from the reticle pod specified in

a previous ReticleTransferJob service. Finally it shall cause the equipment to

refrain from removing the reticles from the equipment specified in the same

previous ReticleTransferJob service.

ChangeAccess R F This service shall change the access mode of the specified Ports at the

production equipment. If a load port is dedicated to either Automated delivery

or Manual delivery, the access mode cannot be changed.

ChangeServiceStatus R F This service shall change the transfer status of a specified load port at the

production equipment.

Clamp R A This service shall cause the equipment to engage any clamping mechanisms that

are independent of opening the pod.

ClosePod R A This service shall cause the equipment to close the pod.

IndexDown R A This service shall cause the equipment to index the cassette down when it is safe

for equipment, operators, and reticles to do so.

IndexUp R A This service shall cause the equipment to index the cassette up when it is safe for

equipment, operators, and reticles to do so.

MoveReticle R A This service shall cause the equipment to move a reticle from one position to

another either internal to internal, internal to external, external to internal, or

external to external.

OktoUseReticle R F This service shall change the RETICLE AT EQUIPMENT status of the specified

reticle to QUALIFIED.

OpenPod R A This service shall cause the equipment to open the pod.

PodComplete R F This service shall change the reticle pod accessing status to COMPLETE.