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SEMI E109-0305 © SEMI 2001, 2005 54 Parameter Name Req/Ind Rsp/Conf Description PortID C — If omitted, the production equipment shall select an appropriate port at the time the pod is r eady to be moved. CMStatus — M Inf…

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SEMI E109-0305 © SEMI 2001, 2005 53
Parameter Name Req/Ind Rsp/Conf Description
SourceLocation C — The ReticleLocationID of the location from which to move the reticle,
either the SourceLocation or the ReticleID must be used.
Destination-
Location
M — The ReticleLocationID of the location to which the reticle shall move.
RPMStatus — M Information concerning the result of the service.
18.5.11 OpenPod
18.5.11.1 The OpenPod service is used by the host to request the equipment open a pod
Table 46 OpenPod Service Parameter Definitions
Paramter Name Req/Ind Rsp/Conf Description
PortID C — The PortID where a pod is to be opened. Either PortID or PodID must be
specified.
PodID C — The PodID for which the door should be opened. Either PortID or PodID
must be specified.
CMStatus — M Information concerning the result of the service.
18.5.12 PodIn
18.5.12.1 The PodIn service is only used to request the internal buffer equipment internalize a carrier that has been
moved to the load port via a previous PodOut service. When using host based verification, the production
equipment shall move the pod in to the internal buffer for the first time after receiving the ProceedWithPod request.
If the PodIn service is received by the production equipment without previously having received a PodOut service
for the carrier, the service will be refused.
Table 47 PodIn Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The CarrierID for the carrier to internalize.
CMStatus — M Information concerning the result of the service.
18.5.13 PodOut The PodOut service is sent to internal buffer production equipment, to request that the
equipment move the specified carrier to a load port, as soon as the carrier is completed. When the CarrierOut
service is started, the destination load port state becomes TRANSFER BLOCKED, and the load port’s association
state becomes ASSOCIATED.
18.5.13.1 PodOut Queuing
18.5.13.1.1 This service request can be queued by the production equipment. The production equipment is required
to support a queue of n size, where n is equal to the sum of the number of internal buffer locations and the number of
internal FIMS ports. The order of the queue is FIFO for each load port. If the load port is not specified in service
request, the equipment chooses which load port queue to place the PodOut service. The queued service does not
take effect until the current substrate handling action is complete (i.e., filling, emptying of the pod) and the load port
is in the NOT ASSOCIATED state. When a PodOut service is queued and the production equipment load port is
currently in the TRANSFER BLOCKED state, the production equipment shall keep the load port in the TRANSFER
BLOCKED state. Then, after the port is cleared, the PodOut service shall begin.
Table 48 PodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — PodID for the carrier to be moved out.
SEMI E109-0305 © SEMI 2001, 2005 54
Parameter Name Req/Ind Rsp/Conf Description
PortID C — If omitted, the production equipment shall select an appropriate port at the
time the pod is ready to be moved.
CMStatus — M Information concerning the result of the service.
18.5.14 PodRelease
18.5.14.1 PodRelease request is used to tell the equipment that the pod is ready to be moved away from the read or
write position. Equipment shall deny the request if LocationID and PodID are mismatched. ReticlePodLocationID
is a ReticlePod attribute.
Table 49 PodRelease Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticlePod-
LocationID
C — The ID for the location of the pod. Either ReticlePodLocationID or PodID must
be used.
PodID C — The PodID of the pod. Either ReticlePodLocationID or PodID must be used.
CMStatus — M Information concerning the result of the service.
18.5.15 PodTagReadData
18.5.15.1 PodTagReadData is used to request a block of data from the PodID tag. Equipment shall deny the request
if LocationID and PodID are mismatched.
Table 50 PodTagReadData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the pod. Either LocationID or PodID must be used.
PodID C — The PodID of the pod. Either LocationID or PodID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data — C Data from the PodID tag. May be NULL if no data exists for the given section.
CMStatus — M Information concerning the result of the service.
18.5.16 PodTagWriteData
18.5.16.1 PodTagWriteData is used to request that a block of data be written to the PodID tag. Equipment shall
deny the request if LocationID and PodID are mismatched.
Table 51 PodTagWriteData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the pod. Either LocationID or PodID must be
used.
PodID C — The PodID of the pod. Either LocationID or PodID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data M — Data from the PodID tag. May be NULL if no data exists for the given
section.
SEMI E109-0305 © SEMI 2001, 2005 55
Parameter Name Req/Ind Rsp/Conf Description
CMStatus — M Information concerning the result of the service.
18.5.17 Re-QualifyReticle
18.5.17.1 The Re-QualifyReticle service is sent by the host to indicate that a reticle should be re-qualified.
Table 52 Re-QualifyReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — ReticleID to remove from equipment.
RPMStatus — M Information concerning the result of the service.
18.5.18 ReserveAtPort
18.5.18.1 The ReserveAtPort service is sent by the host to indicate future activity at the load port. This allows for
reserving the port but doing host based ID verification. The load port will enter the RESERVED State after
receiving this service.
Table 53 ReserveAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve.
CMStatus — M Information concerning the result of the service.
18.5.19 ReticleTransferJob
18.5.19.1 The ReticleTransferJob service is sent by the host to inform the equipment of the expected arrival of a
reticle pod to a reticle pod load port and/or the expected departure of a reticle pod. The equipment should create an
association between the reticle pod and reticle load port. The equipment should transition the load port reservation
state model to RESERVED. The ReticleTransferJob service is also used by the host to inform the equipment which
reticles contained in the reticle pod should be removed and placed in the equipment. Lastly the ReticleTransferJob
service is used by the host to inform the equipment which reticles contained in the equipment should be removed
from the equipment and placed in the reticle pod. This service is optional.
Table 54 ReticleTransferJob Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod which will delivered to the equipment.
InputPortID M — The Port ID where the pod will be received.
If zero: The pod must be picked from the tool’s internal buffer (for
internal buffer equipment only).
Either InputPortID or OutputPortID must be used (both may be specified
as well).
OutputPortID M — The Port ID to which the pod will be delivered after having executed all
related reticle actions.
If zero: The pod will remain in the tool’s internal buffer (for internal
buffer equipment only).
Either InputPortID or OutputPortID must be used (both may be specified
as well).
PodPropertiesList C — A list of name value pairs providing attributes for the pod object being
instantiated with the ReticleTransferJob service.