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SEMI E109.1-0704 © SEMI 2002, 2004 3 Parameter Name Parameter Range SECS-II Data Item ArrivingReticleList List of n structures, where n = capacit y Reticle ID ReticleRemovalinstruction ReticlePropertiesList When a slot i…

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SEMI E109.1-0704 © SEMI 2002, 2004 2
Table 1 Service Message Mapping
Service Name Stream/Function SECS-II Message Name
Bind S3F17/F18 Carrier Action Request/Acknowledge
CancelAllPodOut S3F33/F34 Cancel All Pod Out Request/Acknowledge
CancelBind S3F17/F18 Carrier Action Request/Acknowledge
CancelMoveReticle S14F19/20 Generic Service Request/Acknowledge
CancelPod S3F17/F18 Carrier Action Request/Acknowledge
CancelPodAtPort S3F17/F18 Carrier Action Request/Acknowledge
CancelPodNotification S3F17/F18 Carrier Action Request/Acknowledge
CancelPodOut S3F17/F18 Carrier Action Request/Acknowledge
CancelReservationAtPort S3F25/F26 Port Action Request/Acknowledge
CancelReticleTransferJob S3F35/F36 Carrier Action Request/Acknowledge
ChangeAccess S3F27/F28 Change Access/Acknowledge
ChangeServiceStatus S3F25/F26 Port Action Request/Acknowledge
Clamp S3F17/F18 Carrier Action Request/Acknowledge
ClosePod S3F17/F18 Carrier Action Request/Acknowledge
IndexDown S3F17/F18 Carrier Action Request/Acknowledge
IndexUp S3F17/F18 Carrier Action Request/Acknowledge
MoveReticle S14F19/F20 Generic Service Request/Acknowledge
OktoUseReticle S14F19/F20 Generic Service Request/Acknowledge
PodComplete S3F17/F18 Carrier Action Request/Acknowledge
PodIn S3F17/F18 Carrier Action Request/Acknowledge
PodNotification S3F17/F18 Carrier Action Request/Acknowledge
PodOut S3F17/F18 Carrier Action Request/Acknowledge
PodRelease S3F17/F18 Carrier Action Request/Acknowledge
PodTagReadData S3F29/F30 Carrier Tag Read Data Request/Acknowledge
PodTagWriteData S3F31/F32 Carrier Tag Write Data Request/Acknowledge
ProceedWithPod S3F17/F18 Carrier Action Request/Acknowledge
ProceedWithReticle S14F19/20 Generic Service Request/Acknowledge
RejectReticle S14F19/F20 Generic Service Request/Acknowledge
Re-qualifyReticle S14F19/F20 Generic Service Request/Acknowledge
ReserveAtPort S3F25/F26 Port Action Request/Acknowledge
ReticleTransferJob S3F35/F36 Reticle Transfer Job Request/Acknowledge
SetQualificationIntervalTime S14F3/4 SetAttr Request
Unclamp S3F17/F18 Carrier Action Request/Acknowledge
5.3 Services Parameter Mapping
5.3.1 Table 2 maps the SEMI E109 service parameters to SECS-II Data Items.
NOTE 1: Use of parameters not specified for a given message in SEMI E109 is prohibited. SECS-II data items not used for a
given message shall be sent as zero length items.
Table 2 Service Parameters to SECS-II Data Item Mapping
Parameter Name Parameter Range SECS-II Data Item
AccessMode Enumerated:
0 = MANUAL
1 = AUTO
ACCESSMODE
SEMI E109.1-0704 © SEMI 2002, 2004 3
Parameter Name Parameter Range SECS-II Data Item
ArrivingReticleList List of n structures, where
n = capacity
Reticle ID
ReticleRemovalinstruction
ReticlePropertiesList
When a slot in a pod contains no reticle, the value for Reticle ID
should be null, the ReticleRemovalInstruction
n
should be PASS
BY, and the ReticlePropertiesList
,
should be a zero length list.
L,n
1. L,3
1.<RETICLEID
1
>
2.< RETREMOVEINSTR
1
>
3. L,m
1. L,2
1. <ATTRID
1,1
>
2. <ATTRDATA
1,1
>
:
m. L,2
1.<ATTRID
1,m
>
2.<ATTRDATA
1,m
>
:
n. L,3
1.<RETICLEID
n
>
2. <RETREMOVEINSTR
n
>
3. L,m
1. L,2
1. <ATTRID
n,1
>
2. <ATTRDATA
n,1
>
:
m. L,2
1. <ATTRID
n,m
>
2. <ATTRDATA
n,m
>
CMAcknowledge Enumerated CAACK
CMStatus Structure L,2
1.<CAACK>
2.Status
Data 1–80 characters DATA
DataSeg 1–80 characters DATASEG
DataSize 0–65,535 (integer) DATALENGTH
DepartingReticleList List of n structures, where
n = capacity
Reticle ID
ReticlePlacementInstruction
When a slot in a pod contains no reticle and will not have a reticle
placed, the value for Reticle ID
should be null and the
ReticlePlacmentInstruction
n
should be PASS BY.
L,n
1. L,2
1.<RETICLEID
1
>
2.<RETPLACEINSTR
1
>
:
n. L,2
1.<RETICLEID
n
>
2.<RETPLACEINSTR
n
>
DestinationLocation 1–80 characters RPMDESTLOC
ErrorCode Enumerated ERRCODE
ErrorText 1–80 characters ERRTEXT
InputPortID U1(0, 101–255) INPTN
OutputPortID U1(0, 101–255) OUTPTN
PodAttributeData Any ATTRDATA
PodAttributeID 1–40 characters ATTRID
PodID 1–64 characters PODID
SEMI E109.1-0704 © SEMI 2002, 2004 4
Parameter Name Parameter Range SECS-II Data Item
PodPropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
PortID U1(101–255) PTN
PortList List of PortID L,n
1.<PTN
1
>
:
n.<PTN
n
>
ReticleAttributeData Any ATTRDATA
ReticleAttributeID 1–40 characters ATTRID
ReticleLocation-
AttributeData
Any ATTRDATA
ReticleLocation-
AttributeID
1–40 characters ATTRID
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
RETPLACEINSTR
ReticlePodLocationID 1–80 characters CATTRID
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
RETREMOVEINSTR
ReticleID 1–64 characters RETICLEID
ReticleLocation-
PropertiesList
List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
ReticlePropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.< ATTRID
n
>
2.< ATTRDATA
n
>