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SEMI E120-0705 © SEMI 2003, 2005 1 SEMI E120-0705 SPECIFICATION FO R THE COMMON EQUIPMENT MODEL (CEM) This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This edition was app…

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SEMI E109.1-0704 © SEMI 2002, 2004 10
Attribute Name Attribute Data Form: SECS-II Structure
QualificationTerminationTime YYYYMMDDHHMMSSCC
ReticleStatus 51 (U1) ReticleStatus
0 “RETICLE NOT PRESENT”
1 “WAITING QUALIFICATION”
2 “READING ID”
3 “QUALIFIED”
4 “IN USE”
5 “REJECTED”
6 “RETICLE WAITING FOR HOST
7 “ PARTICLE INSPECTION”
ReticleAllocationStatus 51 (U1) RetcileAllocationStatus
0 “NOT ALLOCATED”
1 “ALLOCATED”
ReticleLocationID 20 (A) ReticleLocationID
ReticleLocationID conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.
ReticleType Equipment dependent
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E120-0705 © SEMI 2003, 2005 1
SEMI E120-0705
SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published March 2003;
previously November 2004.
1 Purpose
1.1 The purpose of this specification is to provide a generally applicable object model of semiconductor equipment
structure. This object model is intended to be used in the following ways:
As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host.
As a base model to be used and extended by other SEMI equipment communication standards.
As a reference for the creation of technology-specific object model definitions, such as XML schema.
2 Scope
2.1 This specification provides a common set of constructs that can be used by the equipment manufacturer to
model their equipment structure.
2.2 This specification defines the classes, attributes, relationships, and other detail appropriate for the model of an
equipment’s structure as viewed by a factory host application through the available communication interfaces.
2.3 The model contained in this specification documents features of the equipment structure considered necessary
for more than one (current or future) equipment communication standards.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This specification does not define “object diagrams” (that is, instances) of equipment. These are the
responsibility of the equipment supplier to define in conformance with the model.
3.2 This specification does not define the behavior of objects/classes. Behavior definition of classes defined in this
specification is left to other equipment communication standards.
3.3 This specification does not define any specific messaging between equipment and factory host. It is expected
that communication related to the Common Equipment Model will be defined by other standards.
3.4 This specification addresses only the host view of the equipment. No other part of the factory is modeled by
this document.
4 Referenced Standards and Documents
uuid: ISO/IEC 11578:1996 Information technology - Open Systems Interconnection — Remote Procedure Call
(RPC), http://www.iso.ch/cate/d2229.htm.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CEM — Common Equipment Model
SEMI E120-0705 © SEMI 2003, 2005 2
5.2 Definitions
5.2.1 UML terms used in this document conform to definitions in the Glossary of Terms of the OMG specification
of UML (referenced above). Related Information, §R1, contains selected definitions from that Glossary of Terms.
5.2.2 Definitions or descriptions of many of the terms used in this specification can be found in the SEMI
Compilation of Terms, available on the SEMI web site, http://www.semi.org/.
5.2.3 When terms from the above two sources conflict, the definition from the OMG UML specification takes
precedence in this specification.
6 Conventions
6.1 This section defines conventions followed in this document.
6.2 Object Modeling
6.2.1 Unified Modeling Language (UML) — This specification uses UML notation for all class diagrams and for
object diagrams provided as examples. No other types of diagrams are used in this specification.
6.2.1.1 UML class diagrams have clearly defined meaning and are a part of this specification. Detail contained in
these diagrams is not always repeated in the text.
6.2.2 Behavior Not Defined — This specification, defines classes, their relationships, and attributes. No behavior is
specified either in the form of UML state, activity, sequence diagrams, or in the form of operations definitions.
6.2.3 Name of a Class — The text capitalizes class names.
6.2.4 Abstract and Concrete Classes — Each class is specified as Abstract or Concrete. Abstract classes are not
directly implemented. In this specification “implemented” means represented to the factory through the
communications interface. All classes defined as concrete may be directly implemented. This specification does
not attempt to define equipment control system implementation. In UML class diagrams, abstract class names are
shown in italics.
6.2.5 Class Attribute Definition — The attributes of a class are defined in table format as illustrated by Table 1
below. Note that the “+” sign in front of attributes in UML class diagrams indicates “public” attributes. All
attributes defined in this specification are public.
Table 1 Attribute Table Format
Attribute Name Definition Access Reqd Form
RO or
RW
Y or
N
See list below.
6.2.5.1 Access — Attributes may be settable (ReadWrite or RW) or not settable (ReadOnly or RO) through an
interface to the equipment.
6.2.5.2 Reqd — Is this attribute required? Y – Yes, or N – No.
6.2.5.3 Form — Defines the data type of the attribute. Data types specified in the Common Equipment Model
specification are described in the subsections that follow. Data types in this specification are high-level definitions
and should be mapped to the data types of a specific technology as appropriate. Extensions to the Common
Equipment Model are not limited to the list of data types defined in this specification. See the definition of “Form”
in the SEMI Compilation of Terms for other Form values commonly used in SEMI documents.
6.2.5.3.1 Enumeration — A list of named values used as the range of a particular attribute type. In this document,
these values are represented as text strings, but may be implemented differently (e.g. as integers that correspond to
the named values).
6.2.5.3.2 String — A text string. Limitations on length are left to the implementation technology unless otherwise
specified in this document.
6.2.5.3.3 List of xxx — An item that can hold multiple instances of a specified type (where xxx is the data type).