semi合集-English.pdf - 第2972页
SEMI E120-0705 © SEMI 2003, 2005 8 Table 2 A ttributes of Nameable Attribute Name Descri ption Access Reqd Form uid Identifier that uniquely and permanently id entifies a Nameable . The uid contains a “uuid” string. See …
SEMI E120-0705 © SEMI 2003, 2005 7
IODevi ce
Subsystem
Eq uipment
Module
+modules
+subsystems
+ioDevices
0..*
0..*
0..*
0..*
0..*
0..*
0..*
0..*
+ioDevices
+ioDevice s
+subsyst ems
+subsystems
+modules
0..1
0..*
0..*
0..*
0..*
0..*
0..*
0..*
MaterialLocation
0..*
+materialLocations
+materialLocat ions
+materialLocations
0..*
0.. *
0..1
0..1
0..1
0..*
0..1
+equipment
Figure 3
Relationship View
8.5 Class Definitions
8.5.1 Class definitions consist of a brief description of the highlighted class, a class diagram showing the class and
all related classes (both from an inheritance and relationship standpoint), a table defining the attributes, and further
text as necessary to fully define the class.
8.5.2 For clarity, the abstract classes are listed separately from concrete classes.
8.5.3 Abstract Classes
8.5.3.1 Nameable — The root of each class in the CEM class hierarchy. This class provides a means for uniquely
identifying each component of the equipment structure
. Nameable is a superclass of EquipmentElement and
MaterialLocation (see Figure 4). It includes three attributes: uid, name, and description (see Table 2). Nameable is
also associated with the class Extension. See ¶6.3 for more information on the use of Extension.
EquipmentElement MaterialLocation
+uid:string
+name:string
+description:string
Nam eable
Extens ion
extensions
0..*
1
target
Figure 4
Nameable Class
SEMI E120-0705 © SEMI 2003, 2005 8
Table 2 Attributes of Nameable
Attribute Name Description Access Reqd Form
uid Identifier that uniquely and permanently identifies a Nameable. The uid
contains a “uuid” string. See §4, ISO/IEC 11578:1996 for a reference to
uuid definition. A properly formed uuid provides an identifier that is
unique from any other uuid (in the factory and beyond).
RO Y String.
name Human-readable name for Nameable. The name is representative of the
role or function that the Nameable plays in the equipment structure.
RO Y String – See rules for
naming below.
description Human-readable description of Nameable. Contents of this attribute shall
provide enough information for a human to understand the purpose of
this Nameable.
RO Y String.
8.5.3.1.1 uid — The requirements for each uid value are:
The uid value shall conform to the rules for constructing a uuid as defined in standard ISO/IEC 11578:1996.
The uid shall be a fixed value with respect to the physical hardware and shall be unique among all Nameables.
The uid shall remain with the Nameable, even if the Nameable is removed from one equipment and added to
another. For example, if an IODevice fails and is removed from an equipment, its replacement will have a
different uid. If the original IODevice is repaired and installed on a different equipment, it will retain its
original uid. Note that a MaterialLocation is contained within an equipment component and will move with
that component, retaining its own uid.
8.5.3.1.2 name — The naming requirements for each Nameable are:
Names shall consist of alphanumeric characters, spaces, hyphens, and underscores. Names shall start with an
alpha character, and shall not contain leading or trailing spaces.
The value of the name attribute shall be unique among component parts
1
of the same aggregate (object). This
restriction holds for a Nameable instance that is aggregated (shared) by more than one object.
If a Nameable represents a class or variable described in a SEMI standard, the name used shall conform to the
spelling and case style specified in the standard. If the uniqueness rules can’t be met, the name shall include an
appended suffix of the form “-n”, where ‘n’ is a number making the name unique.
The name attribute represents the role or function of the object in the equipment hierarchy. The value of name
shall not change unless the physical equipment configuration changes. Upon a configuration change, if a
Nameable is replaced in its role and function by a different one, the name value representing that role shall be
transferred to the new Nameable. For example, if an IODevice named “TemperatureControlZone5” fails and is
replaced with a new unit, that new unit shall be named “TemperatureControlZone5”.
8.5.3.2 EquipmentElement — This abstract class represents the basic information required for each hardware
component in the equipment structure (see Figure 7). EquipmentElement includes the attributes: elementType,
supplier, make, model, modelRevision, function, and immutableId (see Table 3). It also has a composite aggregation
of SoftwareModules.
1 Members of an aggregation (i.e. the classes/objects opposite the diamond) are referred to as “component parts” or “components” of the
aggregation. The “aggregate” is the class/object at the diamond end of the aggregation relationship.
SEMI E120-0705 © SEMI 2003, 2005 9
SoftwareModule
0..*
softwareModules
+elementType:string
+supplier:string
+make:string
+model:string
+modelRevision:string
+function:string
+immutableId:string
EquipmentElement
Nameable
Subsystem IODevice ExecutionElement
Figure 5
EquipmentElement Class
Table 3 Attributes of EquipmentElement
Attribute Name Definition Access Reqd Form
elementType Describes EquipmentElement type. For example, if EquipmentElement is
a valve for controlling Nitrogen gas flow, the value of this attribute might
be “Nitrogen Valve”. If it is a load port, the value might be “Load Port”.
RO Y String
supplier The name of the manufacturer of the EquipmentElement, if known. Not
all EquipmentElement instances of the equipment make it easy to
determine this information automatically. Where this information cannot
be determined or configured, it shall have the value “unknown”.
RO Y String
make The hardware make of the EquipmentElement, if known. Not all
EquipmentElement instances of the equipment make it easy to determine
this information automatically. Where this information cannot be
determined or configured, it shall have the value “unknown”.
RO Y String
model The hardware model of the EquipmentElement, if known. Not all
EquipmentElement instances of the equipment make it easy to determine
this information automatically. Where this information cannot be
determined or configured, it shall have the value “unknown”.
RO Y String
modelRevision The hardware model revision of the EquipmentElement, if known. Not
all EquipmentElement instances of the equipment make it easy to
determine this information automatically. Where this information cannot
be determined or configured, it shall have the value “unknown”.
RO Y String
function The role of this EquipmentElement within the equipment. RO Y String
immutableId An unchanging identifier, such as the serial number of the
EquipmentElement, if known.
RO Y String
8.5.3.3 ExecutionElement — This abstract class models the parts of the equipment structure capable of processing,
measuring, or testing material — Module and Equipment. It is a subclass of EquipmentElement (see Figure 8).
ExecutionElement has the following attributes: processName, processType, and recipeType (defined in Table 4).