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SEMI E120-0705 © SEMI 2003, 2005 16 Object 5 (Equipment) name=Track Locator=Track Object6 (Subsy stem ) name=Port-1 Locator=Track/Port-1 Object8 (Subsy stem ) name=Power Locator=Track/Port-1/Pow er Object7 (Subsy stem) n…
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Table 11 Attributes of SoftwareModule
Attribute Name Definition Required Form
name The name of the SoftwareModule. Y String
supplier The name of the company that created the SoftwareModule. Where
this information cannot be determined or configured, it shall have the
value “unknown”.
Y String
description A description of the function or purpose of the SoftwareModule. Y String
version The version number of the SoftwareModule. It should be formatted
according to the version numbering convention of the company that
produced the SoftwareModule.
Y String
9 Positional Referencing Of Nameable Objects
9.1 Introduction
9.1.1 The E120 specification provides fixed referencing of all Nameable objects by means of the uid attribute. The
uid is fixed to a specific hardware entity. Consider a massflow controller that fails and is swapped out with one of
the same kind. It is expected that the name attribute of that massflow controller would become the same as the old
one, but it is required that the uid be different. Thus, the name is distinctively a “positional reference” that identifies
a place or position in the hierarchy.
9.1.2 This section defines a positional reference that is unique within the equipment. This “Locator” value is based
on the name attribute of Nameable. It can be used in communications to the equipment to uniquely identify a
Nameable object in that equipment.
9.1.3 If the equipment provides a positional reference for an equipment component, the Locator form, as defined in
this section, shall be used.
9.1.4 There are some situations where a positional reference to an equipment component is more useful than the
fixed reference that uid provides. For example, a data collection plan might indicate that during processing, the
reading from a massflow controller (one kind of Nameable) is to be recorded. At some point, the massflow
controller is replaced. If the reference in the specification is to the uid, then the data collection plan no longer
works. In a worse case, two identical massflow controllers are removed from similar process modules for
maintenance and then replaced on the opposite modules. In this case, the uid reference would yield data from the
wrong process module. If a positional reference were used, then the data collection plan would always collect
readings from the massflow controller on the specified process module.
9.2 Constructing A Locator
9.2.1 Values for the Locator string are derived by starting with the name attribute of the root Nameable (usually an
Equipment) in the hierarchy followed by the ‘/’ character. This is followed by the names of any objects between the
root and target (each name separated by the ‘/’ character). Finally, the name of the target is added. A shorthand
notation for this pattern is: “root/aggregate/aggregate/aggregate/target”. Example values for Locator are illustrated
by the block diagram in Figure 14.
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Object5 (Equipment)
name=Track
Locator=Track
Object6 (Subsystem)
name=Port-1
Locator=Track/Port-1
Object8 (Subsystem)
name=Power
Locator=Track/Port-1/Power
Object7 (Subsystem)
name=Port-2
Locator=Track/Port-2
Object9 (Subsystem)
name=Power
Locator=Track/Port-2/Power
Figure 14
Example: Equipment Hierarchy
9.2.2 In the case where an object is shared, there may be more than one Locator that will resolve to that object. The
block diagram in Figure 15 gives an example of the Locators that might result. Notice that Object8 is shared by
Object6 and Object7. This means that it can be referenced by two different but equally valid Locator values as
shown in the diagram. For Nameable instances with more than one possible Locator value, any valid Locator
construct will resolve to that object.
Object5 (Equipment)
name=Track
Locator=Track
Object6 (Subsystem)
name=Port-1
Locator=Track/Port-1
Object8 (Subsystem)
name=Power-1
Locator=Track/Port-1/Power-1
=Track/Port-2/Power-1
Object7 (Subsystem)
name=Port-2
Locator=Track/Port-2
Object9 (Subsystem)
name=Power-2
Locator=Track/Port-2/Power-2
Figure 15
Example: Equipment Hierarchy With Shared Object
9.2.3 Note that the Locator value is valuable as a reference to a Nameable. However, that value is not available
from the Nameable as an attribute. The Locator can be built independently and used when only the names are
known or when the position in the hierarchy is more important than the identity of the equipment component being
referenced.
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10 Compliance
10.1 This section defines requirements for compliance to this specification.
10.1.1 The term “CEM class” refers generally to any one of the classes defined by this specification. The term
“equipment component” refers generally to any part of the equipment that fits the definition of any subclass of
EquipmentElement (including Equipment, Module, Subsystem, and IODevice).
10.1.2 Compliance to this specification requires
1. Satisfaction of all requirements listed in Table 12, and
2. Satisfaction of all requirements for each CEM class that has been implemented (as reflected in the
corresponding row of Table 13).
10.1.3 The tables below each contain columns labeled “Implemented” and “CEM Compliant”. Each row represents
a requirement (or group of requirements).
10.1.4 The “Implemented” column communicates an assertion that the equipment has provided the function or
capability that corresponds to the intent of that requirement. This assertion is not testable. However, in order to be
“CEM Compliant”, the “Implemented” column would logically be set to “yes”.
10.1.5 A row/requirement is considered to be “CEM Compliant” when all defined aspects of that requirement have
been satisfied. Therefore, an implementation that is compliant to CEM would have:
All rows of Table 12 marked “yes” for both “Implemented” and “CEM Compliant”,
The “Equipment” row of Table 13 would be marked “yes” for both “Implemented” and “CEM Compliant”, and
Any other rows of Table 13 that are marked “yes” for “Implemented” would also be marked “yes” for CEM
Compliant”.
10.2 General CEM Compliance Requirements
10.2.1 There are five general CEM compliance requirements. They are listed in Table 12.
Table 12 General CEM Requirement Compliance Table
# CEM Requirement Implemented CEM Compliant
1 An Equipment instance shall be defined using the CEM Equipment class Yes No Yes No
2
When other equipment component instances are defined, they shall meet all
requirements for the corresponding CEM classes (see Table 13 and §8). Please note
that this specification does not require that all CEM classes be used in each equipment
implementation. Instead, it requires that all requirements for a class be met whenever
it is used.
Yes No Yes No
3 All object definitions that have been based on CEM classes shall be made available
electronically to the factory host.
Yes No Yes No
4
If the equipment provides a positional reference for an equipment component, the
Locator form as defined in §9 shall be used.
Yes No Yes No
5 Association Navigability shall be supported as defined in ¶6.2.7. Yes No Yes No
10.3 Specific Compliance Requirements
10.3.1 Table 13 lists each concrete class and references the section where requirements are defined for that class.
The requirements are primarily defined by the UML diagram and table of attributes in the referenced section. The
text of the section serves to clarify the requirements and add detail where appropriate.
10.3.2 On the UML diagram, note the associations and their cardinality and role specifications. Associations
(including aggregations) constitute requirements on a given class if navigable to the target class. (See ¶6.2.7 for an
explanation about Navigability and related requirements). For a navigable association, object(s) of the target class
are required. When the cardinality of the target class of the association may be zero, the association and target class
may be omitted as appropriate.