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SEMI E120.1-0705 © SEMI 2004, 2005 2 List of Tables Table 1 - Example Tr anslation Table ............................................................................................ ......................................…

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SEMI E120.1-0705 © SEMI 2004, 2005 1
SEMI E120.1-0705
XML SCHEMA FOR THE COMMON EQUIPMENT MODEL (CEM)
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published in 2004.
Table of Contents
1 Purpose .......................................................................................................................................................................................... 2
2 Scope ............................................................................................................................................................................................. 2
3 Referenced Standards and Documents........................................................................................................................................... 2
3.1 SEMI Standards...................................................................................................................................................................... 2
3.2 OMG Standards...................................................................................................................................................................... 2
3.3 W3C Standards....................................................................................................................................................................... 2
4 Terminology .................................................................................................................................................................................. 3
4.1 Abbreviations and Acronyms.................................................................................................................................................. 3
4.2 Definitions and Acronyms ...................................................................................................................................................... 3
5 Conventions................................................................................................................................................................................... 3
5.3 Translating UML to XML....................................................................................................................................................... 3
5.7 Translation Table Column Header Description ..................................................................................................................... 3
5.8 Documenting The XML With Diagrams ................................................................................................................................. 4
6 CEM Class Mapping to XML........................................................................................................................................................ 6
6.2 Abstract Classes ..................................................................................................................................................................... 7
6.2.2 Nameable => NameableType.............................................................................................................................................. 7
6.2.3 EquipmentElement => EquipmentElementType.................................................................................................................. 7
6.2.4 ExecutionElement => ExecutionElementType .................................................................................................................... 8
6.2.5 Extension => ExtensionType............................................................................................................................................... 9
6.3 Concrete Classes .................................................................................................................................................................... 9
6.3.5 Equipment => EquipmentType ......................................................................................................................................... 10
6.3.6 Module => ModuleType.................................................................................................................................................... 12
6.3.7 Subsystem => SubsystemType........................................................................................................................................... 13
6.3.8 IODevice => IODeviceType ............................................................................................................................................. 14
6.3.9 MaterialLocation => MaterialLocationType.................................................................................................................... 15
6.3.10 SoftwareModule => SoftwareModuleType ..................................................................................................................... 15
6.4 Added XML Constructs......................................................................................................................................................... 16
6.4.2 XML simpleTypes .............................................................................................................................................................. 16
6.4.3 Added XML complexTypes ................................................................................................................................................ 16
6.4.4 Equipment Element............................................................................................................................................................ 17
7 XML Schema............................................................................................................................................................................... 17
8 Related Documents...................................................................................................................................................................... 17
List of Figures
Figure 1 XML Example Diagram................................................................................................................................................... 5
Figure 2 XML for Sample............................................................................................................................................................... 6
Figure 3 – NameableType............................................................................................................................................................... 7
Figure 4 - EquipmentElementType................................................................................................................................................. 8
Figure 5 – ExecutionElementType ................................................................................................................................................. 8
Figure 6 - ExtensionType ............................................................................................................................................................... 9
Figure 7 - Example Of The XML Structure For Shared Components ............................................................................................ 10
Figure 8 - EquipmentType.............................................................................................................................................................. 11
Figure 9 - ModuleType................................................................................................................................................................... 13
Figure 10 - SubsystemType ............................................................................................................................................................ 14
Figure 11 - IODeviceType.............................................................................................................................................................. 15
Figure 12 - MaterialLocationType.................................................................................................................................................. 15
Figure 13 - SoftwareModuleType................................................................................................................................................... 16
Figure 14 - Equipment Element...................................................................................................................................................... 17
SEMI E120.1-0705 © SEMI 2004, 2005 2
List of Tables
Table 1 - Example Translation Table..............................................................................................................................................4
Table 2 - XML Diagram Symbols ..................................................................................................................................................4
Table 3 - Translation Table For Nameable .....................................................................................................................................7
Table 4 - Translation Table For EquipmentElement.......................................................................................................................7
Table 5 - Translation Table For ExecutionElement........................................................................................................................8
Table 6 - Translation Table For Extension......................................................................................................................................9
Table 7 - Translation Table For Equipment....................................................................................................................................10
Table 8 - Translation Table For Module Class ...............................................................................................................................12
Table 9 - Translation Table For Subsystem ....................................................................................................................................14
Table 10 - Translation Table For IODevice....................................................................................................................................14
Table 11 - Translation Table For MaterialLocation........................................................................................................................15
Table 12 - Translation Table For SoftwareModule.........................................................................................................................15
Table 13 - simpleTypes In The CEM Schema................................................................................................................................16
Table 14 - complexTypes In The CEM Schema.............................................................................................................................16
1 Purpose
1.1 The purpose of this specification is to provide an XML schema that corresponds to the UML model for
equipment defined by SEMI E120. This schema is available to equipment communication standards that want to
use CEM-defined equipment structural information in XML formatted equipment communication.
2 Scope
2.1 The scope of this document is the faithful representation of the CEM model in an XML schema. It will not add
new domain information or concepts to the model. The only additions made are those needed to render a useful
XML schema.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
3.2 OMG Standards
Unified Modeling Language (UML) Specification
1
, Version 1.4, OMG Specification 01-09-67
3.3 W3C Standards
Extensible Markup Language (XML) 1.0 (Second Edition)
2
— W3C, 6 October 2000
Namespaces in XML
3
— W3C, 14 January 1999
XML Schema Part 0: Primer
4
— W3C, 2 May 2001
XML Schema Part 1: Structures
5
— W3C, 2 May 2001
XML Schema Part 2: Datatypes
6
— W3C, 2 May 2001
1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, U.S.A., Ph: 1-781-444 0404, Fax: 1-781-444 0320,
http://www.omg.org/technology/documents/modeling_spec_catalog.htm
2 World Wide Web Consortium (W3C), http://www.w3.org/TR/2000/REC-xml-20001006/
3 World Wide Web Consortium (W3C), http://www.w3.org/TR/1999/REC-xml-names-19990114/
4 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-0/
5 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-1/
6 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-2/
SEMI E120.1-0705 © SEMI 2004, 2005 3
XML Path Language (Xpath)
7
— W3C, 16 November 1999
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 UML — Unified Modeling Language
4.1.2 W3C — World Wide Web Consortium
4.1.3 XML — eXtensible Markup Language
4.2 Definitions and Acronyms
4.2.1 UML (Unified Modeling Language) — a notation for representing object-oriented designs and views created
by Booch, Rumbaugh, and Jacobson in order to merge their three popular notations plus aspects of other existing
notations into a single object-oriented notation intended to be usable by all.
4.2.2 XML (eXtensible Markup Language) — a markup language used for representing data rich with context and
content in documents and in communications. XML is an extension of SGML, a document-oriented markup
language. It was created by W3C for use on the Internet. XML can represent object-oriented structures.
5 Conventions
5.1 This section discusses the conventions used in this specification for translating UML to XML and for
documenting the XML. These conventions are heavily influenced by the SEMI E121.
5.2 The reader is expected to have a working knowledge of the UML, XML, and Schema specifications (See ¶3.2
and ¶3.3). This document does not provide tutorial information on these subjects.
5.3 Translating UML to XML
5.4 This document follows the guidelines for XML as outlined in SEMI E121.
5.5 Some of the key guidelines followed in this specification are summarized here:
Attributes of a class are generally represented as elements such that they can be easily extended by other
applications.
Inheritance is modeled as element extension.
Compositions always turn into contained elements (or arrays if multiples are allowed).
Associations and Aggregations are modeled as contained elements or arrays wherever possible to simplify the
instance model.
5.6 The translation of a UML class to XML is documented using a table format illustrated Table 1. Note that SEMI
E120 does not define services, so only attribute and association representations are addressed here. Any superclass
information is addressed in the text and the diagrams.
5.7 Translation Table Column Header Description
Attribute or Role Name — If an attribute, the name of the attribute is placed here. If an association (including
aggregation or composition), the role name from the UML diagram is placed here. Compositions are often not
assigned roll names. In that case “none” is placed here.
UML Name/Type — If an attribute, the data type of the UML attribute is place here. If an association, the type
of association is placed here. The possible types are “Composition”, “Aggregation”, or the basic “Association”.
UML defines these three types of association.
XML Element or Attribute — Lists the type of XML construct used to represent the UML attribute or
association.
7 World Wide Web Consortium (W3C), http://www/w3/org/TR/xpath/