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SEMI E123-0703 © SEMI 2003 3 the HSEM-defined state tran sitions. All expected transitions between HSEM states must occur. 6.3 HSEM State Model 3 EXECUTING PROCESS PROCESS ACTIVE STOPPING SETT ING UP READY LOADING AW AI …

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equipment for purposes of performing package

electrical testing.

5.1.4 execution area — The area from which a current

copy of the process program instructions is executed.

5.1.5 handling equipment — An equipment class

generally consisting of integrated mechanisms and

controls for the purpose of manipulating packaged

devices, trays, and tubes during the manufacturing

process.

5.1.6 indexing — The controlled stepped movement of

material through the handler.

5.1.7 kit — Specific items of hardware and software as

specified by the equipment manufacturer that adapt the

equipment for a specific unit or unit package.

5.1.8 leadconditioning site — A process-site on the

handler where some form of conditioning occurs on the

package leadfingers (i.e., warming).

5.1.9 leadfinger (or substrate connector lead) — (1) In

ceramic packages, an area of refractory metal that has

been plated and is designated for the attachment to a

process-site. (2) The area of the unit designated for

attachment to a process-site.

5.1.10 leadframe — A sheet metal framework upon

which a chip (sometimes chips) is attached, wire-

bonded, and then either molded with plastic epoxy or

with ceramic and/or metal.

5.1.11 media — A temporary material carrier used to

hold and transport units/devices (tubes, trays, etc.).

5.1.12 media map — Formatted data used to map

functionally good and bad units/devices to an X, Y, Z

location in the media. Maps can be requested by the

handler for use prior to processing and then updated

after processing.

5.1.13 off-line programming (OLP) utility — Utility to

create, edit, and format process programs on a

computer, as opposed to creating process programs at

the equipment.

5.1.14 process-site — A location on the equipment

where work is performed on a packaged device (i.e,

electrical test-site, lead conditioning site).

5.1.15 process subsite — An addressable portion of a

process-site.

5.1.16 reset — The action of changing the value of a

variable, such as wafer count (usually to zero).

5.1.17 safe state — A state in which the equipment

presents no danger to the product or user. This implies

that safety interlocks are in place such that the

equipment can be serviced without harm to the operator

and that the material being processed has been removed

from the processing station into an accessible location.

5.1.18 slot — A position in a carrier where a

leadframe, tray, tube, or other media element may

reside.

5.1.19 sort category — Handler specific sorting

category related to a physical buffer within a handler

where parts are stored after processing based on

processing results. Typically there is some software

mapping between process results (e.g., Test Result

Bins) and a Sort Category.

5.1.20 tray — A flat rectangular form of media for

holding singulated packaged units. Also referred to as

waffle packs or matrix trays. A tray is generally

molded plastic with a defined matrix of cells or pockets

tailored for specific packages.

5.1.21 tube — A hollow form of media for holding

packaged units. Also referred to as rails or sticks. A

tube is generally composed of extruded polymer with

internal section dimensions and features tailored for a

specific package.

5.1.22 unit — Discreetly addressable element, such as

an integrated circuit or chip, handled individually or in

groups by a handler for a process tool.

6 State Model

6.1 State Model — The purpose is to define the

equipment-specific processing state model and other

state models necessary to portray the expected

operational states of the equipment to enable host

tracking and control in place of a local operator.

6.2 State Model Requirements

6.2.1 The processing state models in this document are

required for implementing an HSEM-compliant

handler. A state model consists of the following state

model diagram, state definitions, and state transition

tables.

6.2.2 A state model represents the host' s view of the

handler, not necessarily the actual handler' s internal

operations.

6.2.3 All HSEM state model transitions shall be

mapped sequentially into the actual equipment events

that satisfy the requirements of those transitions. In

certain implementations, the handler may enter a state

and have already satisfied all of the conditions required

by the HSEM state model for transition to another state.

The handler makes the required transition without any

additional actions in this situation.

6.2.4 Some equipment may need to include additional

states. However, any additional states must not change

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the HSEM-defined state transitions. All expected transitions between HSEM states must occur.

6.3 HSEM State Model

EXECUTING

PROCESS

PROCESS ACTIVE

STOPPING

SETTING

READY

AWAITING

COMMAND

CONTACTOR

OPEN

IDLE

INIT

IDLE with

ALARM

ABORTED

WORKING

ABORTING

PAUSING

PAUSED

ALARM

PAUSED

CHECKING

PAUSE

PROCESS

PAUSE

PRELOADING

Figure 1

HSEM Processing State Model

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6.4 Description of Handler Processing States

6.4.1 ABORTED — All activity is suspended as a

result of an ABORT command. Any alarm and abort

conditions must be cleared and verified by an operator

before exit from this state.

6.4.2 ABORTING (PROCESSING ACTIVE Sub-State)

— The handler has received an ABORT command. All

activity is suspended. The handler is taking appropriate

action to bring itself and material to a “safe” state

where possible. Unit or Lot data may be invalid or not

available.

6.4.3 ALARM PAUSED (PAUSE Sub-State) — An

alarm has occurred in the PROCESS or PROCESS

PAUSE states, and the handler is waiting for the alarm

to be cleared.

6.4.4 CHECKING (PROCESS PAUSED Sub-State) —

The handler verifies that updates made to the process

program are valid (i.e., possible errors induced via an

operator during the pause).

6.4.5 EXECUTING (PROCESS Sub-State) — The

handler is processing material automatically and can

continue to do so without external intervention. This

state may include interaction with the host or operator.

6.4.6 IDLE — Awaiting a command. IDLE is free of

ALARMS and error conditions.

6.4.7 IDLE with ALARMS — An alarm has occurred in

the IDLE state, and the handler is waiting for all alarms

to be cleared.

6.4.8 INIT — Handler initialization is occurring.

6.4.9 LOADING (EXECUTING Sub-State) — This is

the state the next unit or units are transferred from the

input media or input buffers to the process site(s) and/or

removed from the process site(s) to sort categories.

6.4.10 PAUSE (PROCESSING ACTIVE Sub-State) —

The PROCESS state will be suspended at the

completion of the current unit or next opportunity.

Actions to put the handler in a safe state are performed.

The handler is awaiting a command (RESUME, STOP,

or ABORT) or for alarm(s) to be cleared.

6.4.11 PAUSED (PROCESS PAUSE Sub-State) — The

PROCESS state has been suspended, and the handler is

waiting for a command (RESUME, STOP, or ABORT).

In this state, the operator may correct error conditions

that do not affect the current Process Program selection.

One of the possible corrective actions is for the operator

to manually align the units being processed.

6.4.12 PAUSING (PROCESS PAUSE Sub-State) —

The PROCESS state will be suspended at the

completion of the current unit or next opportunity. The

handler cannot transition to PAUSED state until the

current unit is completed and the handler is in a “safe

state”.

6.4.13 AWAITING COMMAND (WORKING Sub-

State) — Unit is moved to process-site (e.g., for

electrical test, to insert into contactor). Actuator

piston(s) is extended to the alignment test site(s) if

applicable. If contactors must be “closed” before

processing can occur, then contactors are in the closed

condition. In this state, handler has completed all

loading and is awaiting the next command from Host to

signal process complete.

6.4.14 CONTACTOR OPEN (WORKING Sub-State) —

Unit process is complete and host issued a BREAK-

CONTACT or RECONTACT command. (e.g. Actuator

piston(s) is retracted from the alignment test site(s),

contactors are open.) If RECONTACT command was

issued, unit will return to alignment for a step and

repeat. Otherwise Handler will remain in this state until

a MAKE-CONTACT is received to resume processing.

Commands such as STOP, ABORT and PAUSE are

still valid and follow the respective required transitions.

6.4.15 PRELOADING (PROCESS Sub-State) —

Handler has received a PRELOAD-UNITS command to

begin preloading units to soak chambers or some

equivalent process buffers. Units should not be

transferred to process sites in this state. During this

time, test equipment may also go through its internal

setup process in parallel, such as testhead calibrations.

If handler does not implement any process buffers, the

remote command from Host must still be accepted and

state transition followed, in which case handler will

transition back to READY state immediately with

PreloadComplete event sent to Host.

6.4.16 PROCESS (PROCESS Sub-State) — This state

is the parent of those sub-states that refer to the

preparation and execution of a process program.

6.4.17 PROCESS PAUSE (PAUSE Sub-State) — The

handler is free of alarm conditions in the PAUSE state.

6.4.18 READY (PROCESS Sub-State) — The handler

is ready to begin processing and is awaiting a START

or PRELOAD-UNITS command from the operator or

host.

6.4.19 SETTING UP (PROCESS Sub-State) — The

handler is satisfying conditions so that processing can

begin. This includes the receipt of any process

programs, the material to be processed, and machine-

specific calibration. While in this state, the handler can

be single-stepped through each process in order for the

operator to ensure that the handler is moving the unit

correctly.