semi合集-English.pdf - 第3071页

SEMI E123-0703 © SEMI 2003 12 types, and f ormat of these parameters. HSEM does recommend a minimum list of data items for th e common handler process-sites. These include: 9.2.4.1 Thermal Conditioning Site Parameters • …

SEMI E123-0703 © SEMI 2003 11

Variable Name Notes

UnitCountInt

MediaCount

MediaCountInterval

MediaID

OperatorID

8.5.4 Units Ready Report — The table below contains variables that must be available and reported when units are

ready to be processed (i.e. at load complete).

Table 9 Required Variables at Load Complete

Variable Name Notes

ProcessSiteLoaded Site loaded status

ProcessSiteStatus List of sites that are available

ProcessSiteCount Total process site count

9 Process Program Management

9.1 Process Program Requirements

9.1.1 The HSEM requires that the capability of process

program management be fully supported for this class

of equipment. The HSEM also requires that the process

program have a structure that enables the user to build

process programs with default conditions that can be

overridden for a run. The concepts of process program

structure and process program variable parameters are

discussed in the following sections. The HSEM also

requires the following:

• Minimum, maximum, and default parameter values

must be defined for all process programs.

• Verification will occur when a process program is

downloaded to the equipment; the program syntax

must be verified by the equipment manufacturer.

• Parameter validation will occur when a process

program is downloaded. Parameters must be type

and range checked.

• Equipment should provide the functionality to

manually or interactively modify the parameters set

in the process program.

• An error message must be generated from the

handler if the process program parameters are

outside the range of the machine calibration.

9.2 Process Program Structure

9.2.1 A handler process program must contain the

following information:

• Machine-specific configuration parameters,

• Process-Site-specific information section,

• Media-Type-specific information section, and

• Unit (Unit/Package) information section.

9.2.2 When combined, this information constitutes a

complete process program. It is emphasized that the

HSEM does not enforce the exact format and data type

of each section. However, it does provide direction as

to what each section should consist of.

9.2.3 Machine-Specific Configuration Parameters —

Each brand or type of handler may have one or more

machine-specific configuration parameters. Examples

of such parameters would be input configuration,

number of process-sites, and output configuration. Even

though they are supplier-specific, these parameters

nevertheless play a vital role in the overall generation

or creation of a process program. Since the machine-

specific parameters can differ from one equipment

manufacturer to another, the HSEM does not specify

the exact number, data types, and format of these

parameters. These details are left to the sole discretion

of the equipment manufacturer.

9.2.3.1 In addition, handler process program must

support user defined mapping of logical test bin

categories that are specific to test recipes and test

equipment to handler sort categories. The mapping

must be easy to define and flexible allowing ranges to

be specified. Logical bin categories can range from 1–

9999.

9.2.4 Process-Site-Specific Information — This

process-site-specific section contains information

necessary for the configuration and execution of the

various process-sites configured on the equipment.

Each equipment may contain different process-site

configurations. Since these configurations will differ,

the HSEM does not specify the exact number, data

SEMI E123-0703 © SEMI 2003 12

types, and format of these parameters. HSEM does

recommend a minimum list of data items for the

common handler process-sites. These include:

9.2.4.1 Thermal Conditioning Site Parameters

• Temperature Set Point

• Upper-Temp Guardband Set Point

• Lower-Temp Guardband Set Point

• Soak Time

• Test-Site Temp

9.2.4.2 Test-Site Parameters

• Device Pick Up/Place

• Speed of Device Pick Up/Place

• Device Insertion/Retraction

• Speed of Device Insertion/Retraction

• Speed of Index Mechanism

• Insertion/Place Force/Stroke

9.2.4.3 Lead Condition Site Parameters

• Device Pick Up/Place

• Speed of Device Pick Up/Place

• Speed of Insertion

• Insertion Force/Stroke

9.2.4.4 Sort Sites Parameters

• Device Pick Up/Place

• Speed of Device Pick Up/Place

• Device Index

• Insertion Force/Stroke

• Sort Category Set

• Sort Category – Full/Empty/Partial

• Sort Media – In place or empty.

9.2.5 Unit/Device-Specific Information — The

unit/device-specific section contains information

necessary for the configuration and execution of the

specific units to be handled by the equipment. HSEM

requires a minimum list of data items be available to

determine package dimensions, terminal dimensions,

package height, and coplanarity.

9.2.6 Media-Type-Specific Information — The media-

type-specific information section contains information

necessary for the configuration and execution of the

specific media type in use on the equipment. HSEM

requires a minimum list of data items be available to

determine row/column count, X/Y distance to a cell,

device height in tray, media height, and X/Y pitch.

9.3 Methods of Process Program Creation — The

method by which an equipment manufacturer creates a

process program may be unique to that manufacturer.

However, it is required that the customer at least be

given both of the following options for the creation of a

process program.

9.3.1 Off-Line Development — Using this method, the

customer is given a set of software tools (process

program compilers, decompilers, and debuggers) that

enables him/her to generate or create a process program

using the above mentioned information (flow,

parameter, functional test, etc.). The newly generated

process program then is downloaded onto a specific

handler, verified, and is now ready to be selected and

executed locally by the operator or remotely by the host

computer. If this process is used, the supplied software

tools should closely mimic or simulate a handler so that

a user can create a complete process program. In many

situations, minor adjustments may be needed to the

process program on the equipment before it is

completely ready for execution.

9.3.2 On-Line Development — The second option is to

enable the user to download the above-mentioned

information (tables or files) onto the equipment and

create the actual process program on the equipment

itself.

10 Remote Commands

10.1 The purpose of this section is to identify remote

commands, command parameters, and valid commands

versus states in the processing state models.

10.2 Requirements

• All the remote commands defined by HSEM are

required.

• The alphanumeric strings defined by HSEM for

remote commands and command parameters are

required.

• If additional remote commands are supported, then

the “Remote Command Versus Valid States”

matrix must be generated for these additional

commands. Place an “X” in the table for each state

in which a given command is valid.

10.3 Remote Command Descriptions

10.3.1 ABORT — This command terminates the current processing. ABORT makes no guarantee about completion

of the current unit. Levels of ABORT may be specified by selecting a particular process site or the equipment itself.

“Cleanup” removes all material that belongs to the lot and then the equipment enters the aborting state.

Parameter Req/Ind Rsp/Cnf Comment

RemoteCommand M “ABORT”

ProcessSiteID C - ID of handler process site.

Cleanup C -

Ack - M Response acknowledge.

Status - C Error code and Error text if any

10.3.2 BIN-UNITS — This command instructs the handler to start unloading the units from process sites and

transfer to output locations. The required bin list parameter combined with the currently loaded mapping of bin

values to output locations will tell handler how to disposition the units.

Parameter Req/Ind Rsp/Cnf Comment

RemoteCommand M - “BIN-UNITS”

Bins M - Bin results of current processed units, one bin value per test site.

Bin values for disabled or empty sites are ignored.

Ack - M Response acknowledge.

Status - C Error code and Error text if any.

10.3.3 BREAK-CONTACT — This command instructs the handler to break contact on the unit(s) at the specified

site(s). This allows user to remove parts from socket(s), replace socket(s) if applicable, perform testhead calibration

etc.

Parameter Req/Ind Rsp/Cnf Comment

RemoteCommand M - “BREAK-CONTACT”

Sites M - List of sites to break contact. Empty list implies all sites.

Ack - M Response acknowledge.

Status - C Error code and Error text if any.

10.3.4 DISABLE-SITE — This command instructs handler to disable sites from been used for processing.

Parameter Req/Ind Rsp/Cnf Comment

RemoteCommand M - “DISABLE_SITE”

Sites M - List of sites to disable. Empty list implies all sites.

Ack - M Response acknowledge.

Status - C Error code and Error text if any.

10.3.5 ENABLE-SITE — This command instructs the handler to enable sites for processing.

Parameter Req/Ind Rsp/Cnf Comment

RemoteCommand M - “ENABLE-SITE”

Sites M - List of sites to enable. Empty list implies all sites.

Ack - M Response acknowledge.

Status - C Error code and Error text if any.