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SEMI E123.1-0703 © SEMI 2003 3 Service SECS-II Field Values Req. Description RCMD “BIN-UNITS” Y CPNAME 1 “BINS” Y Bins parameter. BIN-UNITS CPVAL 1 L, n 1. U4 2. U4 : n. U4 Y Bins value. List of bin results for current p…

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SEMI E123.1-0703 © SEMI 2003 2
Service Name Stream, Function SECS-II Message Name
PP-SELECT S2,F41/F42 Host Command Send/Acknowledge
PRELOAD-UNITS S2,F41/F42 Host Command Send/Acknowledge
PURGE S2,F41/F42 Host Command Send/Acknowledge
RECONTACT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-TOOL-COUNTS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESUME S2,F41/F42 Host Command Send/Acknowledge
START S2,F41/F42 Host Command Send/Acknowledge
STOP S2,F41/F42 Host Command Send/Acknowledge
5.3 Event Message Mapping
5.3.1 Table 2 defines the relationships between SEMI E123 collection events and SECS-II messages. Conventions
and table field definitions similar to mapping table for the services, here Event Name specifies the event defined in
SEMI E123.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All events defined in SEMI E123 S6F11/12 Event Report Send/Acknowledge
5.4 Service Parameter Mapping
5.4.1 Table 3 defines the relationships between SEMI E123 service parameters and SECS-II data definitions or
parameter fields in the mapped streams and functions. Parameters for acknowledgements or responses will follow
SECS-II specification for that stream and function, no service specific error codes are defined in this specification.
Descriptions of each table column are described below.
5.4.2 Service — Specifies the service whose parameters are described.
5.4.3 SECS-II Field — Specifies the SECS-II data item or message parameter used by the service. In this
specification, the DATAID and OBJSPEC fields are unspecified for services using the S2F49 SECS-II message.
Their values are to be ignored or used for implementation specific purposes.
5.4.4 Values — Value or SECS II format for the specified field. Formats are specified using the SML notation as
defined in appendices of SEMI E30 (GEM).
5.4.5 Req. — Indicates whether the specified field or parameter is required or not. If an optional CPNAME
parameter is used, the corresponding CPVAL must also be given.
5.4.6 Description — Provides a brief description of the SECS-II field in relation to the service parameters defined
in SEMI E123.
Table 3 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
RCMD “ABORT” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
CPNAME
2
“CLEANUP” N Cleanup parameter.
ABORT
CPVAL
2
BOOLEAN N Cleanup value. If TRUE, remove all materials to
outputs.
SEMI E123.1-0703 © SEMI 2003 3
Service SECS-II Field Values Req. Description
RCMD “BIN-UNITS” Y
CPNAME
1
“BINS” Y Bins parameter.
BIN-UNITS
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Bins value. List of bin results for current
processed units, one bin value per process site
beginning with site 1. Bin values for disabled or
empty sites are to be ignored.
L, n (n = total number of sites)
1. Site 1 Bin Value
2. Site 2 Bin Value
3. …
n. Site n Bin Value
RCMD “BREAK-CONTACT” Y
CPNAME
1
“SITES” Y Sites parameter.
BREAK-CONTACT
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to break contact. Zero-
length list indicates all sites.
Ex.
L, n (n = number of sites selected)
1. ID of 1
st
site
2. ID of 2
nd
site
3. …
n. ID of nth site
RCMD “DISABLE-SITE” Y
CPNAME
1
“SITES” Y Sites parameter.
DISABLE-SITE
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to disable. Zero-length
list indicates all sites.
RMCD “ENABLE-SITE” Y
CPNAME
1
“SITES” Y Sites parameter.
ENABLE-SITE
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to enable. Zero-length
list indicates all sites.
RCMD “MAKE-CONTACT” Y
CPNAME
1
“SITES” Y Sites parameter.
MAKE-CONTACT
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to make contact after a
break contact command. Zero-length list
indicates all sites.
RCMD “PAUSE” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
PAUSE
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
SEMI E123.1-0703 © SEMI 2003 4
Service SECS-II Field Values Req. Description
RCMD “PP-SELECT” Y
CPNAME
1
“PPID” Y ProcessProgramID parameter.
CPVAL
1
A[80] Y The ID of the program to be loaded.
CPNAME
2
“PROCESSSITEID” N ProcessSiteID parameter.
CPVAL
2
U4 N ProcessSiteID value. ID of handler process site.
CPNAME
3
“LOTID” N LotID parameter.
PP-SELECT
CPVAL
3
A[1..40] N LotID value. ID of lot to be processed with this
program. This is an optional parameter that has
implementation specific meanings.
PRELOAD-UNITS RCMD “PRELOAD-UNITS” Y
PURGE RCMD “PURGE” Y
RCMD “RECONTACT” Y
CPNAME
1
“SITES” Y Sites parameter.
RECONTACT
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to re-contact. Zero-
length list indicates all sites.
RCMD “RESET-TOOL-
COUNTS”
Y
CPNAME
1
“SVIDLIST” Y StatusVariableList parameter.
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y StatusVariableList value. List of status variables
to reset, list by SVID.
CPNAME
2
“PROCESSSITEID” N ProcessSiteID parameter.
RESET-TOOL-
COUNTS
CPVAL
2
U4 N ProcessSiteID value. ID of handler process site.
RCMD “RESUME” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
RESUME
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
RCMD “START” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
START
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
RCMD “STOP” Y
CPNAME
1
“PROCESSSITEID” N ProcessSiteID parameter.
CPVAL
1
U4 N ProcessSiteID value. ID of handler process site.
CPNAME
2
“CLOSELOT” N CloseLot parameter.
STOP
CPVAL
2
BOOLEAN N CloseLot value. This is an optional parameter
that has implementation specific meanings.