semi合集-English.pdf - 第3088页

SEMI E123.1-0703 © SEMI 2003 11 R1-1.4 Multi-Site Run Scenario R1-1.4.1 Th is is a run scenario with 64 test-sites and op tio nal GEM events all turned on with no errors of any type occurring. COMMENT HOST EQUIPMENT COMM…

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SEMI E123.1-0703 © SEMI 2003 10
Host Acks Alarm S5,F2-->
ProcessPause
Host sends operator
to clear jam.
Host sends resume. S2,F41-->
<--S2,F42 Handler Acks and resumes.
Processing
Handler cycles devices...
... until ...
Host asks for S6,F15-->
Temperature x.
<--S6,F16 Handler sends Temp.x.
...
<--S6,F11 Event : HandlerEmpty
Host Acks Event S6,F12-->
Host commands S2,F41-->
Stop.
<--S2,F42 Handler acks Rmt.Cmd.
Stopping
<--S6,F11 Event : Lot Completed
Host Acks Event S6,F12-->
Idle
Host requests S6,F15-->
end-of-lot-report.
<--S6,F16 Handler sends report.
SEMI E123.1-0703 © SEMI 2003 11
R1-1.4 Multi-Site Run Scenario
R1-1.4.1 This is a run scenario with 64 test-sites and optional GEM events all turned on with no errors of any type
occurring.
COMMENT HOST EQUIPMENT COMMENT
Host selects GEM Alarms S5,F3-->
to enable (list).
<--S5,F54 Alarms xyz ON.
Host selects GEM Events S2,F37-->
to enable (list).
<--S2,F38 Events xyz ON.
Host selects Trace S2,F23-->
Data Item(s).
<--S2,F24 Trace Data Item x ON.
Host selects S2,F41-->
process program.
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host requests S2,F41-->
start-of-lot report.
<--S2,F42 Equip sends report items.
Host commands S2,F41-->
start-of-lot.
<--S2,F42 Equip Acks Start.
... for each trace item
period.
<--S6,F1 Trace Event x SEND.
Host receives and S6,F2-->
Acks Trace Item x.
... for each port event
SEMI E123.1-0703 © SEMI 2003 12
(tray/tube).
<--S6,F11 Event : PortLoaded
Host Acks Event S6,F12-->
... Handler cycles devices ...
... for each device report
internal states.
<--S6,F11 Event : DeviceClearsInput
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceEntersTemp
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceClearsTemp
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceEntersQueue.x
Host Acks Event S6,F12-->
<--S6,F11 Event : StartTest.Contactor.x
Host Acks Event S6,F12-->
<--S6,F11 Event : EndTestReceived.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceBinReceived.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceClearsContactor.x
Host Acks Event S6,F12-->
<--S6,F11 Event:DeviceEntersUnloadQueue.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceUnloaded.HardbinX
Host Acks Event S6,F12-->
... for each full/empty tray/tube on
input,output.
<--S5,F1 Alarm : ContainerReplaceRequest.x
Host Acks request. S5,F2-->
Note that the messages reporting the above internal states may require sub-addressing
of test-sites and ports similar to the tester SEM.