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SEMI E125-0305 © SEMI 2003, 2005 1 SEMI E125-0305 SPECIFICATION FOR EQUIPM ENT SELF DE SCRIPTION (EqSD) This specification was technically approved by the Globa l Information & Control Committee and is the direct res…

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SEMI E123.1-0703 © SEMI 2003 15
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SEMI E125-0305 © SEMI 2003, 2005 1
SEMI E125-0305
SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published July 2003; previously published July
2004.
NOTICE: The designation of SEMI E125 was updated during the 0305 publishing cycle to reflect the creation of
SEMI E125.1.
Contents
1 Purpose .......................................................................................................................................................................2
1.1 Specification Purpose ..........................................................................................................................................2
2 Scope ..........................................................................................................................................................................2
2.1 In-scope ...............................................................................................................................................................2
2.2 Out of Scope.........................................................................................................................................................2
3 Limitations..................................................................................................................................................................2
3.1 Abstract Model ....................................................................................................................................................2
3.2 Other Limitations.................................................................................................................................................2
4 Referenced Standards .................................................................................................................................................2
4.1 SEMI Standards...................................................................................................................................................2
4.2 ISO Standards......................................................................................................................................................3
4.3 Other Standards...................................................................................................................................................3
5 Terminology ...............................................................................................................................................................3
5.1 Abbreviations and Acronyms...............................................................................................................................3
5.2 Definitions ...........................................................................................................................................................3
6 Conventions................................................................................................................................................................4
6.1 Document and Notation Conventions..................................................................................................................4
6.2 Terms...................................................................................................................................................................5
7 Background.................................................................................................................................................................5
7.1 Motivation............................................................................................................................................................5
8 Overview ....................................................................................................................................................................6
8.1 Equipment Metadata Organization .....................................................................................................................6
8.2 Accessing Equipment Metadata...........................................................................................................................7
9 Interfaces for Managing Equipment Metadata ...........................................................................................................7
9.1 Equipment Metadata Manager............................................................................................................................7
9.2 Metadata Client .................................................................................................................................................12
10 Equipment Metadata...............................................................................................................................................13
10.1 Management of Equipment Metadata..............................................................................................................13
10.2 Equipment Structure........................................................................................................................................13
10.3 Equipment Nodes.............................................................................................................................................13
10.4 Parameters.......................................................................................................................................................15
10.5 Parameter Types..............................................................................................................................................20
10.6 Units ................................................................................................................................................................28
10.7 Exceptions........................................................................................................................................................28
10.8 StateMachines..................................................................................................................................................29
10.9 ObjTypes..........................................................................................................................................................35
11 Requirements for Compliance ................................................................................................................................37
11.1 Compliance to Equipment Self-Description.....................................................................................................37
11.2 Table 55 provides a checklist for Equipment Self Description compliance. ...................................................37
SEMI E125-0305 © SEMI 2003, 2005 2
1 Purpose
1.1 Specification Purpose
1.1.1 This specification describes a method for allowing equipment suppliers to provide a description of the
variables, events, exceptions, and physical equipment configuration available from their equipment. With this
information available for consumption by software systems, it can be used as a tool to aid the process of integrating
equipment into a factory’s automation system.
2 Scope
2.1 In-scope
2.1.1 This document specifies the classes that suppliers are to use to describe essential data, events, and exceptions
provided by their equipment. The specification only describes information that is static in nature (that is,
information that does not change dynamically while the equipment is running). This document also specifies an
interface that clients can use to access this information.
2.1.2 This specification applies to all semiconductor manufacturing equipment that supports the data acquisition
interface defined in the SEMI specification for Data Collection Management.
2.2 Out of Scope
2.2.1 This specification does not define any new behavior required of the equipment other than that necessary for
retrieving information describing equipment configuration, interfaces, and available data, and keeping this
information current.
2.2.2 The details of any underlying concepts and behavioral models (for example, carrier management,
process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to
those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a client
can discover this implementation and any data it can produce is in scope for this specification.
2.2.3 This specification does not require that the metadata provided by the equipment be directly human readable.
It is expected that applications will be written to organize and present this information to human users in a form that
is easier for end users to digest.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Abstract Model
3.1.1 This specification is an abstract model only. Adjunct specifications must be developed to bind this
specification to an implementation technology.
3.2 Other Limitations
3.2.1 This specification does not define the mechanism used for determining how to locate clients that are to receive
notifications defined by this specification. It assumes that the equipment has established a communications context
with any clients that can submit requests, and has provided any context necessary to send notifications to those
clients.
3.2.2 This specification does not define the mechanism used for identifying or authenticating clients. It assumes
that clients can be uniquely identified, and that the equipment is capable of distinguishing requests originating from
different clients.
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)